High Vacuum Angle Valve

) 16, 25, 40, 50, 63, 80 D K (DN) 63, 80 Right flange surface Left flange surface Flange side r Temperature specifications/Heater t Auto switch type Symbol Temperature Heater Nil 5 to 60C Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

MY1

For 10, 16, 20 Lead wire length (m) Auto switch model Pre-wire connector Applicable load Perpendicular In-line Load voltage Indicator light Electrical entry Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z) DC AC A96 A93 M9N M9P M9B F9NW F9PW F9BW A96V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)

2

Example) AC30D-F03DM-SV-1NR-A r t y w Nq Body size 20 30 40 Symbol Description Nw Pipe thread type Nil Rc V V V N NPT V V V F G V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V + Ne Port size Nil Without auto drain V V V C Note 2) N.C. (Normally closed) Drain port is closed when pressure is not applied. V V V D Note 3) N.O.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Lead wire length (m) Indicator light Indicator light Auto switch model Pre-wire connector Applicable load Perpendicular In-line Load voltage Electrical entry Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z) DC AC A96 A93 M9N M9P M9B F9NW F9PW F9BW A96V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

5 @2 %0 %1 %2 %3 %4 8-13-17 18 Series MY2 16, 25, 40 MY2C G Bore size Stroke Q + Stroke PG (LL) L 4-MM, depth M 4-B depth of counter bore C LA Workpiece mounting center line LD through hole PA Workpiece mounting center line Cylinder mounting center line PB PC MW LC LE Cylinder mounting center line QW PF NX 4 x 2-square nut J PD LB NH NT NW PE PE LW NV Courtesy of Steven Engineering, Inc.-

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Lead wire length (m) Indicator light Indicator light Auto switch model Pre-wire connector Applicable load Perpendicular In-line Load voltage Electrical entry Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z) DC AC A96V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A96 A93 M9N M9P M9B F9NW F9PW F9BW 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Yes A96V A96 Reed switch 5 V Grommet Relay, PLC 24 V 2-wire A93V A93 100 V 12 V 3-wire (NPN) M9NV M9N IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 2-wire 12 V Relay, PLC Yes Grommet 24 V Diagnostic indication 2-color indication F9NWV F9NW 3-wire (NPN) IC circuit 5 V 12 V 3-wire (PNP) F9PWV F9PW F9BWV F9BW 2-wire 12 V Notes) Solid state switches marked with a symbol are produced upon

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

MY1

Load voltage Wiring (Output) Lead wire length (m) 0.5 (Nil) 1 (M) 5 (Z) Auto switch model Perpendicular Indicator light Pre-wired Type Special function Electrical entry connector Applicable load DC AC 25 to 40 50, 63 16, 20 25 to 63 16, 20 In-line 3 (L) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 3-wire (NPN) Solid state auto switch Reed auto switch 5 V, 12 V

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 63mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Auto switch model Lead wire length (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 1 (M) 5 (Z) 3 (L) None (N) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-

Cylinder with Lock

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Perpendicular In-line Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v Diagnostic indication (2-color indicator

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 63mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 400mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 63mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 500mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 63mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 250mm, Thread: Male Rod End, Suffix for Cylinder: J (Nylon Tarpaulin), Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: Built-in Magnet, Mounting: Clevis, Type: Rubber Bumper, Bore: 63mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 250mm, Thread: Male Rod End, Suffix for Cylinder: Nylon Tarpaulin, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewire Connection: -, Number: -, X Option: -

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 63mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 25mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint)

Magnet: Built-in Magnet, Mounting: Clevis, Type: Rubber Bumper, Bore: 63mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 25mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewire Connection: -, Number: -, X Option: -

17

Load voltage Wiring (Output) Auto switch model Lead wire length (m) Indicator light Electrical entry Pre-wired Type Special function connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) 1 (M) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Solid