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www.stevenengineering.com A C T U AT O R S P R O D U C T S E L E C T O R PA G E 1.1 VA LV E S P R O D U C T S E L E C T O R PA G E 2.1 F L O W C O N T R O L E Q U I P M E N T P R O D U C T S E L E C T O R PA G E 3.1 F I T T I N G S A N D T U B I N G P R O D U C T S E L E C T O R PA G E 4.1 A I R P R E PA R AT I O N P R O D U C T S E L E C T O R PA G E 5.1 VA C U U M P R O D U C T S E L E

O I N S TA L L T H E A U T O S W I T C H S T R O N G M A G N E T I C F I E L D P R O O F A U T O S W I T C H (40~63) Courtesy of Steven Engineering, Inc. !

G E C T D DL S Z L 1, 2, 3, 4 (Only G)(Except G) 5, 6, 7 (Except DL)(Only T) (Only T) 17-4-13 2 Series VNB How to Order Seal material Body option Nil V Standard Vacuum pilot A B C NBR seals FKM seals EPR seals Thread type Bracket (valve size: 1/2/3/4.)

Contents Action CQSB12-S-PS CQSB12-T-PS 12 12 Kits include items !2, !3 and !4 from the table above. CQSB16-S-PS CQSB16-T-PS 16 16 Kits include item !3 Single acting Spring return Single acting Spring extend CQSB20-S-PS CQSB20-T-PS 20 20 from the table above. CQSB25-S-PS CQSB25-T-PS 25 25 Seal kits consist of item !

S and T (Because S function is also included in T.) The combination of K, L and M is not possible because an auto drain can only be attached to a single option. *2 The maximum operating pressure is 1.6 MPa. *3 Voltage symbol 20 (200 VAC) is the terminal block connection as standard. The Option S cannot be chosen.

S Coupler KK Tubing T S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 98 C O N T E N T S HRS100/150 Series Standard Type HRS

Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 163 C O N T E N T S HRSH Series Inverter Type HRS HRS

pressure dew point 7C 816 1029 1275 10C 960 1210 1500 91 A Refrigerant R134a (HFC) IDFAE Series 3E, 4E, 6E, 8E, 11E, 15E (Inlet air temperature: 35C) How to Order 23 IDFA 8E Nil A C G K L R T V Note 1) Size Size 3E 4E 6E 8E 11E 15E1 Voltage Symbol Voltage Single-phase 230 VAC (50 Hz) 23 Note) The voltages listed below are only applicable to the IDFA6E.

2 u t o !3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Fittings and Tubing S Coupler KK Tubing T S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH TD TL TLM Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 7 C O N T E N T S HRR Series Thermo-chiller

5 Guide Exhaust filter A Heat treated Stainless steel Polyvinyl formal t !6 Finger N.O. spring Stainless steel Stainless steel spring wire y !7 Roller stopper N.C. spring Nitrided Stainless steel Stainless steel spring wire u !8 Lever shaft Rod seal 10 to 25: Synthetic resin NBR !

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F MHZ2-10C/MHZL2-10C MHZ2-32C 250 Pressure 0.7 MPa Pressure 0.7 MPa Pressure Internal Grip Pressure 0.7 MPa Pressure 0.7 MPa 20 0.6 MPa 0.6 MPa 200 MHZA2, MHZ2, MHZL2 0.6 MPa 0.6 MPa Gripping force (N) Gripping force (N) 15 0.5 MPa 0.5 MPa 0.5 MPa 0.5

T DN: DIN terminal without connector WN: M12 connector E U E U T T [mm] Size Port size A B C D E F I K L M 70 1 1/4 132.6 26.5 42 125 21 51.5 43.5 67.5 57.5 53 80 1 1/2 139.3 30 42 132 21 54.5 46.5 72 60 60 90 2 150.3 35.5 42 150 21 59 52 81 69 71 Size Port size Grommet Grommet with PCB Conduit DIN terminal DIN terminal without connector M12 connector T U T U T U T U V T U T U 70 1 1/4 68.4

physical property values by circulating uid. m x C x (Tt T0) x V x C x T Q = = t t 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (Tt T0) t x 860 x V x 60 x C x T t x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller 6977 [W] = 7.0 [kW] Water bath

Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 74 C O N T E N T S HRS090 Series Standard Type HRS HRS

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

to 70C, With auto switch: 10C to 60C (No freezing) Mounting Bracket Part No.

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Combination of S and T (Because S function is also included in T.) Combination of K and V (Only one or the other may be attached.) Note 2) Standard specification is the power cable with plug.