AIR COMBINATION

AC30*-B AR30-B AFM30-A AL30-A AR30-B AFM30-A AL30-A AR30-B AF40-A AF40-A AW40-B AF40-A AW40-B AC40*-B AR40-B AFM40-A AL40-A AR40-B AFM40-A AL40-A AR40-B AF40-06-A AF40-06-A AW40-06-B AF40-06-A AW40-06-B AC40*-06-B AR40-06-B AFM40-06-A AL40-06-A AR40-06-B AFM40-06-A AL40-06-A AR40-06-B AF50-A AW60-B AF50-A AC50*-B AR50-B AL50-A AR50-B AL50-A AF60-A AF60-A AC55*-B AR50

AIR COMBINATION

39.6 50 40 9 18 5 48 3/4 Optional specifications Semi-standard specifications Round type Metal bowl Round type With With With auto drain Metal bowl Metal bowl Metal bowl Model pressure gauge with level gauge pressure gauge barb fitting drain guide with drain guide with level gauge with drain guide (with color zone) H H B B B B B B B J J 26 77.9 59.3 AC10A-A 26 AC20A-A 58.5 59.5 37.5

Air Combination

Part name Main material AC50(A,B)-D AC20(A,B,C,D)-D AC30(A,B,C,D)-D AC40(A,B,C,D)-D AC40(A,B,C,D)-06-D AC60(A,B)-D (1) Seal HNBR Y220P-050S Y320P-050S Y420P-050S Y520P-050S Y620P-050S Note 1) The number in the table and structural drawing is consistent with the number in [8. How to Replace the Products] (P23) and [9. Disassembly Drawing] (P24).

Filter Regulator AW30, 40

Accessories AW40 Applicable models AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 Symbol Nil B C D E G P Contents With bracket Float type auto drain (N.C) Float type auto drain (N.O) With square embedded type pressure gauge (with limit indicator) With round pressure gauge (with limit indicator) Panel mount (with set nut) Direct operated type, Relieving type Note 1) Port size 02 03

Modular Type Regulators Series AR

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Option Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30 AR 25

Modular Type Air Filters Series AF

20 30 40 Symbol Nil B* H* Symbol 02 03 04 *Note: Bracket and/or panel mount nut are not assembled and are supplied loose at time of shipment.

Modular Type Lubricators Series AL

level gauge B B B B B B B Dimensions B Barb fitting Applicable tubing: T0604 Model Standard specifications Optional specifications Bracket mount P M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 A 25 40 53 70 75 90 95 B 77 115 142 176 176 250 268 C 26 36 38 40 38 41 45 D 12.5 20 26.5 35 35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50

Series 10-, 21- AW-B Filter Regulator

with level gauge With bowl guard Metal bowl with level gauge Metal bowl Semi-standard specifications B B B 10-/21-AW20-B 10-/21-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B 142.1 174.1 176.1 261.1 93.9 122.1 154.1 156.1 241.1 91.4 Dimensions B B B B Standard specifications Model Optional specifications Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

AW30: G43-10-01-X3 or AW40: G43-10-02-X3 is included.

P

X2709 2 B 02 30 R B AW Body size Flow direction Nil Flow direction: Left to right R Flow direction: Right to left 30 Body size 30 40 Body size 40 60 Body size 60 Bowl Port size 2 Metal bowl Symbol Port size Body size 30 40 60 02 Rc1/4 V V 03 Rc3/8 V V 04 Rc1/2 V 06 Rc3/4 V V 10 Rc1 V Mounting option1 Nil Without mounting option B2 With bracket H3 With set nut (for panel mount) Waterproof

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Note 9) : For thread type: NPT only Standard Specifications 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B 1/8, 1/4 1/4, 3/8 Model 1/4, 3/8, 1/2 3/4 3/4, 1 Port size 1/8 Pressure gauge port size Air Fluid 5 to 60C (with no freezing) Ambient and fluid temperature 1.5 MPa Proof pressure 1.0 MPa Maximum operating pressure 0.05 to 0.85 MPa Set pressure

AW20-B to AW60-B

Standard Specications Model AW20-B AW30-B AW40-B AW40-06-B AW60-B Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 Pressure gauge port size Note 1) 1/8 Fluid Air Ambient and fluid temperature Note 2) 23 to 140F (5 to 60C) (with no freezing) Proof pressure 218 psi (1.5 MPa) Maximum operating pressure 145 psi (1.0 MPa) Set pressure range 7.3 to 123 psi (0.05 to 0.85 MPa) Nominal filtration

Table of Contents

A, B, EA, EB port) Nil R External pilot Internal pilot 1 4 3 8 02 03 Plug-in VFR3000 P 02 Thread type Non plug-in VFS3000 S 02 Nil F G Rc N NPT NPTF T B Plug-in VFR3000 P 02 Non plug-in VFS3000 S 02 B Piping port (P, A, B, EA, EB port) Note) Mounting bolts and gaskets are not attached. 1 4 02 3-5-31 32 Series VFR3000 Construction 2 position single 2 position

VFS

Port Port size BP01 BP02 P, A, B Rc Rc , EA, EB M5 Rc 1 8 1 8 ( ): Port size P02 1 4 1 8 Sub-plate Compact: Non plug-in VFS210--(B) Sub-plate assembly part no.: VFS2000-CS-(B) (01: Rc , 02: Rc ) 1 8 1 4 01 02 S01 S02 5-bottom ported size (Refer to the below right.) 2-4.5 mounting hole Bottom ported Port Size Port Port size S01 S02 EA, EB Rc Rc P, A, B Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Bottom

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

VFR

A, B, EA, EB port) Nil R External pilot Internal pilot 1 4 3 8 02 03 Plug-in VFR3000 P 02 Thread type Non plug-in VFS3000 S 02 Nil F G Rc N NPT NPTF T B Plug-in VFR3000 P 02 Non plug-in VFS3000 S 02 B Piping port (P, A, B, EA, EB port) Note) Mounting bolts and gaskets are not attached. 1 4 02 3-5-31 32 Series VFR3000 Construction 2 position single 2 position

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

valve VF3170-Side ported/Individual EXH type Type 71 VV5F3 05 71 3 01 02 Stations EXH (R) port 02 2 stations 10 20 stations SUP (P) port CYL (A, B) port 3-4-26 27 5 Port Pilot Operated Solenoid Valve Rubber Seal Series VF3000 B Mount: VV5F3-30 Common EXH: VV5F3-301 Manual override (Non-locking) Single Double (Pitch) 2n-Rc 1/8, 1/4 (A, B port) 158.5 (3 position: 179) 79 (3 position: 89.5

Valve Single Unit

station (S1 unit) SG B A SG B A FG SG B A FG SG B A FG FG Power supply 24 V 0 V Twisted pair wire with shielding DG 1-6-115 SX3000: Serial Transmission Unit/Plug-in SS5X3-45SStations UC4 C6 (Pitch) P = 10.5 DIN rail release button 2-One-touch fittings (P , R port) Applicable tubing O.D.: 8 2n-One-touch fittings (A, B port) Applicable tubing O.D.: 4, 6 D side U side DIN rail holding screw

Valve Single Unit

station (S1 unit) SG B A SG B A FG SG B A FG SG B A FG FG Power supply 24 V 0 V Twisted pair wire with shielding DG 1-6-115 Base Mounted Series SX3000/5000 SX5000: Serial Transmission Unit/Plug-in C4 C6 C8 SS5X5-45SStations U(Pitch) P = 16 DIN rail release button 2-One-touch fittings (P , R port) Applicable tubing O.D.: 10 2n-One-touch fittings (A, B port) Applicable tubing O.D.: 4, 6, 8