Vacuum System Peripherals:

(mm) Elbow type AS1301F-M5-X214 AS2301F-01S-X214 AS2301F-02S-X214 AS3301F-03S-X214 AS4301F-04S-X214 Misc. Universal type 3.2 4 6 8 10 12 AS1201F-M5-X214 AS2201F-01S-X214 AS2201F-02S-X214 AS3201F-03S-X214 AS4201F-04S-X214 100 M5 x 0.8 230 460 1 8 1 4 3 8 1 2 External dimensions are the same as those of Speed Controllers shown in the Best Pneumatics Vol. 15.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can be visually differentiated by the lock nut.

AS

03, 04 100 200 01, 23 100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201F, AS4211F AS4301F, AS4311F AS3201F, AS3211F AS3301F, AS3311F 10, 11, 12 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1500 1000 08, 09 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

03, 04 100 200 01, 23 100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201F, AS4211F AS4301F, AS4311F AS3201F, AS3211F AS3301F, AS3311F 10, 11, 12 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1500 1000 08, 09 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations

AS

Inch size Metric size 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 Control type 04 06 08 10 12 0 1 Meter-out Meter-in Use 1/8" tube.

AS

Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

A_HEC-OM-K001

Signal Black 1 AC180-242V Black 2 AC180-242V Green/Yellow PE Power supply cable (HED003-C2*, HED005-C2*) HED007-C2* Cable: 12AWG Length 2m Connector: DDK CE05-6A18-10SD-D Connect the power supply connector of Temperature Controller. Line No.

AS

Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 5 32" Control type 04 06 08 10 12 03 05 07 09 11 13 3 16" Meter-out Meter-in 0 1 AS-FG 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Thermo-con

Power Cable Connector: DDK CE05-6A18-10SD-D-BSS or equivalent Cable: 14AWG, O.D. 8.4 Wire color Contents 200 to 220 VAC Black 78.7 (2000) Black 200 to 220 VAC Power cable (Accessory) Green/Y ellow PE 154 Series HEC-W Peltier-Type Chiller Thermo-con (Water-cooled) Connectors HEC006-W2l/001-W5l/003-W5l 1.

ChemicalThermo-con

Facility water inlet 3/8" x 1/4" 0.28 Purge outlet (M5) (7) 4.6 (116) 0.28 (7) 0.7 (17) 19.6 (499) (0.5 (12)) 18.7 (475) 0.5 (12) 0.24 (6) 0.24 (6) 5.5 (140) 0.24 (6) 0.24 (6) Circulating FluidTube Size 4.3 (110) 1.08 (27.5) Circulating fluid tube size Heat exchanger model 1/2" x 3/8" HED007-HW13 3/4" x 5/8" HED007-HW19 0.49 (12.5) 78.7 (2000) Power Cable (Accessory) Connector: DDK CE05-6A18-10SD-D-BSS

Body Size: 6 (1/2 Basis), Thread: Metric Thread (M5)/R(PT), Port Size: 04 (1/2), Applicable Tube OD: 10 (Ø10 mm), Sealant: S (Sealant)

Type: Speed Controller, Body Material: [Brass] Brass + Electroless Nickel Plating, Control Method: Meter-Out, Flow Rate(l/min): 1,580, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): 0.1

Type: Speed Controller, Body Material: [Brass] Brass + Electroless Nickel Plating, Control Method: Meter-In, Flow Rate(l/min): 1,580, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): 0.1

Type: Speed Controller, Body Material: [Brass] Brass + Electroless Nickel Plating, Control Method: Meter Out / In, Flow Rate(l/min): 1,200, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): 0.1～1.0, Knob Type: With Flat-Blade

Body Size: 1/2 Basis, Style: Universal, Control Method: Meter-in, Port Size: 1/2, Applicable Tube OD: 10mm, Sealant: Sealant

Body Size: 4 (1/2 Basis), Style: 3 (Universal), Control Method: 1 (Meter-in), Port Size: 04 (1/2), Applicable Tube OD: 10mm, Sealant: S (Sealant)

Body Size: 4 (1/2 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Port Size: 04 (1/2), Applicable Tube OD: 10mm, Sealant: S (Sealant)

Body Size: 4 (1/2 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Port Size: 04 (1/2), Applicable Tube OD: 10mm, Sealant: S (Sealant)

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/2, Option: None, Types of Screw: R, Applicable Tube O.D. mm(mm