MXS

NPN) F9NV F9N 3 wire(NPN) Diagnostic indication (2 color) F9PV F9P 3 wire(PNP) P.5.3-39 F9BV F9B 2 wire Relay, PLC 24V Yes Grommet 12V F9NWV F9NW 3 wire(NPN) F9PWV F9PW P.5.3-66 3 wire(PNP) F9BWV F9BW 2 wire PLC: Programmable Logic Controller *Lead wire length 0.5m (Ex.) 3m L A93 A93L Specifications Specifications are same as the standard style.

Rotary Table/

A93 A93L F9NWZ (Example) (Example) (Example) 13 Rotary Table Series MSQ Specifications 10 20 30 50 70 100 200 Size Air (non-lube) Fluid Maximum operating pressure Minimum operating pressure 1MPa With adjustment bolt Note 1) 0.6MPa With internal shock absorber 0.1MPa Basic type 0.2MPa 0.1MPa High precision type 0 to 60C (with no condensation) Ambient and fluid temperature Rubber bumper With

MXS Series Air Slide Table

L A93L Note) Refer to P. 177 to 179 for further information of auto switch. PLC: Programmable Logic Controller Specifications Specifications are same as the standard type.

Table of Contents

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ In addition to the models in the above table, there are some other auto switches that are applicable.

Table of Contents

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) M9NZ Refer to page 8-28-27 for additional details and applicable auto switches other than the above types.

This is a legacy product, and replaced byCP96SDB32-200C, CYL, PROFILE, ISO, VDMA *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, LD, 32MM C95/CP95 DOUBLE-ACTING, 5.20290 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)CP95ISO cylinderCP95SDouble acting, Single rod--666

This is a legacy product, and replaced byC96NDB50-200C, CYL, TIE ROD, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NC, 50MM C95/CP95 OTHERS (COMBO), 5.35723 lb

This is a legacy product, and replaced byCP96SB80-200C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, RD, 80MM C95/CP95 DOUBLE-ACTING, 17.98200 lb

This is a legacy product, and replaced byCP96SDB32-200C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, LE, 32MM C95/CP95 DBL-ACT AUTO-SW, 2.61406 lb

This is a legacy product, and replaced byCP96SDB80-200C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, RE, 80MM C95/CP95 DBL-ACT AUTO-SW, 10.33231 lb

This is a legacy product, and replaced byCP96SDB80-200C-XC68, C(P)96 BASE CYLINDER, ACTUATOR, C95/C96 TIE-ROD CYLINDER, RE, 80MM C95/CP95 DBL-ACT AUTO-SW, 11.11129 lb

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Proof pressure Operating temperature 0 to 200C Burst Pressure and Heat Resistance Performance 4.0 3.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.0 2.5 Pressure (MPa) 2.0 1.5 1.0 0.5 0 20 40 60 80 100 120 140 160 180 200 Temperature (C) 1/8", 3/16", 1/4", 4,

TL/TIL

Compatibility is indicated for fluid temperatures of 200C or less. The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product. The data above is based on the information presented by the material manufacturers.

XL

The recommended operating temperature ceiling is 200C. Several variations of Chemraz are available and it is advisable to make a selection based upon the particular plasma being used and other conditions, etc. Chemraz is a registered trade mark of Greene, Tweed & Co.

This is a legacy product, and replaced byCP96SDB80-200C-XC68, SeriesDescriptionModelActionNoteVol. no. (for std model)CP95ISO cylinderCP95SDouble acting, Single rod--666

This is a legacy product, and replaced byCP96SDB40-200C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, ME, 40MM C95/CP95 DBL-ACT AUTO-SW, 3.71743 lb

This is a legacy product, and replaced byC96SB32-200C

This is a legacy product, and replaced byC96SB50-200C, CYL, TIE ROD, ISO, NON-LU *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, ND, 50MM C95/CP95 DOUBLE-ACTING, 3.85808 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)C95ISO cylinderC95SDouble acting, Single rod--666

This is a legacy product, and replaced byC96SDB63-200C, CYL, TIE ROD, ISO, AUTO-S *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, PE, 63MM C95/CP95 DBL-ACT AUTO-SW, 7.05479 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)C95ISO cylinderC95SDouble acting, Single rod--666

This is a legacy product, and replaced byCP96SDB100-200C, CYL, PROFILE, ISO, VDMA *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, SE, 100MM C95/CP95 DBL-ACT AUTO-SW, 12.12542 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)CP95ISO cylinderCP95SDouble acting, Single rod--666