Magnet: None, Mounting: Basic Style, Style: Non-lube Air Cushion, Bore Size: 50mm, Stroke: 1200mm, Rod Boot: w/o Rod Boot, Lock Position: Front Lock, Release of Manual: Non-locking Type, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: None, Mounting: Basic Style, Style: Non-lube Air Cushion, Bore Size: 50mm, Stroke: 200mm, Rod Boot: w/o Rod Boot, Lock Position: Front Lock, Release of Manual: Non-locking Type, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: None, Mounting: Basic Style, Style: Non-lube Air Cushion, Bore Size: 50mm, Stroke: 800mm, Rod Boot: w/o Rod Boot, Lock Position: Front Lock, Release of Manual: Non-locking Type, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Table of Contents

to 100 MGPL32 to 100 i !

MG

to 100 MGPL32 to 100 i !

MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series

MGP

5 20, 25 over 30 stroke under 100 stroke 12, 16 over 50 stroke @0 Under 50 stroke 20, 25 over 50 stroke Under 30 stroke 20, 25 over 100 stroke MGPM32 to 100 MGPL32 to 100 i !8 !7 u q y !1 !9 @3 !0 !2 @2 r o e !4 @4 @1 !0 w !3 y Over 50 Over 50 stroke t 32 to 63 over 50 stroke under 100 stroke 80, 100 over 50 stroke !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.0-39 to 0-46 for Safety Instructions and common precautions, and refer to p.3.4-2 for precautions on series CB. 75 20 80 90 2 Same side 100 100 100 100 D-A3C D-G39C D-K39C 20+35(n2) n=2, 3, 4, 80+35(n2) n=2, 4, 6, 8, 75+35(n2) n=2, 4, 6, 8, 90+35(n2) n=2, 4, 6, 8, Dif. sides n 100+100(n2) Same side 100+100(n2), n=2, 4, 6, 8, n=2, 3, 4, 5, 90 10 80 75 1 Replacement Dif. sides

HRX-OM-X084

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

HRX-OM-W002

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

CA2

n = 2, 4, 6, 8 Same side 15 90 100 110 35 75 80 90 100 1 Different sides With 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35

•

~me~~'U~ rl ~a~ca"--L_ ___'~O~O '--__-r_ -c~-c~c-~__ r -D-A30 ti I Different surfaces 35 + 30~n _ 2) 110 + 3O(n 2) DG39 ~ 1" =2.4. 6.8"-) D-K39 ~ Same surface 100 + 1oo(n _ 2) 110 + 100{n 2) 1-"->-"-==::---+-,,;---+-_--"'1 "-= = -= 27 .4"',6"'."

Vacuum

ldbF k pcd by 6 Edd h with integral with integral vacuumgauge digitalswitch 56 IllL $en ) Schematic Symbol NZLr12-EE NZLl12 NZLl12-Efl s1.2mm 100!

Vacuum

ldbF k pcd by 6 Edd h with integral with integral vacuumgauge digitalswitch 56 IllL $enie Schematic Symbol NZLr12-EE NZLl12 NZLl12-Efl s1.2mm 100!

Digital Gap Checker

The graphs below show the response time when the workpiece is approached at 90% distance and 0% distance (close contact). (: The switch point is 100% distance) (Example: When the switch point is set to 0.1 mm, the response time when the workpiece is at 0.09 mm and 0.00 mm are measured).

PSxx-OMR0001CN

kPa200 kPa) (41 ) ON (41 ) ON(OFF) (34 ) ON (NPN/PNP) (100 kPa200 kPa) (27 ) ISA3 2 -61No.PS-OMR0001CN-J 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, (14 kPa ) OFF 220 kPa () -20 kPa220 kPa (-20 kPa) [ON/OFF] [] [kPa] () -62No.PS-OMR0001CN-J Revision history A B C D E F [2018 3 ] G [2018 6 ] H [2019 9 ] I [2021 10 ] J [2022 6 ] 4-14-1, Sotokanda, Chiyoda-ku

PSxx-OMT0001CN

kPa200 kPa) (42 ) ON (42 ) ON(OFF) (35 ) ON (NPN/PNP) (100 kPa200 kPa) (28 ) ISA3 2 -65No.PS-OMT0001CN-E 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, OUT2 (OUT2) 80 mA OFF, (14 kPa ) OFF 220 kPa () -20 kPa220 kPa (-20 kPa) -66No.PS-OMT0001CN-E 5 [ON/OFF] [] () [kPa] -67No.PS-OMT0001CN-E Revision history A [2018 3 ] B [2018 6 ] C [2019 9 ] D [2021 10 ] E [

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

Mechanical Valves Series NVM, NVFM, NVZNI

'A EI 0.69 (17.5) 0.20 (5) 0.59 (15) 0.10 (2.51o.71 (18) 0 3 7 (s 5) (J 0.08 in. (2 0 mm) T T 0-14 rn(3 5 mml -75 PSIG (5 Kgflcm2) Millimeters in Parentheses N\2M450-N01-08 e+ _i i MAX.H ' May be rotated without changing porl location A tJ D E to H 5.24 (1 34) 1 . 1 8 (30) 3.94 (100) 1 3 4 (34t 0.69 (17.5)o.20 {51 ).59 (15) 0.1 t4.5 F-(J-F 3.31 lbs (1.5 Ko) T.T 40" '75 PSIG (5 Kgf/cm2) Millimeters

IIIIIII

'A EI 0.69 (17.5) 0.20 (5) 0.59 (15) 0.10 (2.51o.71 (18) 0 3 7 (s 5) (J 0.08 in. (2 0 mm) T T 0-14 rn(3 5 mml -75 PSIG (5 Kgflcm2) Millimeters in Parentheses N\2M450-N01-08 e+ _i i MAX.H ' May be rotated without changing porl location A tJ D E to H 5.24 (1 34) 1 . 1 8 (30) 3.94 (100) 1 3 4 (34t 0.69 (17.5)o.20 {51 ).59 (15) 0.1 t4.5 F-(J-F 3.31 lbs (1.5 Ko) T.T 40" '75 PSIG (5 Kgf/cm2) Millimeters