ZP

# # # # # B3 B5 U2 U4 U6 02 04 06 Female thread M3 x 0.5 M5 x 0.8 2 tubing 1 4 tubing 2 6 tubing?

ZP

# # # # # B3 B5 U2 U4 U6 02 04 06 Female thread M3 x 0.5 M5 x 0.8 2 tubing 1 4 tubing 2 6 tubing?

1

SY7000 Round head combination screw SY3000-23-24A (M2 x 32) SY5000-221-1A (M3 x 32.5) SY7000-221-1A (M3 x 36.5) Part numbers shown on the left are for 10 valves (20 pcs.). (30 pcs. for the SY7000) Valve mounting screw q Hexagon socket head cap screw SY3000-222-1A (M2 x 32) SY5000-222-1A (M3 x 32.5) SY7000-222-1A (M3 x 36.5) Part numbers shown on the left are for 10 valves (10 pcs.).

Table of Contents

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 15-2-77 6 Series KK Flow Characteristics Air (0 to 1 MPa) Water (0 to 0.4 MPa) KK2 KK2 0.007 0.14 Series KK2 (KK2S-M5M + KK2P-M5M) Series KK2 (KK2S-M5M + KK2P-M5M) 0.12 0.006 0.005 0.1 Flow rate m3/min (ANR) Flow rate m3/min Flow rate m3/min 0.08 0.004 0.06 0.003 Courtesy

KJ

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 15-2-77 6 Series KK Flow Characteristics Air (0 to 1 MPa) Water (0 to 0.4 MPa) KK2 KK2 0.007 0.14 Series KK2 (KK2S-M5M + KK2P-M5M) Series KK2 (KK2S-M5M + KK2P-M5M) 0.12 0.006 0.005 0.1 Flow rate m3/min (ANR) Flow rate m3/min Flow rate m3/min 0.08 0.004 0.06 0.003 Courtesy

ZP

# # # # # B3 B5 U2 U4 U6 02 04 06 Female thread M3 x 0.5 M5 x 0.8 2 tubing 1 4 tubing 2 6 tubing?

Vacuum Pad

# # # # # B3 B5 U2 U4 U6 02 04 06 Female thread M3 x 0.5 M5 x 0.8 2 tubing 1 4 tubing 2 6 tubing?

Table of Contents

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

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-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

ZP

Thread size Applicable pad O.D. symbol 04 06 08 10 15 T A3 A5 B3 B5 M3 x 0.5 (Male thread) M5 x 0.8 (Male thread) M3 x 0.5 (Female thread) M5 x 0.8 (Female thread) Pad O.D.

ZP

M3 x 0.5 M3 x 0.5 M5 x 0.8 Use the connection thread. 1 Refer to 2 to 8 for the thin flat type and thin flat type with ribs.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0806 x 1 m AS3001F-06 T0806 x 1 m AS3001F-08 AS3001F-06 T0604 x 1 m T0604 x 1 m SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m AS4001F-10 T0604 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m SY7120-02 SY7140-03 AS4001F-10 AS3001F-06 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10

V100

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

Table of Contents

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

Air Fittings & Tubing

D1 Port B D2 L1 L2 L3 L4 P Q1 Q2 M1 M2 min. port size a b 16 17 17 KM16-04-06-3 6 16 16 17 4 4 6 KM16-06-06-3 12.8 4 6 KM16-04-04-3 12.8 68 20.9 16 11 14.5 50 10.5 2.1-38 Miniature Fittings M3, M5, R(PT)1/8 Series M Hose nipple Barb fitting Tube Either nylon, soft nylon and polyurethane tubing.

smcmaintenancepartslist

AFM30 to AFM40-06 AFD30 to AFD40-06 Model Semi-standard specifications Note 2) Note 3) Note 3) With bowl guard With barb fitting Float type auto drain Bowl material With drain guide AFM20 AFD20 AFM30 AFD30 AFM40 AFD40 AFM40-06 AFD40-06 OUT IN N.C. N.O.

Table of Contents

max (from 3 of graph MY2H/M3) = 60 (Nm) MX M3 = m3 x g x X = 7.525 x 9.8 x 140.1 x 10-3 = 10.33 (Nm) m3 M3 MTS Load factor 3 = M3/M3 max = 10.33/60 = 0.17 MY 5.

ZP3

M3 x 0.5 8.5 Model Vacuum inlet direction q Pad dia.

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LVQ Metric sizes 4 04 06 4 6 N.C.

Table of Contents

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)