Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

ZP3

One-touch fitting 04 4 A12 M12 x 1 06 6 U2 For 2 polyurethane tubing1 Barb fitting U4 For 4 soft tubing2 U6 For 6 soft tubing2 Nil Use the connection thread.

LFE-OMY0008

[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l M8 x 95l x 100l x 105l x 110l x 115l CHQB63 10D (M) 5D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105 110 115 120 125 130 155 180 95 100 105 110 115 120 125 130 135 160 185 100

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l x 195l CHQWB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) 100D (M) 100D (M) CHQWB100 10D (M) CHQWB40 5D (M)

7

Refer to page 118 for details. 140 Pilot Operated 2 Port Solenoid Valve VXD Series Air Air Oil Water 3 A Dimensions/VXD2 Body Material: Aluminum, C37, Stainless Steel Conduit terminal (U2) E (V2) 34 VX2 VXK 32 25 T VXD VXD VXZ A B M M G1/2 OUT IN VXS J F I 2 x P Port size VXB L K (D) VXE VXP VXR Conduit VXH E U 280 C 23 T VXF VX3 G1/2 B A A B VXA VXD2 C F 3 A OUT IN 3 A Note) Only the

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Top entry Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable Note 2) Note 2) Note 2)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Top entry Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable Note 2) Note 2) Note 2)

Table of Contents

U3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

MY1

MY1M16/20 Stroke (LL) L 4-MM depth M 2 x 2-B counterbore depth C LD through-hole PA U1 LW U3 U2 MX QW NW PB MTS U6 MY U4 U5 CY PG Q + Stroke Detailed figure of U section MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W U M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket

Table of Contents

MY1M16/20 Stroke (LL) L 4-MM depth M 2 x 2-B counterbore depth C LD through-hole PA U1 LW U3 U2 MX QW NW PB MTS U6 MY U4 U5 CY PG Q + Stroke Detailed figure of U section MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W U M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 Driver type Nil Without cable S Standard cable R Robotic cable (Flexible cable) Nil Without cable 3 3 5 5 A 10 C 20 Compatible driver Power supply voltage [V] Nil Without driver M2 LECYM2-Vl 200 to 230 U2 LECYU2-Vl 200 to 230 25ALEC * When the driver type is selected, the cable is included. Select cable type and cable length. LEC S LEC SS-T !

Electric Actuator/Slider Type

2 Driver type Nil Without cable S Standard cable R Robotic cable (Flexible cable) Nil Without cable 3 3 5 5 A 10 C 20 Compatible driver Power supply voltage [V] Nil Without driver M2 LECYM2-V 200 to 230 U2 LECYU2-V 200 to 230 When the driver type is selected, the cable is included. Select cable type and cable length. !

Series VQ Metal Seal/Rubber Seal Body Ported

Kit/Electrical entry/Cable length F P Kit (Dsub connector) Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) Connector location Top (vertical) Side (horizontal) P .1.10-40 P .1.10-36 Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 stations Max.16 (2) Max.16 (2) F kit P kit P kit F kit With cable (1.5m) With cable (3m) With cable (5m

LV50-OMQ0002

The straight piping length shall be 5 times (5D) or more of the piping size to satisfy and achieve the stable measurement.

LFE-OMZ0012

The straight piping length shall be 5 times (5D) or more of the piping size to satisfy and achieve the stable measurement.