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Nut Tubing support Insert bushing Tubing Before tightening Seal locations Excellent heat resistance The use of a nut with locking mechanism and trapezoidal screw threads maximizes seal performance even when subjected to heat cycles, maintaining integrity up to 200C.

Table of Contents

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

Table of Contents

M9P M9B F9NW F9PW F9BW A93V A90V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC IC circuit 100 V or less No 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Grommet Relay, PLC Yes 24V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Yes Grommet Relay, PLC A93 A93V 2-wire 12 V 24 V 100 V M9N M9NV 3-wire (NPN) IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) Relay, PLC M9B M9BV 2-wire 12 V 24 V Grommet F9NW F9NWV 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ

MHZ

In-line 0.5 (Nil) 3 (L) 5 (Z) DC AC Electrical entry Indicator light Wiring (Output) Perpendicular Special function Type M9NV F8N M9PV F8P M9BV F8B M9N M9P M9B Standard Standard Standard 3-wire (NPN) 3-wire (PNP) 24 V Solid state switch 5 V 12 V IC circuit Relay, PLC Grommet Yes 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) M9NZ

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols:0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34

MHZ

In-line 0.5 (Nil) 3 (L) 5 (Z) DC AC Electrical entry Indicator light Wiring (Output) Perpendicular Special function Type M9NV F8N M9PV F8P M9BV F8B M9N M9P M9B Standard Standard Standard 3-wire (NPN) 3-wire (PNP) 24 V Solid state switch 5 V 12 V IC circuit Relay, PLC Grommet Yes 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) M9NZ

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

This is a legacy product, and replaced byCD75EB32-200C-B

This is a legacy product, and replaced byCP96SDB32-200C

This is a legacy product, and replaced byCP96SDB32-200C, CYL, PROFILE, ISO, VDMA *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, LD, 32MM C95/CP95 DOUBLE-ACTING, 5.20290 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)CP95ISO cylinderCP95SDouble acting, Single rod--666

This is a legacy product, and replaced byC96NDB50-200C, CYL, TIE ROD, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NC, 50MM C95/CP95 OTHERS (COMBO), 5.35723 lb

High Vacuum Angle Valve, XL Series

The recommended operating temperature ceiling is 200C. Several variations of Chemraz are available and it is advisable to make a selection based upon the particular plasma being used and other conditions, etc. Chemraz is a registered trade mark of Greene, Tweed & Co.

This is a legacy product, and replaced byC96NDB80-200C, 80MM ACNL OTHERS (COMBO), ACTUATOR, ACNL TIE-ROD CYLINDER, RC, 80MM ACNL OTHERS (COMBO), 10.80265 lb

This is a legacy product, and replaced byC96SDB50-200C, CYL, TIE ROD, ISO, AUTO-SW, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NE, 50MM C95/CP95 DBL-ACT AUTO-SW, 5.24210 lb

This is a legacy product, and replaced byC96SDB50-200C, CYL, TIE ROD, ISO, AUTO-S *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NE, 50MM C95/CP95 DBL-ACT AUTO-SW, 6.13619 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)C95ISO cylinderC95SDouble acting, Single rod--666

This is a legacy product, and replaced byC96SDB40-200C, CYL, TIE ROD, ISO, AUTO-SW, ACTUATOR, C95/C96 TIE-ROD CYLINDER, ME, 40MM C95/CP95 DBL-ACT AUTO-SW, 3.44472 lb