Model: DP Lube Unit, Size: 1B, Thread: NPT, Port Size: 1, Accessory: Panel, Option: S1 [1b (w/o Oil ON)]

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 2,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 3/4, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 3/4, Drain Exhaust: Float switch, Flow Direction: [Right] From Left to Right, Size of Body: 1B, Accessory: Panel

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 2,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: Float switch, Flow Direction: [Right] From Left to Right, Size of Body: 1B, Accessory: Bracket

Part Number Description: BRACKET (ALDU600)   Product Line: E   Product Line Description: AIRLINE EQUIPMENT   Family Code: 106   Family Description: ALD DP LUBE UNIT   Class Code: 21   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

High Vacuum Angle Valve

Seal material FKM EPDM Barrel Perfluoro Symbol Nil N1 P1 Q1 R1 R2 R3 S1 T1 U1 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 XVD 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of Construction on page 418 for changed part. Number indicates parts number of Construction accordingly.

Made to Order

10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22 24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

1

13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 58 64 83 93 112 120

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Stainless steel is used for size 10 only. 97 Series CRBU2WU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type CRBU2WU10, 15, 20, 30-S 2 x S2 2 x S1 2 x S1 2 x S1 Free mounting rotary actuator A port B port 2 x R Angle adjuster Cap Figures above show actuators for 90 and 180 when B port is pressurized,and they show size 20 actuators.

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Series SV

General purpose Each T unit has 32 control points. 16 outputs 24VDC 10% External power supply A, B, D, E, F1, G, J1, J2, K, R1, R2, H, U, V Current consumption (Inside unit) 0.1A 0.3A C, Q SI manifold solenoid valve T unit OB unit SI unit SI unit Master unit Remote I/O unit Remote I/O unit S1 S2 SG S1 S2 R1 R2 SG FG 24V 0V S1 S2 R1 R2 SG FG 24V 0V S1 S2 R1 R2 SG FG SDA SDB RDA RDB SG FG

Table of Contents

Purchasing order is available in units of 10 pieces.

Model: U (DP Lube Unit), Size: 6 (1B), Thread: Rc(PT), Port Size: 10 (1)

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 2,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: [Not Provided] No, Flow Direction: [Right] From Left to Right, Size of Body: 1B, Accessory: None

Table of Contents

-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

PC Wiring System Series PCW

Input/output 10 seconds for 4 cables. 10 seconds for 4 cables. Output Elimination of branch unit The function of a branch unit is built-in a 16 point unit, allowing reduction of the number of units.

ZX

ZX Exhaust port DOWN button ZR Spacer 1 (For side mounting) Adjustment needle UP button Manual override (Non-locking) 10 ZM 20.5 41.5 51.5 10 21.6 (Mounting hole) 1 34.4 9.3 ZH RESET button SET button 3.6(Mounting hole) 1 10 22.6 3.6 2-R1.8 19 18.7 2-R1.8 (Mounting hole) (Mounting hole) 1 10 17.8 (Mounting hole) ZU 19 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

3 Port Solenoid Valve/

View A M12 connector e y w r Pin number q t 24 VG342-X87 Dimensions Dual Residual Pressure Release Valve (-X87) VG342(R)-5DZ-10 -S1 -X87 75.3 75 Safety limit switch Made by Rockwell Automation 34 74 Port size: 1/8" (Without check valve) Applicable tube O.D.: 8, 5/16" (With check valve) (External pilot port) Channel 1 Channel 2 Safety limit switch (made by Rockwell Automation) Part number:

2

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

Electric Actuator/Slider Type

20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500