Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

ZP

Note 2) The symbol "" indicates buffer type "J" or "K". Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note 2) The symbol "" indicates buffer type "J" or "K".

ZP

Note 2) The symbol "" indicates buffer type "J" or "K". Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note 2) The symbol "" indicates buffer type "J" or "K".

ZP

-N01-B12 ZPX100-T01-B12 ZPX125-B01-B10 ZPX125-N01-B10 ZPX125-T01-B10 ZPX125-B01-B12 ZPX125-N01-B12 ZPX125-T01-B12 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X2-B01-B10 ZPA-X2-N01-B10 ZPA-X2-T01-B10 ZPA-X2-B01-B12 ZPA-X2-N01-B12 ZPA-X2-T01-B12 ZPA-X2-B01-B10

ZP

) t Vacuum inlet (Female thread) Width across flats G H H B5 M5 x 0.8 B01 Rc1/8 N01 NPT1/8 T01 NPTF1/8 F Width across flats J K A Model A B C D2 E F G H J K Vacuum inlet direction q Pad dia.

Mechanical Valves Series NVM, NVFM, NVZNI

0 039 in. (1mm) A B c D E F G H J K 3.92 '99.5',13.05 '77.51 0.96 0.87 (221 0.06 (1.s) o.12 (3) 't.57 (40) 0.96 24.51 1.20 t30.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses MECHANICAL VALVES HOWTO ORDER S NVM430-N01-34 Series NVM NVM430-N01-33 F O F 4 4 1 l b s ( 2 k g ) T T 900 oi (J !

IIIIIII

0 039 in. (1mm) A B c D E F G H J K 3.92 '99.5',13.05 '77.51 0.96 0.87 (221 0.06 (1.s) o.12 (3) 't.57 (40) 0.96 24.51 1.20 t30.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses MECHANICAL VALVES HOWTO ORDER S NVM430-N01-34 Series NVM NVM430-N01-33 F O F 4 4 1 l b s ( 2 k g ) T T 900 oi (J !

Compact and Lightweight

bracket is mounted 229 A ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L L-bracket (Bracket on a single side) K J H E F G 2 x D t C B A Long clamping screw set for 1 station required for assembly needs to be ordered separately.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 8.4 12.7 22.1 12.3 17.3 5/32" 9.3 7 9.6 28.8 30.1 25.1 8 33.8 10-32 UNF 16.5 26.1 21.3 11.4 3/16" 11.7 13.5 23.1 18.3 12 1/4" 16 1/8" 27.5 20.4 9.3 12.7 5/32" 17 13.4

A

www.stevenengineering.com I 5.16 AIR PREPARATION MODULAR TYPE ACCESSORIES END BLOCK ADAPTOR Port Sizes: M5 ~ 1Rc Allows for easy installation and maintenance H O W T O O R D E R P I P I N G A D A P T O R E10-M5 1000 S E R I E S E20-N01 2000 S E R I E S E20-N02 2000 S E R I E S E20-N03 2000 S E R I E S E30-N02 3000 S E R I E S E30-N03 3000 S E R I E S E30-N04 3000 S E R I E S E40-N03 4000

Table of Contents

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

VM

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-26 25 3 Port Mechanical Valve Series VM400 How to Order S 01 01 01 3 0 VM4 Suffix for actuator Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 01 1 8 Roller lever 01 Black 1 8 NPT N01 One way roller lever 02 Green SA 1 8 G F01 Straight plunger 05 Roller

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

AMJ How to Order AMV B01 H N 40 25 ZPT A18 J AEP Pad diameter (mm) Mounting thread Tightening torque (N m) HEP Mounting thread dia.

V

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

Table of Contents

Applicable related components Total stroke time (s) SV Solenoid valve Tubing Speed controller Solenoid valve Tubing Speed controller Silencer Silencer 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 SZ 200 400 CM2 20 MB 32 10% 30% 50% 70% 10% 30% 50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ

5 Port Solenoid Valve Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the P/A

ZP

Note 2) The symbol "" indicates buffer type "J" or "K". Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note 2) The symbol "" indicates buffer type "J" or "K".

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.

Table of Contents

Fixed 4% F .S.