Size: 20, Thread Type: N (NPT), Port Size: 02 (1/4), Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl: Sizes 20, 30, 40: Polycarbonate Bowl; Sizes 50, 60: Stainless Steel, Drain Port: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 30, 40), Indicator: w/o Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Name Plate and

Size: 20, Thread Type: NPT, Port Size: 1/4, Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl: Metal Bowl, Drain Port: w/Drain Cock, Indicator: w/o Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Name Plate and Caution Plate for Bowl in Imperial Units: psi, °F

Size: 20, Thread Type: NPT, Port Size: 1/4, Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl: Sizes 20, 30, 40: Polycarbonate Bowl; Sizes 50, 60: Stainless Steel, Drain Port: Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 30, 40, Indicator: w/o Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Name Plate and Caution Plate

Size: 20, Thread Type: N (NPT), Port Size: 02 (1/4), Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl: Sizes 20, 30, 40: Polycarbonate Bowl; Sizes 50, 60: Stainless Steel, Drain Port: w/Drain Cock, Indicator: L (w/Element Service indicator), Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Name Plate and Caution Plate for Bowl in

Size: 20, Thread Type: N (NPT), Port Size: 02 (1/4), Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl: Sizes 20, 30, 40: Polycarbonate Bowl; Sizes 50, 60: Stainless Steel, Drain Port: w/Drain Cock, Indicator: L (w/Element Service indicator), Flow Direction: R (Right to Left), Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Name Plate and Caution Plate for Bowl

Size: 20, Thread Type: N (NPT), Port Size: 02 (1/4), Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl: C (w/Bowl Guard), Drain Port: w/Drain Cock, Indicator: w/o Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Name Plate and Caution Plate for Bowl in Imperial Units: psi, °F)

PFxx-OMJ0005CN

NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT X694 IN OUT 73 X731 (Ar)(CO2) (ArCO2) 92:890:1080:2070:3060

VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

•

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

1

(mm) Auto Switch Mounting Height Auto switch model Band mounting D-H7l/H7lW D-H7NF D-H7BA D-C7l/C80 D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9l D-M9lW D-M9lA D-A9l D-H7C D-C73C D-C80C Hs Hs Hs Hs Hs 6 15 16 15 18 17.5 10 17 18 17 20 19.5 16 20.5 21 20.5 23.5 23 Bore size (mm) Auto switch model Rail mounting D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l D-A9lV D-F7l/J79 D-F7lW/J79W D-F7BA/F79F

2

D H Note) D is maximum diameter.

V

U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R (See Valve Section) VP34lR, VP54lR, VP74lR (See Valve Section) VNB Series (See Valve Section) S 40R H O W T O O R D E R VQ B A S E M O U N T E D S E R I E S (P L U GI N) S E R I E S Y SY X SX VQ 0 R O R D E R A S S TA N D A R D T Y P E S I Z E F O R E X T E R N A L P I L O T S I Z E 3 5 7 A S S TA N D A R D 1 2 O R D E R A S

Secondary Batteries

-900, D-M9BWSDPC-900 and D-A90L-900.

I

E R S E R I E S V Y D I M E N S I O N S S E E N E X T P A G E VY1 O O P T I O N T H R E A D B Bracket F Foot (A and 1 body sizes only) G Gauge (not available on D body) N Silencer P I L O T 0 Internal 1 External (not on VYID00) Nil Rc(PT) T NPTF F G(PF) N NPT) B O D Y S I Z E P O R T S I Z E Mounting Type Symbol Symbol P,A port R port Cv Hysteris Sensitivity Repeatability Notes: 1.

F

E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

ITV

x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit.

Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Tamper Proof and Flat Head Screw

AS231F-N02 NPT1/4 20, 25, 32, 40 AS321F-N02 AS331F-N02 NPT1/4 40, 50, 63 AS321F-N03 AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

AS1001F-23D-X214 AS AS-FE KE AS-FG AS-FP AS-FM AS-D AS-T AS-D AS-T ASP ASN AQ ASV AK VCHC ASS ASR ASQ 591