(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)

(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)

(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)

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v Grommet Solid state auto switch 2-wire 12 V M9BV M9B M9BV M9B V V V v v Connector H7C J79C V V V V CKQ 3-wire (NPN) 5 V,12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indication) Relay, PLC CKZ2N Yes 24 V 3-wire (NPN) 5 V,12 V M9NAVM9NAM9NAVM9NA v v V v

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Table of Contents

D-M9N(V)/D-M9P(V)/D-M9B(V) Direct Mounting Style . D-Y59A, B /D-Y69A, B /D-Y7P(V) Direct Mounting Style . 2-color Indication Type . D-F79W/D-F7PW/D-J79W Rail Mounting Style. D-Y7NW(V)/D-Y7PW(V)/D-Y7BW(V) Direct Mounting Style ... D-F9NW(V)/D-F9PW(V)/D-F9BW(V) Direct Mounting Style . 2-color Indication Type with Diagnostic Output. D-F79F Rail Mounting Style.

Table of Contents

MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG Courtesy of Steven

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Free Mount Cylinder

Weight Unit: g Caution Auto switch model D-M9N(V) D-M9B(V) D-M9P(V) Operating Precautions 8 7 8 0.5 Lead wire length (m) Fix the switch with the existing screw installed on the switch body.

ISO Cylinder

state auto switch 2-wire 12 V M9BV M9B M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V, 12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 M9NAV1 M9NA1 v v V v v IC circuit 3-wire

Table of Contents

D-M9N(V)/D-M9P(V)/D-M9B(V) Direct Mounting Style . D-Y59A, B/D-Y69A, B/D-Y7P(V) Direct Mounting Style . D-M5N/D-M5P/D-M5B Direct Mounting Style. D-F9G/D-F9H Normally Closed Direct Mounting Style. D-Y7G/D-Y7H Normally Closed Direct Mounting Style. 2-color Indication Type . D-H7NW/D-H7PW/D-H7BW Band Mounting Style. D-G59W/D-G5PW/D-K59W Band Mounting Style.

Table of Contents

D-M9N(V)/D-M9P(V)/D-M9B(V) Direct Mounting Style . D-F8N/D-F8P/D-F8B Direct Mounting Style . D-Y59A, B /D-Y69A, B/D-Y7P(V) Direct Mounting Style . D-F9G/D-F9H Normally Closed Direct Mounting Style. D-Y7G/D-Y7H Normally Closed Direct Mounting Style. 2-color Indication Type . D-H7NW/D-H7PW/D-H7BW Band Mounting Style. D-G59W/D-G5PW/D-K59W Band Mounting Style.

Rotary Actuator/Vane Type

V V V 100 V 93A Oilproof heavy-duty cord V V V M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V S79 V V v v IC circuit 3-wire (PNP) S7P V V v v Solid state auto switch Grommet Yes For 20, 30, 40 Oilproof heavy-duty cord Relay, PLC 2-wire 12 V T79 V V v v Connector T79C V V V

Smooth Cylinder/Low Speed Cylinder

D-M9 (V) D-M9W (V) D-M9A (V) D-B59W D-B5 D-B64 D-G5NT Bore size (mm) A A A B A B B B A B A B A B A B 20 25 32 40 6.5 5.5 10.5 9.5 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 6.5 5.5 10.5 9.5 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 7.5 6.5 11.5 10.5 2 1 7 5 4 1.5 0.5 7 6 3.5 2.5 8 13.5 11.5 17.5 15.5 7 6 12 10 9 6.5 5.5 12 11 8.5 7.5 13 Note) Adjust the auto switch after confirming the operating conditions in the

NCQ8

Solid state switch D-M9 (V) D-F9 W(V) B A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

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state auto switch 2-wire 12 V M9BV M9B M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V,12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire

Made to Order

D-H7BA D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C80 D-H7 D-H7W D-H7NF D-H7BA D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) D-C7 D-C80 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B64 D-B59W D-A9(V) Bore size (mm) Bore size (mm) B 24 (32) 24 (32) 25 (33) 27 (36) 32 (36) B 20 (28) 20 (28) 21 (29) 23 (32) 28 (40) A A 21.5 (29.5) B 20.5 (28.5) A B 15.5 (22.5) A B 17.5 (25.5) A B 19.5 (27.5

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 8 8 7 Precautions Caution 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMA Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA V V V V V V XYA V V V V V Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 3.

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.