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PLe " ~,I I' : II jNo 2OOVm 'M A64 I-I. 24 V 12 V A33 1 '~ '" V. 200 VI--_ --+-=--t-t I-t I-j-1 ~~~! c--t-1=Relay. 'W ~~~ -=L= I,PLC I ! I. ' ~ Lead wire length symbols: 0.5 m . Nil (Example) M9NW 1 m . M (Example) M9NWM 3 m . L (Example) M9NWL 5 m . .

PSxx-OMR0001CN

kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] -18No.PS-OMR0001CN-J 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5

PSxx-OMT0001CN

kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] [mm] [mm] -19No.PS-OMT0001CN-E 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Mechanical Valves Series NVM, NVFM, NVZNI

Series NVM, NVFM, NVZNI Mechanical Valves l .,:lii::rii.r:t,: Series NVM MECHANICAL VALVES CONTENTS/SPECI FICATION S SPECIFICATIONS Contents Faoe NVM Mechanical Valves NVM 100 Cv 0.14 NVM 200 Cv 1.00 NVM 430 Cv 0.38 NVM 830 Limit Valve Cv 0.33 CHARACTERISTICS NVM100 tNVM2oCNVlt430 Port Size (NPT) 1/a 1/a 1/s 1/e Cy 0 . 1 4 1.00 | 0 38 0 3 3 Max.

IIIIIII

Series NVM, NVFM, NVZNI Mechanical Valves l .,:lii::rii.r:t,: Series NVM MECHANICAL VALVES CONTENTS/SPECI FICATION S SPECIFICATIONS Contents Faoe NVM Mechanical Valves NVM 100 Cv 0.14 NVM 200 Cv 1.00 NVM 430 Cv 0.38 NVM 830 Limit Valve Cv 0.33 CHARACTERISTICS NVM100 tNVM2oCNVlt430 Port Size (NPT) 1/a 1/a 1/s 1/e Cy 0 . 1 4 1.00 | 0 38 0 3 3 Max.

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Rubber cushion, Operating Pressure

Magnet: D (Built-in), Mounting: B (Basic Style), Style: N (Non-lube Rubber Bumper), Bore Size: 63mm, Stroke: 125mm, Rod Boot: w/o Rod Boot, Lock Position: R (Front Lock), Release of Manual: N (Non-locking Type)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: N (Non-lube Rubber Bumper), Bore Size: 63mm, Stroke: 150mm, Rod Boot: w/o Rod Boot, Lock Position: R (Front Lock), Release of Manual: N (Non-locking Type)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: N (Non-lube Rubber Bumper), Bore Size: 63mm, Stroke: 250mm, Rod Boot: w/o Rod Boot, Lock Position: R (Front Lock), Release of Manual: N (Non-locking Type)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: N (Non-lube Rubber Bumper), Bore Size: 63mm, Stroke: 300mm, Rod Boot: w/o Rod Boot, Lock Position: R (Front Lock), Release of Manual: N (Non-locking Type)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: N (Non-lube Rubber Bumper), Bore Size: 63mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: R (Front Lock), Release of Manual: N (Non-locking Type)

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Rubber cushion, Operating Pressure