VM

02 VM123-M5-02S VM133-M5-02 VM133-M5-02S Polyacetal roller One way roller lever Hard steel roller Straight plunger VM120-01-05 VM130-01-05 VM122-M5-05 VM132-M5-05 VM-08B VM-07BS VM-07B VM-06BS VM-06B VM-05B Polyacetal roller Hard steel roller VM120-01-06 VM120-01-06S VM130-01-06 VM130-01-06S VM122-M5-06 VM122-M5-06S VM132-M5-06 VM132-M5-06S Roller plunger Polyacetal roller Hard steel roller

VM

02 VM123-M5-02S VM133-M5-02 VM133-M5-02S Polyacetal roller One way roller lever Hard steel roller Straight plunger VM120-01-05 VM130-01-05 VM122-M5-05 VM132-M5-05 VM-08B VM-07BS VM-07B VM-06BS VM-06B VM-05B Polyacetal roller Hard steel roller VM120-01-06 VM120-01-06S VM130-01-06 VM130-01-06S VM122-M5-06 VM122-M5-06S VM132-M5-06 VM132-M5-06S Roller plunger Polyacetal roller Hard steel roller

VM

-M5-02 VM123-M5-02S VM133-M5-02 VM133-M5-02S Straight plunger VM120-01-05 VM130-01-05 VM122-M5-05 VM132-M5-05 VM-08B VM-07BS VM-07B VM-06BS VM-06B VM-05B Polyacetal roller Hard steel roller Polyacetal roller Hard steel roller Roller plunger VM120-01-06 VM120-01-06S VM130-01-06 VM130-01-06S VM122-M5-06 VM122-M5-06S VM132-M5-06 VM132-M5-06S Cross roller plunger VM120-01-07 VM120-01-07S VM130

Proposals for Energy Saving

VM-07BS VM-07B VM-06BS VM-06B VM-05B Straight plunger VM130-01-05 VM132-M5-05 Polyacetal roller Hard steel roller Roller plunger VM130-01-06 VM130-01-06S VM132-M5-06 VM132-M5-06S Polyacetal roller Hard steel roller Cross roller plunger VM130-01-07 VM130-01-07S VM132-M5-07 VM132-M5-07S Toggle lever VM130-01-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-

Table of Contents

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Q H 05 1 3 5 ZM JIS Symbol Air supply port Exhaust port Vacuum port Port size connection Nozzle diameter 05 07 0.5 mm 0.7 mm 3 5 M5 x 0.8 M3 x 0.5 Specifications Ejector System Circuit 10 1.0 mm 13 1.3 mm Applicable nozzle size (mm) Supply valve P Q Supply valve and release valve 0.5, 0.7, 1.0, 1.3 Air operated valve H M 0.35 MPa 0.5 MPa Supply pressure Components Port size M3 x 0.5 M5 x

ZMA

Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-27 8 Series ZMA Dimensions 111 S: Vacuum pressure switch trimmer Pilot valve for vacuum pressure T: Release period adjustment trimmer Pilot valve for vacuum release M5 x 0.8 through (P, E port) Release flow adjustment screw 3-Rc 1/8 SUP.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) port size Air release valve None With silencer box Nil 3/8 (Right side) 1/2 (Right side) 3/8 (Left side) 1/2 (Left side) 3/8 (Bottom) 1/2 (Bottom) Mixed 03R None With air release valve Nil SB 04R E 03L Thread type 04L 03Y Rc G NPTF Nil 04Y F 1(P), 3(R2), 5(R1) port size T 1/2 (Down side) 1/2 (Up side) 1/2 (Both sides) 3/4 (Down side) 3/4 (Up side) 3/4 (Both sides) 04D 04U 04B 06D 06U 06B

Body Size: M5 x 0.8, 10-32UNF, Control Type: Meter-in, Thread Type: R, Port Size: M5 x 0.8, Applicable Tubing O.D.: ø4, Seal Method: -, Option: -, Lock Nut Option: -

Body Size: M5 x 0.8, 10-32UNF, Control Type: Meter-in, Thread Type: R, Port Size: M5 x 0.8, Applicable Tubing O.D.: ø6, Seal Method: -, Option: -, Lock Nut Option: -

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 04 (ø4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 06 (ø6)

SV

(1 set) Single solenoid SV1100-5FU (4 sets) U side D side D D D D D D SS5V1-16S3AD-06B-C61 set (manifold part no.)

Pulse Valve

Because of this, the air flows to the OUT side of the pulse valve. q w Caution Selection of Pilot Valve p. 3 The figure shows the JSXFAF . 11 Pulse Valve Valve for Dust Collector JSXFA Series Replacement Parts Model Replacement part number Main valve assembly (Main valve + O-ring) Sub-valve assembly (Sub-valve + O-ring) Silencer JSXFA(E, F)-06-BJSXF-06B-KT JSXFA(E, F)-06-B-A JSXF-06B-A-KT

Body Size: M5 x 0.8, 10-32UNF, Control Type: Meter-in, Thread Type: R, Port Size: M5 x 0.8, Applicable Tubing O.D.: ø6, Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: Round Lock Nut

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 06 (ø6), Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: J (Round Lock Nut)

Stations: 4 Stations, AB Port: 04R (1/2, Right), Thread: F (G), Control: None, PR Port: 06B (3/4, Both Sides), PR Thread: F (G)

Stations: 5 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 10 (1), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 9 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 10 (1), P, R Port Location: U Side, Thread: T (NPTF)