Body Size: 6 (1/2 Basis), Port Size: N04 [Cylinder Side (NPT 1/2) Pilot Port (NPT 1/4)], Applicable Tube OD: 11 (Ø3/8")

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Flow Rate(l/min): 1,190, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut,

Body Size: 6 (1/2 Standard), Port Size: N04 (NPT1/2), Applicable Tubing O.D.: 11S (ø3/8")

Body Size: 1/2 Standard, Port Size: NPT1/2, Applicable Tubing O.D.: ø3/8"

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zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

A

S E R I E S E40-N04 4000 S E R I E S E40-N06 4000 S E R I E S E60-N06 5/6000 S E R I E S E60-N10 5/6000 S E R I E S mm Model Port size A B C E10-M5 M5x0.8 16 17.5 14 E20-N01 18 E20-N02 14 23 22 22 E20-N03 38 E30-N02 14 26 34.2 29 E30-N03 38 D I M E N S I O N S P I P I N G A D A P T O R E30-N04 12 40 34.2 29 E40-N03 38 33 42.2 35 E40-N04 12 E40-N06 34 50 42.2 35 E50-N06 34 36 44 46.2 E60-

Compact and Lightweight

DIN rail mounting bracket (Brackets on both sides) L x n pcs.+ J x 2 L ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 The above shown products cannot be mounted closely together, as width across flats of the screw-in connection will interfere with each other.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Note 2) The material of the lock nut option-J (round type) is brass. However, note that only the AS220 uses steel.

5-Port Solenoid Valve

SY Type 11/Bottom Ported Plug-in Connector Connecting Base: EX500 Gateway Decentralized System 2 (128 Points) p. 97 SS5Y-11S SY Type 11/Bottom Ported Plug-in Connector Connecting Base: EX500 Gateway Decentralized System (64 Points) p. 103 SS5Y-11S SY Type 11/Bottom Ported Plug-in Connector Connecting Base: EX250 p. 125 SS5Y-11S SY Type 11/Bottom Ported Plug-in Connector Connecting Base:

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS421FG-N04 NPT 1/2 Note 1) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS421FG-N04 NPT 1/2 Note 1) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Body Size: 6 (1/2 Basis), Port Size: N04 [Cylinder Side (NPT 1/2) Pilot Port (NPT 1/4)], Applicable Tube OD: 13 (Ø1/2"), Lock Nut: J (Round)

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Flow Rate(l/min): 1,190, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Note 2) The material of the lock nut option-J (round type) is brass. However, note that only the AS231FM uses steel. Note 3) The surface treatment of the lock nut option-J (round type) is electroless nickel plated. !2 q o !4 !7 !

Vacuum

I J , J -0.97 50 1.97 -6.67 -0.193 1 0 0.394 1 .333 -0.00193 0.10 0.00394 -0.01333 -0.000193 0.01 0.000394 -0.000133 Vacuum System Specif ication In the vacuum circuit, vacuum pressure and adsorption response time are affected by piping conditions (tubes, fitting joints, pads, etc.) and the characteristics of the workpiece.

Vacuum

I J , J -0.97 50 1.97 -6.67 -0.193 1 0 0.394 1 .333 -0.00193 0.10 0.00394 -0.01333 -0.000193 0.01 0.000394 -0.000133 Vacuum System Specif ication In the vacuum circuit, vacuum pressure and adsorption response time are affected by piping conditions (tubes, fitting joints, pads, etc.) and the characteristics of the workpiece.

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45 Mounting position U side D side J Symbol U D Ejector/Valve total stations 02 Stations Symbol Number of ejectors 1 to 10 stations A, B port size (Valve only) 2 SUP/EXH block assembly specifications ... ...

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0.035 J 0.090 J Air cushion Allowable kinetic energy (Effective cushion length) 0.07 J (9.4 mm) 0.18 J (9.4 mm) Stroke length tolerance +1.0 0 Made to Order (For details, refer to pages 463 to 472.)

2

J J Modular F.R.L.

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A AulO switch o o c: C' iii' JJ o Q, .J!