A

M5) NAN110-N01 (1 8 NPT) NAN101-N01 (1 8 NPT) Model NAN101-01 NAN110-01 NAN120-M3 NAN120-M5 Port Size 18* 18* M3 M5 Noise Reduction (dB) 16 21 13 18 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temperature 5~150C / 40~300F Effective Orifice mm2 (Cv) 20 (1.1) 35 (1.9) 1 (0.05) 5 (0.27) Weight (gf) 9.5 20 1 3.3 H O W T O O R D E R SERIES AN SILENCER *Tapered thread ISO7/1 AN120-M3 (

VQZ1000/2000/3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB/CA1 Tube x Length T0604 x 1 m VQZ1121-C6 Speed controller AS2051F-06 Silencer AN120-M5 Tube x Length T0604 x 1 m VQZ2121-C6 Speed controller AS3001F-06 Silencer INA-25-46 Tube x Length T1075 x 1 m VQZ3121-C6 Speed controller AS4001F-10 Silencer AN101-01 2-7-2 3 Series VQZ Model

70pvpump

Max. 1.0 mg/m3 Downstream oil mist concentration (ANR)( 0.8 ppm) (2) Note 1) With auto-drain is 0.15 MPa Note 2) When compressor discharge oil mist concentration is 30 mg/m3 (ANR) 2 years, or when pressure drop reaches 0.1 MPa Element life Specifications Filter regulator + Mist seperator Air combination Series AC2040/3040 Model Model AC2040 AC3040 AC4040

25

Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.



VEX1130 3-01, 02 Foot (Option) 2-M3 x 0.5 (Mounting thread) 4-4.5 (Mounting hole) Pressure gauge (Option) A section view Air operated type 2-M5 x 0.8 Bracket E (Option) 2-4.5 , 1 8 1 4 (Mounting hole) 14-6-8 9 Precision Regulator Series VEX130 3 Body Ported VEX1330 3-02, 03, 04 Pressure gauge (Option) F.R.L.

Table of Contents

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Model Tightening torque Thread size 10-SY3000 M2 0.8Nm 0.16Nm 10-SY5000 10-SY7000 10-SY9000 M3 M4 M3 1.4Nm 0.8Nm 491

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

G: 300 H: 600 2-3.2 eauivalent Bracket (Lead wire length) (Mounting holes) 18.5 (Non-locking) Manual override 28 [34.5] 15.6 18.5 20 13.5 9 46.5 35.5 40.4 (GZ, GS: 41.1) [42.1] 91.7 (GZ, GS: 93.1) [95.1] R R P 11 0.5 10 5-M3 X 0.5 (Piping port) 7 7 [ ] for AC M plug connector (M): SYJ3 20-lMll-M3 3 4 5 3 4 5 L plug connector (L): SYJ3 20-lLll-M3 30.5 19.5 30.5 19.5 300 5.3 1.8 1.8 5.3

SX

A: Orange B: Green No. 1 terminal Power supply terminal (M3 thread) (The voltage indication marking is for 24 VDC.)

SY

SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) M4 x 31 (Flat nickel plated) SY3000-11-24 SY5000 SY5000-11-10 SY7000 SY7000-11-9 Note 2) For SY9000, the SUP port is only available on the end plate side. SY9000-18-2 (M3 x 42) SY9000 SY9000-11-1 Plug (white) Insert into unused cylinder ports and SUP/EXH ports. The minimum order quantity is 10 pieces. Order in multiples of 10.

VZ100/300/500

Note Mounting screw (M3 x 6) For valve unit (R port), Noise reduction: 21 dB or more, Effective area 5 mm2 Model Description Note) At rated voltage With foot bracket DXT170-34-1A Operating Pressure AN120-M5 (8 x 17l) Silencer M5 Note) Vacuum specifications (MPa) 1 (P) port R port 27 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0.4 Operating pressure range (MPa) 0 to 0.7 Type of actuation

5 Port Solenoid Valve SY Series

m Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer AS2051F-06 AN120

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

How to Order Valve T 5M N7 VQZ2120 SY Example/Valve C6 5M VQZ2120R SYJ External pilot specification Thread (Cylinder ports and P, R ports) SX VK Rc(PT) External pilot port N NPT VZ M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) T NPTF F G(PF) VF Note) R port of VQZ2000 is only G(PF) 1/16 VFR Cylinder ports VP7 Symbol M5 02 N1 N3 N7 N9 N11 Applicable tube O.D.

VQZ100V-OMT0001

No. 1 1 1 1 1 M3 M3 M3 M3 1/4 0.4~0.5Nm 1) 1) 1) 1) [ [ [ [ ] ] ] ] 1 ()ISO VG32 (MSDS) [ [ [ [ ] ] ] ] 1 ()ISO VG32 2 ()ISO VG32 (MSDS) 6 No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / , ( ( ( ( ) ) ) ) 5m ( ( ( ( ) ) ) ) 3 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 IP65 (IEC60529) IP65 7 No.VQZ100V-OMT0001 VQZ Series/ / / / L L L L /M /M /M /M ()() VQZ100 VQZ100 VQZ100

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Single Unit) Metal/Rubber Seal, Body Ported, Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ22(R)-G-C4/C6/M5 C4, C6, M5 C4: One-touch fitting for 4 2-3.5 mounting hole C6: One-touch fitting for 6 70 300 (Lead wire length) M5: M5 thread 22.5 29.5 19.3 R2.7 27 34 V100 A 11 15 SMC 2 8 Cover dia.1.6 Cross section 0.34 mm2 Manual override 3.5 20.5 SY 34 M3

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

How to Order Valve T VQZ212 5M N7 Example/Valve VQZ212R 5M C6 External pilot specification Thread (Cylinder ports, and P/R ports) Rc(PT) N NPT External pilot port T NPTF M3 X 0.5 (VQZ200) M5 X 0.8 (VQZ300) F G(PF) Note) R port of VQZ200 is only PF 1/16 Cylinder ports Symbol M5 02 N1 N3 N7 N9 N11 3/8" 1/8" 5/32" 1/4" 5/16" M5 Tube O.D.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB/CA2 Series CJ2 Series CM2 4 x 1 m Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AS2301F-04 6 x 1 m 4 x 1 m AS1301F-04 AN120-M5 SYJ5120-M5 SYJ5140-01 AN101

125

type Nil Rc F G N NPT T NPTF Symbol Port size A 1/4 B 3/8 C 1/2 Symbol Thread type Nil Rc F G N NPT T NPTF Sub-plate Base gasket VEX1 11 2 VEX4 4 Options/Part Number Description Part number VEX312-01 02 VEX322-01 02 VEX33202 03 04 VEX34202 03 04 Bracket (With bolt and washer) B VEX1-18-1A Foot bracket (With bolt and washer) F VEX1-18-2A VEX3-32-2A Pilot exhaust (PE) silencer Note) N AN120

VY511, VYU5

READY POWER OUT VALVE OUTPUT DC24V OV COM SOL.a SOL.b +24V SIG OV 7 10 4 20-M3 x 0.5 65 72 A view 82 0.2 92 87.6 58.4 62 8 35.5 A 1.15-39

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Operated Type Dimensions/Built-in Solenoid Valve Type/Air Operated Type (mm) 1in = 25.4mm PB1000 FLUID OUT 1/8 11 OUT 11 84 72 Mount with this surface (OUT port side) on top 7.5 41 60 45 UP SIDE Mounting position MODEL PB1011 PROCESS PUMP 16 (78.1) SUPPLY PRESS AIR 0.2~0.7MPa VOLTAGE DC ON OFF 2-4.5 Mounting hole MADE IN JAPAN 2-M4 x 0.7 Female mounting threads Thread depth 6 Silencer (AN120