ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Air Fittings Fitting Series For Special Environment

O e b u t ) h c n I ( . n i M e l o h . a i d d a e r h T T P N . o N t r a P H ) . x e H ( D L A * M . t W ) f g ( 6 9 . 0 ) 5 . 4 2 ( 1 8 . 0 ) 5 . 0 2 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 8 / 1 S 4 3 7 0 H R K 9/ 6 1 ) 9 2 . 4 1 ( 3 6 . 0 ) 6 1 ( 1 1 5 7 . 0 ) 9 1 ( 6 1 4 / 1 S 5 3 7 0 H R K 8 9 . 0 ) 5 2 ( 4 / 1 8 / 3 S 6 3 7 0 H R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 7 . 0 ) 5 . 8 1 ( 8 2 0 4

Rotary One-touch Fittings Series KS/KX

Model r e b m u N A f o t r o P l e d o M g n i t r o P e z i s t r o P B e z i s t r o P A c i r t e M " 2 3 / 5 " 4 " 4 / 1 " 6 " 6 1 / 5 " 8 t r o P A t r o P B h c n I 1 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 0 1 , 6 6 1 / 5 8 8 / 3 0 1 2 / 1 2 1 2 1 M K h c u o t e n O g n i t t i f d a e r h t T P N 0 1 , 6 4 / 1 T P N ) T P ( c R 4 / 1 d a e r h

Speed Controller with Indicator

First, tighten the threaded portion by hand, then use a proper wrench, which could be suitable for the width across flats of the hexagon body, to tighten it further at a wrench tightening angle shown in the table below. For a tightening torque guide, refer to the table below. For R, NPT Thread (With sealant) Tightening method 1.

KS/KX

(mm) 8 6 4 Connection thread Model 10 12 Male connector KSH KXH M5 X 0.8 M6 X 1.0 1 8 R(PT) R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Male elbow KSL KXL M5 X 0.8 M6 X 1.0 R(PT) 1 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Precautions Be sure to read before handling.

Table of Contents

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

A

Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

Soft Start-up Valve AV2000/3000/4000/5000

Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

reduces flow setting time

First, tighten the threaded portion by hand, then use a proper wrench, which could be suitable for the width across flats of the hexagon body, to tighten it further at a wrench tightening angle shown in the table below. For a tightening torque guide, refer to the table below. For R, NPT Thread (With sealant) Tightening method 1.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

First, tighten the threaded portion by hand, then use a proper wrench, which could be suitable for the width across flats of the hexagon body, to tighten it further at a wrench tightening angle shown in the table below. For a tightening torque guide, refer to the table below. For R, NPT Thread (With sealant) Tightening method 1.

Table of Contents

6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !6 Needle Spacer Electroless nickel plated Brass POM (2) t !

Check Valve Series AK 1

Bushing type: AKB Metric Size Connection thread size R Weight (g) Effective area (mm2) 6.5 14 24 34 A H L Model Connection thread size AKB01-01S AKB02-02S AKB03-03S AKB04-04S 1/8 1/4 3/8 1/2 1/8 1/4 3/8 1/2 14 17 22 24 23.7 39.8 45.2 56.2 19.7 33.8 38.7 48.2 18 44 86 113 Reference dimensions of R thread after installation.

AKH/AKB Series

Note: 1in = 25.4mm 18mm2 = 1Cv 1g = 0.0353oz 4 Check Valve with One-Touch Fitting Series AKH/AKB Dimensions (mm) 1in=25.4mm Bushing Type: AKB Millimeter Size Connection thread size R (a) Weight g Effective area (mm) A Connection thread size (a) L H Model (b) 1/8 1/4 3/8 1/2 AKB01-01S AKB02-02S AKB03-03S AKB04-04S 14 17 22 24 23.7 39.8 45.2 56.2 19.7 33.8 38.7 48.2 1/8 1/4 3/8 1/2 18 44

AKH/AKB Series Check Valve with One-touch Fitting

Note: 1in = 25.4mm 18mm2 = 1Cv 1g = 0.0353oz 4 Check Valve with One-Touch Fitting Series AKH/AKB Dimensions (mm) 1in=25.4mm Bushing Type: AKB Millimeter Size Connection thread size R (a) Weight g Effective area (mm) A Connection thread size (a) L H Model (b) 1/8 1/4 3/8 1/2 AKB01-01S AKB02-02S AKB03-03S AKB04-04S 14 17 22 24 23.7 39.8 45.2 56.2 19.7 33.8 38.7 48.2 1/8 1/4 3/8 1/2 18 44

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

0 o u r t !1 q i !2 e !

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R