V

52.8 45.3 36.7 30.4 21 23 63 ASV510F-02-10S 10 R(PT)1/4 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 39.8 33.8 21 23 69 T H R E A D S E A L ASV510F-02-12S 12 R(PT)1/4 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 39.8 33.8 22 24 74 ASV510F-03-10S 10 R(PT)3/8 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 41.8 35.5 21 23 73 M3, M5 S 18 12 ASV510F-03-12S 12 R(PT)3/8 17 25.7 20.9 30 91.8 85.8

Flow Control Equipment

AS2301F-02, AS2311F-02 AS2201F-02, AS2211F-02 AS3201F, AS3211F AS4301F, AS4311F AS4201F, AS4211F AS3301F, AS3311F Supply pressure: 0.5MPa Supply pressure: 0.5MPa Supply pressure: 0.5MPa 16 25 6 400 1000 14 10, 12 1500 12 80, 10 20 12 Effective area (mm2) Effective area (mm2) 08 06 Effective area (mm2) 300 10 Flow (l/min(ANR)) Flow (l/min(ANR)) Flow (l/min(ANR)) 06 10 1000 4 15 500 8 04 200

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Size: 3/8 Basis, Style: Union Tee, Thread: M3, M5, U10/32, R, Port Size: R1/2, Tube Size: Ø12, Sealant: -, Option: -, Made to Order: -, Lock Nut: -

Size: 3/8 Basis, Style: Union Tee, Thread: M3, M5, U10/32, R, Port Size: R3/8, Tube Size: Ø12, Sealant: -, Option: -, Made to Order: -, Lock Nut: -

Size: 5 (3/8 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 04 (R1/2), Tube Size: Ø12

Size: 5 (3/8 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 03 (R3/8), Tube Size: Ø12

Size: 3/8 Basis, Style: Union Tee, Thread: M3, M5, U10/32, R, Port Size: R1/4, Tube Size: Ø10, Sealant: -, Option: -, Made to Order: -, Lock Nut: -

Size: 5 (3/8 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø10

Size: 5 (3/8 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø10, Sealant: S [Sealant (01,02,03,04)], Option: C (Spatter Cover)

Size: 5 (3/8 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø10, Sealant: S [Sealant (01,02,03,04)]

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): -, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread

Size: 5 (3/8 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø10, Sealant: S [Sealant (01,02,03,04)], Option: None, Made to Order: None, Lock Nut: J (Round)

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread +

1

D side Stations 3 All double wiring All double wiring All double wiring 12 02 09 02 12 02 12 stations 9 stations 12 stations Manifold base (5 stations) SS5Y3-50F2-05D-C6 2 stations 2 stations 2 stations All single wiring All single wiring All single wiring 12 12 12 12 stations 12 stations 12 stations J: PC wiring (20 pins) PH: Flat ribbon cable (10 pins) SS5Y3-50F2-05D-C6 1 set (Type 50

2

(12) AS231F-02-04(S)A 4 7.2 9.6 12 1/8 13 (12.7) 36.6 35 31.1 29.5 13.3 19 (20) AS231F-02-06(S)A 6 11.2 19 33.8 (33.9) 21.4 43.9 21 (22) AS231F-02-08(S)A 8 13.2 34.9 (35) 23.5 46 14.2 22 (22) AS231F-02-10(S)A 10 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (24) AS331F-02-06(S)A 6 8.2 16.5 29.9 (30) 17.5 40.1 1/4 17 (17.5) 12.9 13 13.3 42 (42) AS331F-02-08(S)A 8 13.2 37.1 23.5 59.9 14.2 43 (43

Micro Mechanical Valve Series VM1000

F.O.F. 4.5 mm 2.0 mm 2.5 mm 6 N Applicable tube Mounting hole 2 x 3.3 One way roller lever VM1000-4N-02 VM1000-4NU-02 VM1100-4N-02 VM1100-4NU-02 Symbol/2 port 3 port (A) 2 (A) 2 12 12 10 10 1 (P) 1 (P) 3 (R) 0.5 MPa supply Applicable tubing VM1100-4N-02 VM1000-4N-02 T0425 TU0425, T0403,TS0425 Side ported 3 port 2 port VM1100-4NU-02 VM1000-4NU-02 T.T. O.T. P.T.

Table of Contents

How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) T0425

Table of Contents

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5