CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

How to Order Manifold [Option] VV5Q 1 08 C6 U 1 1 J Option 10 Symbol Option Nil B Note 2) D D0 None With back pressure check valve DIN rail mounting CE compliant CE compliant Nil Q Connector entry direction 10 Clean series With DIN rail bracket (Without DIN rail) Copper/Fluorine/Silicone free + Low particle generation 21 DIN rail length specified (: Stations 02 to 16) Cable (Length) Top

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

How to Order Manifold [Option] VV5Q 1 08 C6 U 1 1 J Option 10 Symbol Option Nil B Note 2) D D0 None With back pressure check valve DIN rail mounting CE compliant CE compliant Nil Q Connector entry direction 10 Clean series With DIN rail bracket (Without DIN rail) Copper/Fluorine/Silicone free + Low particle generation 21 DIN rail length specified (: Stations 02 to 16) Cable (Length) Top

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in

SQ1000/2000

Dept. code Copy this page for use as needed. 122 Manifold Specification Sheet Series SQ1000/Plug Lead Unit q How to order manifolds F P J C SS5Q 1 4 08 D0 D (00T) Series SQ1000 For P, R port in inch size Plug lead Kit type q w e q Stations 01 w Electrical entry/Cable length e Option Note 2) None DIN rail length specified Note 2) Nil 02 to 24 B 1 station Kit type Entry direction Standard

0.4

DIN rail length specified (: Stations 02 to 16) 01 Note 4) Note 8) 1 station G1 1 set of regulator unit Note 10) Note 4) Note 8) SI unit part no. G2 2 sets of regulator unit Note 10) 08 Note 4) Note 8) 8 stations G3 3 sets of regulator unit SI unit specifications SI unit part no. Symbol Note 10) J Note 5) Note 8) Note) Max. 16 stations.

Mechanical Valves Series NVM, NVFM, NVZNI

HOW TO ORDER NVFil 250 -N02 02 S v"lrrs..i"" Tt L Rolter Material (01, 02, O6) : Acetal (Standard) NVFM 250(1) Cy1.0 NVZM 450(1) Cy0.55 S : Steel Pilot Supply 0 : Internal Pilot From "P" Port 1 = External Pilot Supply (Special Order Only) 00 : lhlve Body Only 0l = StandardCam Lever 02 = Cam Lever-One Way 05 = Plunger 06 = Roller Plunger, Inline 08 = Toggle Lever 30 = Push Button-Mushroom'

IIIIIII

HOW TO ORDER NVFil 250 -N02 02 S v"lrrs..i"" Tt L Rolter Material (01, 02, O6) : Acetal (Standard) NVFM 250(1) Cy1.0 NVZM 450(1) Cy0.55 S : Steel Pilot Supply 0 : Internal Pilot From "P" Port 1 = External Pilot Supply (Special Order Only) 00 : lhlve Body Only 0l = StandardCam Lever 02 = Cam Lever-One Way 05 = Plunger 06 = Roller Plunger, Inline 08 = Toggle Lever 30 = Push Button-Mushroom'

VM

4N-02 VM1100-4NU-02 VM1010-4N-02 VM1010-4NU-02 VM1110-4N-02 VM1110-4NU-02 VM1000-4N-08 VM1000-4NU-08 VM1100-4N-08 VM1100-4NU-08 VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 VM1000-4N-32R VM1000-4NU-32R VM1100-4N-32R VM1100-4NU-32R VM1010-4N-32R VM1010-4NU-32R VM1110-4N-32R VM1110-4NU-32R VM1000-4N-32B VM1000-4NU-32B VM1100-4N-32B VM1100-4NU-32B VM1010-4N-32B VM1010-4NU-32B VM1110

2/3 Port Valve

F H J F H J K F H J K VX22 05 6 02 03 02 03 VX23 05 6 VX2260-04 VX2360-04 23 35 25.5 40 23 35 25.5 40 83 91 89 97 62 69 65 72 25.5 28 25.5 28 83 91 89 97 54 62 57 65 41 44 41 44 83 91 89 97 54 62 57 65 60 62 60 62 48 50 48 50 100 108 106 114 54 62 57 65 95 97 95 97 62 64 62 64 1 4 3 8 22 11 27 28 14.5 30 1 2 4.1-9 Direct Operated 2 Port Solenoid Valve/Manifold Series VVX21/22/23 For Air,

V

H A U S T P O R T (B O D Y T Y P E O N LY) Max Operating Pressure 7 Bar / 100PSI M O D E L 07 1/4 09 5/16 11 3/8 Tube T01 1/8NPT T02 1/4NPT 06 6mm Tube 08 8mm Tube 10 10mm Tube 01 Rc 18 02 Rc 14 Operating Temperature Range 5 ~ 60C / 40~140F N Canada, USA Other (PT) Lubrication Forbidden N O Z Z L E D I A M E T E R V A C U U M P O R T 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm 06 6mm Tube 08 8mm

Hydraulic

SO-03 SO-04 SO-05 NT-02 NT-03 NT-04 AC-NI-50 8 8 9 11 M22 x 1.5 M24 x 1.5 M30 x 1.5 M33 x 2.0 20 25 32 40 30 36.9 43.9 47.3 5 6 8 10 26 32 38 41 12.5 16.5 21.0 23 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 15.0 19.6 25.4 27.7 26 32 38 41 13 17 22 24 Accessory Brackets (Optional) I-type single knuckle joint Bracket L tap 4-J counter bore 20: I-02 25: I-03 Material: Rolled steel

Smooth Cylinder/Low Speed Cylinder

B J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 CY 50, 63 YU-05 YA-05 YB-05 Material: Stainless steel CX CX 80 YU-08 YA-08 YB-08 (mm) 100 YU-10 YA-10 YB-10 Bore size (mm) B D E J M O Part no.

•

'-02 ~2 06 6 (Application: Refer to ListO) i 08 ~8 U Flat type Material a With buffer 04 4 Pad type.

Compact 5-Port Solenoid Valve

Specification External pilot (SUP/EXH block assembly) q e r t w y u i o 10 Side ported q Series t Valve stations w Type 1 JSY1000 3 JSY3000 5 JSY5000 L1m: 34 cores L2m: 17 cores Symbol Stations Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 16 16 stations 02 2 stations Specified layout*2 (Up to 32 solenoids available) 08 8 stations 02 2 stations Specified

Table of Contents

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Series VQ Base Mounted Metal Seal/Rubber Seal

A combination of J and N is unavailable. Indicate R for the valve with external pilot. 8 stations 08 Note 1) Insert L (top piping) or B (bottom piping) for elbow type. (VQ1000 only) Example) B6 (Elbow One-touch fittings for 6, bottom piping.) Indicate LM for models with elbow fittings and mixed cylinder port sizes.

Table of Contents

IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.