VM

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR3100-01R Model VR3100-01G VR3100-01O 0.1 to 0.8 MPa 5 to 60C (No freezing) 100 c.p.m. or less Red Green VR3110-01R Model VR3110-01G Operating pressure Ambient and fluid temp.

VM

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR3100-01R Model VR3100-01G VR3100-01O 0.1 to 0.8 MPa 5 to 60C (No freezing) 100 c.p.m. or less Red Green VR3110-01R Model VR3110-01G Operating pressure Ambient and fluid temp.

ARM10/11

Note 4) When a regulator is not mounted on the manifold, use the following blank plate ass'y (with mounting screws and O-ring) For ARM1000: Part no. 136114A For ARM2000: Part no. 136214A ARM2000-4A2-01G How to Order Option: Pressure Gauge: G15-10-01 G15 10 01 JIS Symbol Common IN Individual IN Max. display pressure 10 1.0 MPa Connecting thread IN Not able to set the pressure excceding 1.0

VM

SlA Symbol Symbol VlA SlA VlA Model/Specifications Model/Specifications VR3100-01R VR3100-01G VR3100-01O 0.1 to 0.8MPa 5 to 60C (No freezing) 100 c.p.m or less Red Green VR3110-01R VR3110-01G Operating pressure Ambient and fluid temp. Frequency Color of indicator Port size (Nominal size) Weight Color of indicator Operation Operating pressure Ambient and fluid temp.

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)]

Miniature Regulator

pressure: 0.7 MPa 0.6 IR-A Outlet pressure (MPa) 0.5 ARJ310-01 IR 0.4 IRV 0.3 ARJ210-M5 0.2 VEX 0.1 SRH 0.0 0 100 200 300 400 500 SRP Flow rate (L/min (ANR)) SRF ITV IC ITVH ITVX PVQ VY1 Allows smaller mounting pitch Compact and lightweight (Main body 65 g) VBA VBAT Accommodates two types of threads 18.8 mm 18.3 AP100 Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) 82.5 ARJ310-01G

ARJ310

0.0 0 100 200 300 400 500 Flow rate l/min (ANR) Compact and light weight Allows smaller mounting pitch 18.3mm A Accommodates two types of threads Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) B C Panel type One-touch fitting feature introduced to series mm Weight Model A (Width) C (Depth) B (Height) Approx. 70g (Body: 65g) 4, 6 (metric size) 5/32", 1/4" (inch size) ARJ310-01G

Proposals for Energy Saving

Wiring specification Individual wiring (without terminal block box) Centralized wiring (with terminal block box on left side) Nil Example 1) NPN output, 4 stations, centralized wiring with terminal block box on left side, with bracket and gauge L Centralized wiring (with terminal block box on right side) R ISA11-4L-01BG Example 2) PNP output, single unit individual wiring, with gauge ISA15-1-01G

Miniature Regulator Series ARJ310

0.0 0 100 200 300 400 500 Flow rate l/min (ANR) Compact and light weight Allows smaller mounting pitch 18.3mm A Accommodates two types of threads Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) B C Panel type One-touch fitting feature introduced to series mm Weight Model A (Width) C (Depth) B (Height) Approx. 70g (Body: 65g) 4, 6 (metric size) 5/32", 1/4" (inch size) ARJ310-01G

Air Catch Sensor

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description

ARJ1020F

0.5 ARJ310-01 IR 0.4 VEX 0.3 AMR ARJ210-M5 0.2 0.1 ITV 0.0 0 100 200 300 400 500 IC Flow rate (/min (ANR)) VBA VE VY1 G PPA AL Allows smaller mounting pitch Compact and lightweight (Main body 65 g) 18.8 mm Accommodates two types of threads 18.3 Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) 82.5 Panel mounting type One-touch fitting feature introduced to series 41 ARJ310-01G

Table of Contents

0.5 ARJ310-01 IR 0.4 VEX 0.3 AMR ARJ210-M5 0.2 0.1 ITV 0.0 0 100 200 300 400 500 IC Flow rate (/min (ANR)) VBA VE VY1 G PPA AL Allows smaller mounting pitch Compact and lightweight (Main body 65 g) 18.8 mm Accommodates two types of threads 18.3 Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) 82.5 Panel mounting type One-touch fitting feature introduced to series 41 ARJ310-01G

SMC Electronic Switch Series Variations

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: 3 (0.008 to 0.6 MPa Setting)

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: 1 (0.005 to 0.2 MPa Setting)

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

For how to order the digital pressure switch, refer to page 709. 704 Direct Operated Precision Regulator/Modular Type Series ARP20/30/40 Conditions: Inlet pressure 0.5 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) Condition: Inlet pressure 0.7 MPa Flow Characteristics (Representative values) Pressure Characteristics (Representative values) ARP20(K) ARP20(K) Rc 1/4 0.50 0.25 0.45 ARJ

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

For how to order the digital pressure switch, refer to page 767. 762 Direct Operated Precision Regulator/Modular Type ARP20/30/40 Series Conditions: Inlet pressure 0.5 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) Condition: Inlet pressure 0.7 MPa Flow Rate Characteristics (Representative values) Pressure Characteristics (Representative values) ARP20(K) ARP20(K) Rc 1/4 0.50 0.25 0.45

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 2) For ARP20(K) only, the position of the pressure gauge is above the center of the piping.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 8) : Combination available for options : E1, E2, E3, E4. 1094 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Specifications Model 10-ARP20 (K) 10-ARP30 (K) 10-ARP40 (K) 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Port size Air Fluid 1.2 MPa Proof pressure 0.7 MPa Maximum operating pressure

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 8) : Combination available for options : E1, E2, E3, E4. 1094 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Specifications Model 10-ARP20 (K) 10-ARP30 (K) 10-ARP40 (K) 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Port size Air Fluid 1.2 MPa Proof pressure 0.7 MPa Maximum operating pressure