MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

Table of Contents

Select the communication speed from 1200, 2400, 4800, 9600 or 19200 with the UP/DOWN keys. Store the setting with the SET key. The SEL. key only shifts the cursor without storing the setting. UP J DOWN DFUNC. FUNC. SEL. key 3-8 -X Unit no. 20Data The unit number registration mode is selected by pressing the SEL. key while UNIT is flashing.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line LZ 200 W /l60 (Motor rotation speed) (3750 rpm) (2400 rpm) LC3F2 A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63l Motor mounting position: Top/Parallel, In-line 400 W /l60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86 70 (Motor rotation speed) (1470 rpm

Electric Actuator/Slider Type

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W / 60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 400 W / 60 Motor mounting position: Top/Parallel, In-line (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86 70 (Motor rotation speed) (1470 rpm) 70 Series

Environment

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L* 2.86 70 (Motor rotation speed) (1470 rpm) * Top/Parallel

15

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W equivalent (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63l 400 W equivalent (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86* 70 (Motor rotation speed) (1470 rpm) * Equivalent lead which includes the screw lead

Environment

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L* 2.86 70 (Motor rotation speed) (1470 rpm) * Top/Parallel

Digital Flow Switches, Series PF2A, Series PF2W

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 9 Series PF2A For Air Digital Flow Switch Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Digital Flow Switches Series PF2A

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 11 Digital Flow Switch Series PF2A For Air Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Digital Flow Switch

4800 7200 9600 12000 0 600 1200 1800 2400 3000 0 1200 2400 3600 4800 6000 Flow [L/min] Flow [L/min] Flow [L/min] 11 3-Color Display Digital Flow Switch for Large Flow PF3A7 H Series IN Side Straight Section and Accuracy (Reference Data) PF3A703H (for 3000 L/min) PF3A706H (for 6000 L/min) PF3A712H (for 12000 L/min) 70% 70% 70% PFG300 Function Details PF3A7 H With 1/2" connected With 1" connected

Digital Flow Switches

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 9 Series PF2A For Air Digital Flow Switch Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow rate

PF2A/PF2W

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 16-11-14 11 Series PF2A Digital Flow Switch, High Flow Type For Air Flow Characteristics (Pressure loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 ZSE ISE PSE Z I SE3 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400

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Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 16-11-14 11 Series PF2A Digital Flow Switch, High Flow Type For Air Flow Characteristics (Pressure loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 ZSE ISE PSE Z I SE3 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

NCA1

lbs 5/8 1 1 3/8 1 3/4 2 2 1/2 3 3 1/2 400 37 83 134 186 In applications where extra column strength is required, or for long push stroke 700 30 68 118 168 202 275 cylinders, oversized piston rods may be required. 1000 27 60 105 155 190 257 330 1400 24 53 92 142 174 244 308 385 1800 23 48 82 127 160 230 296 366 It must be noted, however, that oversized piston rods transmit more side load 2400

RHC

mm/s RHC32 21J CC RHC25 12J RHC20 7J 100 RB Model selection by graph 50 J Load weight M = 50 N Max. speed Vmax = 2400 mm/s DGraph 1-2 -X 10 RHC32 2050 100 500 1000 2000 3000 Maximum speed Vmax (mm/s) Data Maximum Energy Absorption Maximum energy absorption (J) 20 25 32 40 50 63 80 100 Bore size (mm) 7 12 21 33 47 84 127 196 10-6-5 5 High Power Cylinder Series RHC 20, 25, 32, 40, 50, 63,

Series AP3100

(P.1088) 1) Maximum operating pressure 2400 psig (16.5 MPa) for connection size 3/4 inch. 2) -10 to 90 C for Polyimide seat. 3) Figure of 1/2 inch connection. 4) Tested with Helium gas inlet pressure 500 psig (3.5 MPa). 5) Weight, including individual boxed weight, may vary depending on connections or options.

Series AP3500

secondary remelt Pneumatically actuated normally closed High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO option available as an option How to Order (Inlet) (Outlet) AP31 30 2PW MV8 MV8 S Option Model Code Maximum operating pressure 1300 psig (9.0 MPa) 3000 psig (20.7 MPa) 1) Cv 1.0 0.7 Code Specification Indicator switch 4) 13 30 No code IS 1) 2400

Series AP500

High inlet pressure Changes from the standard type are: 30 0.21 AP1210 AP1215 Option Other Parameters Vacuum to 3000 psig (20.7 MPa) ) 4500 psig (31 MPa) 9000 psig (62 MPa) HR Source pressure 20 0.14 Proof pressure (Inlet) Burst pressure 10 0.07 ) 3/4 inch face seal fittings rated to 2400 psig (16.5 MPa) maximum.