•

PLe " ~,I I' : II jNo 2OOVm 'M A64 I-I. 24 V 12 V A33 1 '~ '" V. 200 VI--_ --+-=--t-t I-t I-j-1 ~~~! c--t-1=Relay. 'W ~~~ -=L= I,PLC I ! I. ' ~ Lead wire length symbols: 0.5 m . Nil (Example) M9NW 1 m . M (Example) M9NWM 3 m . L (Example) M9NWL 5 m . .

PSxx-OMR0001CN

kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] -18No.PS-OMR0001CN-J 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5

PSxx-OMT0001CN

kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] [mm] [mm] -19No.PS-OMT0001CN-E 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Mechanical Valves Series NVM, NVFM, NVZNI

Series NVM, NVFM, NVZNI Mechanical Valves l .,:lii::rii.r:t,: Series NVM MECHANICAL VALVES CONTENTS/SPECI FICATION S SPECIFICATIONS Contents Faoe NVM Mechanical Valves NVM 100 Cv 0.14 NVM 200 Cv 1.00 NVM 430 Cv 0.38 NVM 830 Limit Valve Cv 0.33 CHARACTERISTICS NVM100 tNVM2oCNVlt430 Port Size (NPT) 1/a 1/a 1/s 1/e Cy 0 . 1 4 1.00 | 0 38 0 3 3 Max.

IIIIIII

Series NVM, NVFM, NVZNI Mechanical Valves l .,:lii::rii.r:t,: Series NVM MECHANICAL VALVES CONTENTS/SPECI FICATION S SPECIFICATIONS Contents Faoe NVM Mechanical Valves NVM 100 Cv 0.14 NVM 200 Cv 1.00 NVM 430 Cv 0.38 NVM 830 Limit Valve Cv 0.33 CHARACTERISTICS NVM100 tNVM2oCNVlt430 Port Size (NPT) 1/a 1/a 1/s 1/e Cy 0 . 1 4 1.00 | 0 38 0 3 3 Max.

Cylinder

-c" urrent -;:--nge O I-road c t + ---_ In _t _ e_ rn _a _l _v _ o _ lt _ a ,, 9 ,, e_d _'_ 0 cP _ _ + _ ~ 0 I 2AVOf~ __ -Leak current 0 Response time 1.2 ms COJPB6-1OD _ In _d _ ic c.a :.. t_ o_ , _ Ia _ m ..: p _ _ + __ .---!'

Magnet: D (Built-in), Mounting: G (Rear Flange), Style: N (Non-lube Rubber Bumper), Bore Size: 63mm, Stroke: 300mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type)

Magnet: Built-in, Mounting: Rear Flange, Style: Non-lube Rubber Bumper, Bore Size: 63mm, Stroke: 300mm, Rod Boot: w/o Rod Boot, Lock Position: Rear Lock, Release of Manual: Non-locking Type, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: D (Built-in), Mounting: B (Basic Style), Bore Size: 100mm, Port Thread: Rc, Stroke: 250mm, Rod Boot: None, Lock Style: RN (Rod Side Lock/Non-locking), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Magnet: D (Built-in), Mounting: B (Basic Style), Bore Size: 100mm, Port Thread: Rc, Stroke: 100mm, Rod Boot: None, Lock Style: RN (Rod Side Lock/Non-locking), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 50mm, Port Thread: Rc, Stroke: 125mm, Rod Boot: None, Lock Style: RN (Rod Side Lock/Non-locking), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 50mm, Port Thread: Rc, Stroke: 200mm, Rod Boot: None, Lock Style: RN (Rod Side Lock/Non-locking), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic Style), Bore Size: 50mm, Port Thread: Rc, Stroke: 200mm, Rod Boot: None, Lock Style: RN (Rod Side Lock/Non-locking)

Magnet: D (Built-in), Mounting: B (Basic Style), Bore Size: 50mm, Port Thread: Rc, Stroke: 350mm, Rod Boot: None, Lock Style: RN (Rod Side Lock/Non-locking)

Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 50mm, Port Thread: Rc, Stroke: 200mm, Rod Boot: None, Lock Style: RN (Rod Side Lock/Non-locking)

Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 50mm, Port Thread: Rc, Stroke: 125mm, Rod Boot: None, Lock Style: RN (Rod Side Lock/Non-locking)

I

CX>erOtno PrOSSU'B Qcera,tnQ TEMPROl"IQB -1o-ecn: \oltrout rreezno Mn ooerathQ 1l'n8 1.0 ncarcl to i:i-1.0 .i to ll'dM "'1lhn looo rrrce to tre hard 150< I /rn==i: I 1 111 I I 11 :1 I 11 l i -& Jt N.O.PN> cmtnJOUs toad Cl.l'J'en1 l150mA S"1tcttlo lrowencY 30iZ Mllter1el tl<

ZSE5/ISE5

.%4S 40 30 39 II i ~g: D Sll:PR,~~RE~'mCil 0 0 M N '" 6 ;e;V 'P -$~ 11:rn I~ tP 00 lR ;l=i I I 12.3 I , 28 SMC CORPORATION ~. 1164,SH1MBASHI,MINATO-KU,TOKYO 10S,JAPAN Tel:03-3502-2740 Fax:03-52517240 l si printing January 1995.0-036,P-46(M) Augusl 1996, 49(RP) Specifications are subject 10 change without prior notice Printed In Smgapore and any obligation on the part of the manufacture,