Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

SQ1000/2000

B (+) 8B () SOL. A Station 9 SOL. B 9A (+) () 9B (+) () SOL. A Station 10 SOL. B 10A (+) () 10B (+) () () COM (+) Note) Positive COM spec. Negative COM spec.

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

0.4

A B A B A B A B A B A 2 93.5 SZ 75 66 (40) 37.5 VF 4 x M4 mounting hole Manual release for switching connector direction Applicable connector: D-sub connector (26P) (Complies with MIL-C-83503) VP4 Stations n 1 2 3 4 5 6 7 8 U side D side C8: 8 One-touch fitting C8 [3(R) EXH port] VQ 1/2 DIN rail clamp screw R R 62.5 12 X 3 12 X 3 60 VQ 4/5 40.5 B B B B B B B B 25 P P 1 1 A A A A A A A A

VQ5000

B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

Plug-in Unit

B 9B () (+) Station 9 SOL. A 10A () (+) SOL. B 10B () (+) Station 10 Note) When using the negative COM. specification for VQC1000/2000, use valves for negative COM. (+) () COM. Positive COM.

VQ5000

port B 2 A 4 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override B 2 A 4 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P = 41 58.5 P = 41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc 1/8 (External pilot port) With connector on D side (FD) 2-6-12

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

5 Port Solenoid Valve, Series VQC

B 7B () (+) Station 7 The internal wiring is double (connected to SOL. A and SOL. B) for all stations regardless of the type of valve or options. Mixed single and double wiring are available as options. SOL. A 8A () (+) SOL. B 8B () (+) Station 8 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

Pulse Valve

JSXF-06B-KT 55-JSXFA(E, F)-06m-B-mA JSXF-06B-A-KT 55-JSXFA(E, F)-10m-B-m JSXF-10B-KT 55-JSXFA(E, F)-10m-B-mA JSXF-10B-A-KT 55-JSXFA(E, F)-14m-B-m JSXF-14B-KT JSXF-14B-KT2 AN30-03 (14R, 14F), AN30-N03 (14N) 13 Dedicated Controller for Operation VXFC Series [Excludes the VXFCmA] Dedicated Controller for Operation / VXFC Series How to Order Controller [Application example] D VXFC 06

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A B A B A B C D Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

[Please Refer to the Following Pages of the Catalog]· P. 258 Filter Regulator AW10-A to AW40-A· P. 259 Filter Regulator AW20-B to AW60-B· P. 259 Filter Regulator With Backflow Function AW20K-B to AW60K-B· P. 260 Mist Separator Regulator AWM20 to AWM40· P. 260 Micro Mist Separator Regulator AWD20 to AWD40· P. 262 Filter Regulator With Built-in Pressure Gauge AWG20/30/40· P. 263 Filter Regulator

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

Model Product series AC20/AC25/AC30/AC50/AC55/AC60 AC20A/AC30A/AC40A/AC50A/AC60A AC20B/AC25B/AC30B/AC50B/AC55B/ AC60B AC20C/AC25C/AC30C/AC40C AC20D/AC30D/AC40D AR20 (K) /AR25 (K) /AR30 (K) /AR40 (K) / AR50 (K) /AR55 (K) /AR60 (K) AW20 (K) /AW30 (K) /AW40 (K) /AW60 (K) F.R.L. combination Option/Part No.

0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A