LEC-OM071xx

C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H

1

Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B !

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

Body Size: 30, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 03 (3/8), Mounting Option: B (With Bracket), Float Type Auto Drain Option: Without Auto Drain, Pressure Gauge/Switch Option: E (Square embedded type pressure gauge with limit indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: J (Body Size 20: 1/8; Body Size 30 & 40:

Body Size: 30, Back Flow: w/o Backflow, Thread: NPT, Port Size: 3/8, Options: B+E, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: Body Size 20: 1/8; Body Size 30 & 40: 1/4, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge:

Knob Cover

Please prepare the padlock at the customers site. -8- 6Dimensions A B E D Piping Center C E D Piping Center AR-D,ARM-D series AW-D,AWM-D,AWD-D series A B C D E AR20(K)-D,AR20M(K)-D AW20(K)-D,AWM20-D,AWD20-D Applicable Part No.

-A, AW30(K)-B and equivalent models, Drain guide: -, Type: Case seal, Case material: -, Case seal material: NBR, Valve assembly material: -, Set nut: N/A, Drain guide: N/A, Barbed fitting: N/A, Case guard: N/A

-A, AW30(K)-B and equivalent models, Drain guide: -, Type: Case seal, Case seal material: NBR, Set nut: N/A, Drain guide: N/A, Barbed fitting: N/A, Case guard: N/A

AC Servo Motor Driver (MECHATROLINK-II type)

Lead Series Lead (Including Pn20E Pn210 symbol pulley ratio) A 12 65536 750 LEY25/LEYG25 B 6 375 LEY25D/LEYG25D C 3 131072 375 A 20 65536 1250 LEY32/LEYG32 B 10 625 LEY63D C 5 131072 625 A 16 1000 LEY B 8 500 LEY32D/LEYG32D C 4 250 65536 A 20 1250 B 10 625 C 5 131072 625 LEY63 5(2.86) L 229376 625 (Pulley ratio 4/7) H 20 1250 LEFS25 A 12 750 B 6 375 H 24 1500 LEFS32 A 16 1000 B 8 500 LEF

AC Servo Motor Driver (MECHATROLINK-III type)

Lead Series Lead (Including Pn20E Pn210 symbol pulley ratio) A 12 65536 750 LEY25/LEYG25 B 6 375 LEY25D/LEYG25D C 3 131072 375 A 20 65536 1250 LEY32/LEYG32 B 10 625 LEY63D C 5 131072 625 A 16 1000 LEY B 8 500 LEY32D/LEYG32D C 4 250 65536 A 20 1250 B 10 625 C 5 131072 625 LEY63 5(2.86) L 229376 625 (Pulley ratio 4/7) H 20 1250 LEFS25 A 12 750 B 6 375 H 24 1500 LEFS32 A 16 1000 B 8 500 LEF

Secondary Batteries

CE-certified Symbol EX124D-SDN1-X188 DeviceNet (Negative common) Q A, B port size (Inch) A, B port size (Metric) P, E port Applicable series P, E port Applicable series A, B port Symbol C4 C6 C8 M A, B port Symbol N3 N7 N9 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 A, B ports mixed One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Body Size: 40, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 03 (3/8), Options: BE (B+E), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: J (Body Size 20: 1/8; Body Size 30 & 40: 1/4), Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C

Body Size: 40, Back Flow: w/o Backflow, Thread: NPT, Port Size: 3/8, Options: B+E, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: Body Size 20: 1/8; Body Size 30 & 40: 1/4, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge:

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

Model Product series AC20/AC25/AC30/AC50/AC55/AC60 AC20A/AC30A/AC40A/AC50A/AC60A AC20B/AC25B/AC30B/AC50B/AC55B/ AC60B AC20C/AC25C/AC30C/AC40C AC20D/AC30D/AC40D AR20 (K) /AR25 (K) /AR30 (K) /AR40 (K) / AR50 (K) /AR55 (K) /AR60 (K) AW20 (K) /AW30 (K) /AW40 (K) /AW60 (K) F.R.L. combination Option/Part No.

AW30(K)-B and equivalent models, Drain guide: -, Type: -, Type: Pressure Gauge, Square Recessed Type, Case material: -, Valve assembly material: -, Set nut: N/A, Drain guide: N/A, Barbed fitting: N/A, Case guard: N/A