Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Table of Contents

Refer to page 10-20-60 for details.

Table of Contents

51 43 34 26 17 85 IN 201 181 161 141 121 101 80 60 40 201 OUT 16 8 151 136 121 106 91 76 60 45 30 151 IN Bore size (mm) Mounting bracket part no.

ISO Cylinder

60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5 (n 2) (n = 2, 4, 6) (n=2, 4, 6) (n 2) 2 15 + 50 D-H7C D-C73C D-C80C 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) D-H7C D-C73C D-C80C 10 15 65 50 + 27.5 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 50 (n = 2, 4, 6) (n = 2, 4, 6) D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9l D-A9lV 5 10 10 + 15 (n 2) (n =

Smooth Cylinder/Low Speed Cylinder

Mounting bolt 6.5 8.5 Note) When mounting a cylinder with through-hole, be sure to use the attached plain washer. 6.5 Material: Chromium molybdenum steel Surface treatment: Zinc chromated Mounting Bolt for CDQSYB with Auto Switch Cylinder model C Cylinder model C D 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 D 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 Mounting bolt part no.

Rotary Actuator/Vane Type

Current: 4 directions 8 directions Starting point Rotation range CRB2 CRB2 Starting point Rotation range Port surface Starting point CRB1 Port surface Rotation range MSU CRJ 30 30 Port surface CRA1 Port surface Port surface 60 60 Rotation range Starting point CRQ2 MSQ Starting point MSZ Starting point (Single flat) 60 60 CRQ2X MSQX Port surface Rotation range MRQ 30 30 Port surface Rotation

e-Rodless Actuator

E-MY2H/M2 E-MY2H/M3 50 60 50 60 50 60 30 30 30 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 E-MY2H25 E-MY2H25 E-MY2H25 5 5 5 4 4 4 3 3 3 E-MY2H16 E-MY2H16 2 2 2 E-MY2H16 1 1 1 100 200 300 400500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load weight / E-MY2H E-MY2H/m1 E-MY2H/m2 E-MY2H/m3 60 50 60 60 50 50 30 30 30 20 20

Electric Actuator/Slider Type

, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 LEY LEYG LEFS/LEFB LEJS/LEJB LECSS-T Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 7 15 29 7 17 35 10 22 44 Pushing force lbf [N] Note 3) (Set value: 12 to 24%) 15 to 29 [65 to 131] 28 to 57 [127 to 255] 54 to 109 [242 to 485] 18 to 35 [79 to 157] 35 to 69 [154 to 308] 66 to 132 [294 to 588] 22 to 44 [98 to 197] 43 to

5

Bore size (mm) B TA TL TU TC TX TE TO TR TT TS TH TF Z** TDH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15 130 110 150 20 11 22 14 60 80 129 20+0.084 0 MB-S10 100 114 120

Air Cylinder

9 14 133 142 Up to 300 8 10 32 32 52 36 108 116 118 25 Up to 450 47 4 6.8 28 102 3.2 40 55 20 8 25 135 Up to 450 Up to 300 40 37 7 4 60 75 41 111 Up to 300 9 10 19 30 9 14 137 146 Up to 300 9 10 40 40 60 40 112 120 122 32 Up to 450 47 4 6.8 28 104 3.2 40 55 20 8 25 137 Up to 450 Up to 300 40 37 7 4 60 75 41 113 Up to 300 9 10 19 30 9 14 139 148 Up to 300 9 10 40 40 60 40 114 122 124 40

Made to Order

115 74 48 17 135 20 46 M45 x 1.5 260 50 71 67 140 86 60 20 160 25 56 M56 x 2.0 285 60 71 67 140 86 60 20 160 25 56 M56 x 2.0 296.5 60 80 76 140 96 60 20 175 30 65 M64 x 2.0 325 70 ZZ + Stroke 80 76 140 96 60 20 175 30 65 M64 x 2.0 325 70 1728 Made to Order Common Specifications: -XB6: Heat Resistant Cylinder (10 to 150C) Symbol -XB6 Heat Resistant Cylinder (10 to 150C) 2 Air cylinder which

15

60 M3 x 12 1.5 M6 x 60 5.2 14 18 NY M4 x 0.7 8 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 18 NX M5 x 0.8 8.5 63 40 3.5 63 60 M4 x 12 3.6 M6 x 60 5.2 9 5 NW M5 x 0.8 8.5 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 12 NV M4 x 0.7 8 63 40 3.3 63 60 M4 x 12 3.6 M6 x 60 5.2 9 5 NU M5 x 0.8 8.5 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 12 NT M5 x 0.8 8.5 70 50 3.3 60 60 M3 x 12 1.5 M6 x 60 5.2

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

16: LEY32DA 100 0 60 30 120 90 0 60 30 120 90 Torque limit/Command value [%] Torque limit/Command value [%] Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 75 or less 100 90 60 1.5 Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 75 or less 100 90 60 1.5 LEY63l (Motor mounting position: Top/Parallel, In-line) 3500 Lead 2.86:

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

MHZ

MHR Max. operating pressure (MPa) Min. bending radius (mm) MHK Operating temperature (C) Material 20 to 60 Nylon 12 20 to 60 Nylon 12 20 to 60 Polyurethane 20 to 60 Polyurethane MHS Refer to Best Pneumatics Vol. 15 regarding One-touch fittings and tubing.

MHZ

MHZ Applicable Tubing Max. 5 MHF B 5 A E2 Nylon tubing T0425 TS0425 TU0425 TCU0425B-1 coil tubing Soft nylon tubing Polyurethane Polyurethane Description/ Model Specifications tubing MHL Auto switch mounting groove (Both sides) Outside diameter (mm) 4 1.0 13 20 to 60 Nylon 12 4 0.8 12 20 to 60 Nylon 12 4 0.5 10 20 to 60 4 0.5 20 to 60 Refer to the dimension table.

Integrated Controller

200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

2–4

65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 110 x 135 M3 x 25 x 30 x 35 x 40 x

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N 11-9-9 10 Courtesy