AMPSeries

speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) 1MPa = 145 psi 1 l/min = 0.035 SCFM Viewing the graph: When using AMP320 at a flow rate of 500l/min, the upstream pressure is 0.037MPa. 1m = 3.28 ft. 6 Safety Instructions Series AMP These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

AMP

speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) Viewing the graph: When using AMP320 at a flow rate of 500l/min, the upstream pressure is 0.037MPa. 4 Series AMP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Secondary Batteries

Models 90-AMP220 90-AMP320 90-AMP420 Model Maximum flow capacity l/min (ANR) 200 500 1000 Port size (nominal size B) 1/4, 3/8 3/8, 1/2 1/2, 3/4 Mass (kg) 0.43 0.68 1.15 Bracket Part No. 90-AMP220 90-AMP320 90-AMP420 Applicable model Bracket assembly ( ) with 2 cap bolts with 2 spring washers 90-BM67 90-BM66 90-BM68 47 Air Filter 90-AF30 to 90-AF60 How to Order 90 AF 30 03 B Option/Semi-standard

Part Number Description: BRACKET AMP320   Product Line: E   Product Line Description: AIRLINE EQUIPMENT   Family Code: 149   Family Description: AMP CLEAN ROOM EXHAUST CLEANER   Class Code: 22   Part Code: 2   Reference Code:  D   Click here to report information errorImage shown may not match exact part number

Table of Contents

Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 16 Construction AS2200

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

MB

Bore size (mm) 32 40 50 63 80 100 125 Note 1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 MB-L12 Foot MB-F03 MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 MB-F12 Flange MB-C03 MB-C04 MB-C05 MB-C06 MB-C08 MB-C10 MB-C12 Single clevis Double clevis MB-D03 MB-D04 MB-D05 MB-D06 MB-D08 MB-D10 MB-D12 Note 1) Two foot brackets required for one cylinder.

10

DBore size [mm] 32 40 50 63 80 100 -X Axial foot MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Rod flange MB-F03 MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 Technical Data Note) Order two foots per cylinder. 413 MBKW Series Theoretical Force OUT (Unit: N) IN Bore size [mm] Rod dia.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

Tamper Proof and Flat Head Screw

AS22 0-01-ST Rc 1/8 12 14.3 R 1/8 AS22 0-F01-ST PF 1/8 14.6 7 18 35.6 14.1 1.5 32 AS22 0-N01-ST NPT 1/8 12.7 NPT 1/8 AS22 0-02-ST Rc 1/4 17 18 R 1/4 AS22 0-F02-ST PF 1/4 19.5 7 27.2 40.7 18 1.5 36.7 AS22 0-N02-ST NPT 1/4 17.5 NPT 1/4 AS32 0-02-ST Rc 1/4 19 22.5 R 1/4 AS32 0-F02-ST PF 1/4 24.3 9.5 30 55.3 22.4 1.5 49.3 AS32 0-N02-ST NPT 1/4 NPT 1/4 AS32 0-03-ST Rc 3/8 19 22.5 R 3/8 AS32 0-F03

70astamb1

-XC35 With coil scraper -X846 Fastener strips mounted on switch mounting grooves Bore size (mm) 32 40 50 63 80 100 (1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Foot MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 MB-F03 Flange Single clevis MB-C03 MB-C04 MB-C05 MB-C06 MB-C08 MB-C10 Double clevis MB-D03 MB-D04 MB-D05 MB-D06 MB-D08 MB-D10 Note 1) Order two foot brackets per cylinder.

MU

Bore size (mm) 63 50 40 32 25 Mounting bracket MU-L06 MU-F06 MU-L05 MU-F05 MU-L04 MU-F04 MU-L03 MU-F03 MU-L02 MU-F02 (1) Foot Flange Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Body mounting bolts are attached with the foot style and flange style. Auto Switch Mounting Bracket Part No. Note Mounting bracket part no.

mb1

-XC35 With coil scraper -X846 Fastener strips mounted on switch mounting grooves Bore size (mm) 32 40 50 63 80 100 (1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Foot MB-F03 MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 Flange Single clevis MB-C03 MB-C04 MB-C05 MB-C06 MB-C08 MB-C10 Double clevis MB-D03 MB-D04 MB-D05 MB-D06 MB-D08 MB-D10 Note 1) Order two foot brackets per cylinder.

MU

Bore size (mm) 25 32 40 50 63 Mounting bracket MU-L02 MU-F02 MU-L03 MU-F03 MU-L04 MU-F04 MU-L05 MU-F05 MU-L06 MU-F06 (1) Foot Flange Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Body mounting bolts are attached with the foot style and flange style. Auto Switch Mounting Bracket Part No. Note Mounting bracket part no.

MB1

Options Bore size (mm) Rod boot 32 40 50 Foot Note) MB-L03 MB-L05 MB-L04 Minimum strokes for mounting of auto switches Flange MB-F03 MB-F05 MB-F04 Standard stroke table Single clevis MB-C03 MB-C05 MB-C04 Refer to page 9 regarding the minimum stroke for the mounting of auto switches.

Square Tube Type Air Cylinder Series MB1

Options Bore size (mm) 32 40 50 Rod boot Foot Note) MB-L03 MB-L05 MB-L04 Minimum strokes for mounting of auto switches Flange MB-F03 MB-F05 MB-F04 Standard stroke table Single clevis MB-C03 MB-C05 MB-C04 Refer to page 9 regarding the minimum stroke for the mounting of auto switches.

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: F03 (Screw-in G3/8), VAC: F03 (Screw-in G3/8), EXH: F03 (Screw-in G3/8)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: S (-90 kPa), SUP: F03 (Screw-in G3/8), VAC: F03 (Screw-in G3/8), EXH: F03 (Screw-in G3/8), Accessories: N (w/o Bracket, w/o Silencer)

MU

Size Bracket 25 32 40 50 63 Foot (1) MU-L02 MU-F02 MU-L03 MU-F03 MU-L04 MU-F04 MU-L05 MU-F05 MU-L06 MU-F06 Flange Note 1) When ordering foot brackets, 2pcs. should be ordered for each cylinder. Note 2) Body mounting bolts are packed with the foot style and flange style. Precautions Be sure to read before handling.