Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Next, B is entered to find A the inertial moment for the rotation of shaft (A) as 5 b a A = ( ) 2 B Number of teeth = b Kinetic Energy/Rotation Time Even in cases where the torque required for rotation of the load is small, damage to internal parts may result from the inertial force of the load.

XM, XY

G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39 45.5 D 75 87 114 Fn 95 110 Fd 114 Fc 52 70 83 G 77 76.5 105 H

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Made to Order

Double clevis type Lock location Port (A) (A) (A) (A) (A) (A) (A) (B) (D) (B) (D) (B) (B) (D) (D) (B) (B) (B) (D) (D) (D) CLS (C) (C) (C) (C) (C) (C) (C) Cushion valve 1.

Table of Contents

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A B A B A B C D Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

Table of Contents

Solid state switch D-F8 CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (Without magnet) Series Variations Bore size (mm) A(a) B(b) C(c) Bore size (mm) Rod end configuration Stroke (mm) Clean series 4 6 8 10 15 20 b Action Series Auto switch B Double acting Male thread Without thread None 4 10() 15() 13() 4 Single acting, Spring return 6 13(13) 19(22) 13(33) Double

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

CE

phase J A B C D A COM COM COM B 12 VDC GND F.G.

CE

phase J B C D A A COM COM COM B 12 VDC GND F.G.

MXQ

B side traveling parallelism to A side Refer to Graph (1).

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6-10 13-/22-MXQ6-20

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

MXW

Nil B Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

In the case of mounting auto switch from B direction Step 2) Insert the auto switch into the auto switch installation groove from direction B. A B MHZ MHF Step 3) Slide the auto switch in the direction of the arrow until the indicator light illuminates.

Compact Cylinder

B (Mounting groove no.) C (Mounting groove no.)

MRHQ

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

A B A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside (mm) B B CY Model Mounting Switch operating range A B A B A B 50 MXY6 2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 38 55 MXY8 2.5