LFE-OMY0008

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

Flow Control Equipment

Model AS1200 AS1400 AS2200 AS3200 AS4200 M3/M5 M3 2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 4.1-19 / 1 8, / 1 4 / 3 8 / 1 2 In-line M3/M5 / 1 8, / 1 4 / 1 4, / 3 8 2.5 to 25 20 to 40 32 to 63 32 to 63 40 to 100 40 to 100 AS1000 AS2000 AS3000 AS3500 AS4000 AS5000 4.1-23 / 1 4, / 3 8 / 1 4, / 3 8, / 1 2 / 1 4, / 3 8, / 1 2 63 to 125 1 40 to 200 160 to 250 300 300 AS420 AS500 AS600 AS800 AS900

flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL, 1 1/2 PT, AIRLINE EQUIPMENT, AS FLOW CONTROL, JB, AS 1 1/2INCH STANDARD (PT), 6.79753 lb, ModelPort sizeFree flowControlled flowApplicable cylinderbore size (mm)Weight (g) Flow rate( /min (ANR))Effective area (mm2)Flow rate( /min (ANR))Effective area (mm2)AS900

in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, AS 1 1/2INCH STANDARD (NPT), AIRLINE EQUIPMENT, AS FLOW CONTROL, JD, AS 1 1/2INCH STANDARD (NPT), 7.33749 lb, ModelPort sizeFree flowControlled flowApplicable cylinderbore size (mm)Weight (g) Flow rate( /min (ANR))Effective area (mm2)Flow rate( /min (ANR))Effective area (mm2)AS900

flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL, 2 PT, AIRLINE EQUIPMENT, AS FLOW CONTROL, KB, AS 2 INCH STANDARD (PT), 6.47215 lb, ModelPort sizeFree flowControlled flowApplicable cylinderbore size (mm)Weight (g) Flow rate( /min (ANR))Effective area (mm2)Flow rate( /min (ANR))Effective area (mm2)AS900

VEX1

(12) DL12-02 C AS420 AN300 T1209 (12) DL12-03 VEX3 2 3 4 D AS420 AN400 SGP elbow 90 1 2 B SGP B 1 2 E AS420 AN400 90 elbow F G AS500 AN500 AN600 SGP B 90 elbow 90 elbow 90 elbow VEX350 3 4 SGP1B SGP1B AS600 VEX30 Port VEX31 VEX32 External pilot External pilot H AS600 AN600 I VEX370 External pilot Pilot exhaust Pilot exhaust SGP1 B 90 elbow 90 elbow 90 elbow 1 4 SGP1 B SGP2B AS700 AS800 AS900

LV50-OMQ0002

[F10] Sub screen Page 41 Flow direction [F20] External input Page 45 [F22] Analogue output Page 46 Free range analogue output for instantaneous flow: OFF [F30] Accumulated value display Page 47 OFF [F32] Setting of flow direction / back flow detection function.

AZ1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

•

.~ Vacuum 12-18 14,16 tube entry Applicable 110119 14,16 tube tube dia. f20 -f32 9l4,16,8 tube ri.~ , f40 -1s0 16,18 tube ~2 18 M8 x 1 Male thread . . Thread f lO 11 '6 MlO x 1 Male thread ~f'dpun~ing, dia. 120 -132 ' MlO x 1Male thread .. 40 -~ M14 x 1Male thread Buffer type Witho~t non-rotation .type (J ). non-rotpli;'~ tY~(K ) .. , .

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Table of Contents

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CLS

selections in accordance with the method given on page 9-9-6. 1569 180 200 998 250 813 9-9-9 10 Series CLS Rod Boot Material Mounting Bracket Part No. 125 140 160 180 200 250 Bore size (mm) Max. ambient temperature Symbol Rod boot material J 60C Foot (1) Nylon tarpaulin CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 CS1-L25 110C K Flange (2) Heat resistant tarpaulin CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20

KT10

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

PF2M7.eng

[inP] External input setting 5 [F20] [inP] [rAC] Accumulated value reset SET button Press this button to change to another mode and to set a value. [1-5] 1 to 5 V Voltage output (when voltage is output) [---] Analogue output is not selectable (for current type output) [F22] [AoUt] [AoUt] Analogue output setting 3 Displays the output status of OUT1 and OUT2.

PFMB.eng

PFMB7201 : If the error cannot be reset after the above measures are taken, then please contact SMC. [ inP] External input 3 [F20] [r AC] Accumulated flow external reset G1/4 21 mm PFMB7501 Mounting screws Screw is prepared by customer.

PFMC.eng

[H_2] Hysteresis of OUT2 [ inP] External input 3 [REACUM] Accumulated flow external reset 25 50 100 [F20] Accumulated flow error Do not touch the terminals and connectors while the power is on. Otherwise electric shock, malfunction or damage to the product can result.

PF3W7.eng

[F20] Setting of external input Accumulated flow external reset Free range analogue output for instantaneous flow: OFF * (Analogue output for fluid temperature) Temperature lower limit exceeded The fluid temperature is below -10 oC. Rise the fluid temperature. Avoid any sealing tape getting inside the piping. Ensure there is no leakage from loose piping.