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U3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

MY1

MY1M16/20 Stroke (LL) L 4-MM depth M 2 x 2-B counterbore depth C LD through-hole PA U1 LW U3 U2 MX QW NW PB MTS U6 MY U4 U5 CY PG Q + Stroke Detailed figure of U section MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W U M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket

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MY1M16/20 Stroke (LL) L 4-MM depth M 2 x 2-B counterbore depth C LD through-hole PA U1 LW U3 U2 MX QW NW PB MTS U6 MY U4 U5 CY PG Q + Stroke Detailed figure of U section MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W U M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 Driver type Nil Without cable S Standard cable R Robotic cable (Flexible cable) Nil Without cable 3 3 5 5 A 10 C 20 Compatible driver Power supply voltage [V] Nil Without driver M2 LECYM2-Vl 200 to 230 U2 LECYU2-Vl 200 to 230 25ALEC * When the driver type is selected, the cable is included. Select cable type and cable length. LEC S LEC SS-T !

Electric Actuator/Slider Type

2 Driver type Nil Without cable S Standard cable R Robotic cable (Flexible cable) Nil Without cable 3 3 5 5 A 10 C 20 Compatible driver Power supply voltage [V] Nil Without driver M2 LECYM2-V 200 to 230 U2 LECYU2-V 200 to 230 When the driver type is selected, the cable is included. Select cable type and cable length. !

Series VQ Metal Seal/Rubber Seal Body Ported

Kit/Electrical entry/Cable length F P Kit (Dsub connector) Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) Connector location Top (vertical) Side (horizontal) P .1.10-40 P .1.10-36 Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 stations Max.16 (2) Max.16 (2) F kit P kit P kit F kit With cable (1.5m) With cable (3m) With cable (5m

HRX-OM-Y098

OFF 1 5C 3 Check the effect of ambient temperature. Please review the setting value. There may be causes such as large load fluctuation and flow rate fluctuation. Please review the setting value.

HRX-OM-X037

OFF 1 5C 3 Check the effect of ambient temperature. Please review the setting value. There may be causes such as large load fluctuation and flow rate fluctuation. Please review the setting value.

42

External pilot supply port Indicator light Connector entry direction D side U side Connector entry direction D side U side D0 D1 D2 D3 Type of connection IP65 compatible U0 U1 U2 U3 Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m F Kit F Kit L Kit L Kit Cable length 0.6 m Cable length 1.5 m Cable length 3 m D0 D1 D2 U0 U1 U2 1 to 12 stations 1 to 12 stations S T Kit (Terminal

VQ5000

U3 U0 U1 U2 D0 D1 D2 D3 D0 D1 D2 12 12 stations F 1 to 12 Manifold is 12 stations max.

53

Water 15% Ethylene Glycol Aqueous Solution Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02

Lightweight and Compact

Water 15% Ethylene Glycol Aqueous Solution Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02

HRS100/150

Water 15% Ethylene Glycol Aqueous Solution Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02

Proposals for Energy Saving

Note 3) The values are for ambient temperature of 20C 5C and rated voltage. Note 4) AC to DC or DC to AC coil exchange is not possible due to different armature configuration. Note 5) Values for apparent power inside ( ) are for VXZ2232.

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Take measures to prevent moisture from freezing in circuits when below 5C, since this may cause damage to the O-ring and lead to a malfunction. The installation of an air dryer is recommended for eliminating condensate and moisture.

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable Without cable Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2

2.0

Solenoid valve part number Allowable voltage range [Ambient and fluid temperatures: 5C or higher and 40C or lower] LPV21-mm-T4 LPV21-6mm-T6(A) LPV22-mmm-T4A LPV22-mmm-T6A 7. Do not use the switch unless the equipment operates normally.

Thermo-chiller

Water 15% Ethylene Glycol Aqueous Solution Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Conventional units Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Conventional units Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02