Table of Contents

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

A

Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

Soft Start-up Valve AV2000/3000/4000/5000

Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

reduces flow setting time

First, tighten the threaded portion by hand, then use a proper wrench, which could be suitable for the width across flats of the hexagon body, to tighten it further at a wrench tightening angle shown in the table below. For a tightening torque guide, refer to the table below. For R, NPT Thread (With sealant) Tightening method 1.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

First, tighten the threaded portion by hand, then use a proper wrench, which could be suitable for the width across flats of the hexagon body, to tighten it further at a wrench tightening angle shown in the table below. For a tightening torque guide, refer to the table below. For R, NPT Thread (With sealant) Tightening method 1.

Body Size: 4000, Thread: Rc, Port Size: 1/2, Option: Silencer, Voltage: 24 VDC, Lead Wire: Type D, DIN Terminal w/Connector, Surge Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 4000, Thread: Rc, Port Size: 04 (1/2), Option: S (Silencer), Voltage: 5 (24 VDC), Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right

Table of Contents

6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !6 Needle Spacer Electroless nickel plated Brass POM (2) t !

Check Valve Series AK 1

Bushing type: AKB Metric Size Connection thread size R Weight (g) Effective area (mm2) 6.5 14 24 34 A H L Model Connection thread size AKB01-01S AKB02-02S AKB03-03S AKB04-04S 1/8 1/4 3/8 1/2 1/8 1/4 3/8 1/2 14 17 22 24 23.7 39.8 45.2 56.2 19.7 33.8 38.7 48.2 18 44 86 113 Reference dimensions of R thread after installation.

AKH/AKB Series

Note: 1in = 25.4mm 18mm2 = 1Cv 1g = 0.0353oz 4 Check Valve with One-Touch Fitting Series AKH/AKB Dimensions (mm) 1in=25.4mm Bushing Type: AKB Millimeter Size Connection thread size R (a) Weight g Effective area (mm) A Connection thread size (a) L H Model (b) 1/8 1/4 3/8 1/2 AKB01-01S AKB02-02S AKB03-03S AKB04-04S 14 17 22 24 23.7 39.8 45.2 56.2 19.7 33.8 38.7 48.2 1/8 1/4 3/8 1/2 18 44

AKH/AKB Series Check Valve with One-touch Fitting

Note: 1in = 25.4mm 18mm2 = 1Cv 1g = 0.0353oz 4 Check Valve with One-Touch Fitting Series AKH/AKB Dimensions (mm) 1in=25.4mm Bushing Type: AKB Millimeter Size Connection thread size R (a) Weight g Effective area (mm) A Connection thread size (a) L H Model (b) 1/8 1/4 3/8 1/2 AKB01-01S AKB02-02S AKB03-03S AKB04-04S 14 17 22 24 23.7 39.8 45.2 56.2 19.7 33.8 38.7 48.2 1/8 1/4 3/8 1/2 18 44

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

0 o u r t !1 q i !2 e !

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

IDX-OM-W035

[4x13] (M10) Unitinch [mm] A B C D E F G H J K L M N P Q R 31.5 34.2 IDFB55E 2 1.4 [800] [868] 18.5 33.7 5.0 17.9 4.3 9.8 2 0.5 19.70.1 3.0 27.60.04 20.7 20.40.2 [470] [855] [128] [455] [110] [250] [50] [13] [5002] [75] [7001] [526] [5195] [36] 35.4 38.1 IDFB75E 2 [900] [968] IDFB Series 6-3 6-2 IDX-OM-W035 6 6-4 IDFB22E-11 IDFB22E/37E-23 R GFCI GFCI R GFCI R GFCI L N PE R TB1 PE N

Self-seal Fittings Series KC

Bulkhead female union P. 77 KCE Use for transit connection of a tube and a male screw for installation of panel. 74 Series KC Self-seal Fittings M5 Half union: KCH M5 Applicable tube O.D. (mm) Effective orifice(mm 2) Weight (g) A Thread R(PT) Part No. H (Hex.)

Rotary One-touch Fittings Manifold Series KM

Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:

Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 04S (PT 1/2), A Side Port Size: 04S (PT 1/2), Knob Color: R (Red), Bracket: L (L Bracket)

Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 04S (PT 1/2), A Side Port Size: 04S (PT 1/2), Knob Color: R (Red)