Magnet: None, Mounting: T (Center Trunnion), Style: Aluminum Tube, Bore Size: 63mm, Thread: TN (NPT), Stroke: 350mm, Option: K [Heat Resistant Tarpaulin, Cushion: Both Sides (Air-hydro has No Cushion)], Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 350mm, Option: K [Heat Resistant Tarpaulin, Cushion: Both Sides (Air-hydro has No Cushion)], Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -

Magnet: None, Mounting: Rear Flange, Style: Aluminum Tube, Bore Size: 100mm, Thread: NPT, Stroke: 350mm, Option: K [Heat Resistant Tarpaulin, Cushion: Both Sides (Air-hydro has No Cushion)], Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -

Magnet: None, Mounting: Center Trunnion, Style: Aluminum Tube, Bore Size: 100mm, Thread: NPT, Stroke: 350mm, Option: K [Heat Resistant Tarpaulin, Cushion: Both Sides (Air-hydro has No Cushion)], Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -

Magnet: None, Mounting: Center Trunnion, Style: Aluminum Tube, Bore Size: 63mm, Thread: NPT, Stroke: 350mm, Option: K [Heat Resistant Tarpaulin, Cushion: Both Sides (Air-hydro has No Cushion)], Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -

Magnet: D (Built-in Magnet), Mounting: T (Center Trunnion), Tube Material: Aluminum Tube, Bore Size: 63mm, Thread: TN (NPT), Stroke: 350mm, Bellows/Cushion: K (Heat Resistant Tarpaulin+Cushion Both Sides), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 350mm, Option: K [Heat Resistant Tarpaulin, Cushion: Both Sides (Air-hydro has No Cushion)], Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: J51--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewied Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.

1

q w e SY No.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

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1 e !

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

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Determination of load's kinetic energy (E) bore size E > Es E Es Determination of bore size Review of larger bore size E = m E 2 a ( ) 2 = (Refer to page 8-16-8.) 1000 P Ps P > Ps Determination of pressure for intermediate stop (p) (Refer to page 8-16-8.)

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0 r o @2 e !

ISO Cylinder

(Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A set of a, b, c, e

Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Smooth Cylinder/Low Speed Cylinder

-X 1233 Series CS2Y Dimensions Rod flange: CS2YF Port With rod boot V W G G 4 x J Cushion valve Width across flats KA 2 x P (Rc, NPT, G) 4 x FD MM FY D E E e B H K A AL ZZ1 + l + Stroke h + l l f FT B C N N F FZ FX ZZ + Stroke M S + Stroke (mm) Bore size (mm) Stroke range (mm) B C A AL B D E F FD FT FX FY FZ G J V 125 140 160 50 47 143 145 115 32 71 43 19 14 190 100 230 15 M14 x 1.5 15 Up

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Air Cylinder

3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

5

c, d, e) BMA3-040S (A set of b, c, d, e) BMA3-050S (A set of b, c, d, e) BMA3-063S (A set of b, c, d, e) RZQ Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band * Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).