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to 100 H EA CE2 EA FA GA A NE Rc P Rc P GA M Effective thread ML2B K WH ND H1 MM C J G5-S I C B CV D E LY 4-LD LH0.2 MVGQ LT CC JC Y X JC Y X S + Stroke NF LX LZ RB LS + Stroke ZZ + Stroke J DH1 50 0.042 I 11 JC 58 K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70 E Bore size (mm) Stroke range (mm) 50 Eff. thread length 32 -X Up to 1200 35 0 63 11 72 75 7 11 80 16 23 58 20 60 Up to 1200

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5 P-6 C-9 MY1B100 MY1B80 MY1B50 MY1B63 Description Material Qty.

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type B (Tool required) (EA)(P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center (B) (A) 4 2 Option 4 (EA)(P)(EB) 5 1 3 C : Locking type C (Lever) 3 position pressure center (B) (A) 4 2 5 (EA)(P)(EB) 5 1 3 Option How to Order Pilot Valve Assembly SF4 70 F 1 Coil rated voltage Manual override Symbol Rated voltage Non-locking push type Non-locking push type A (Extended) Nil

5 Port Solenoid Valve Series SY3000/5000/7000/9000

/60Hz 110V 50/60Hz 200V 50/60Hz 220V 50/60Hz Single Double Closed center Exhaust center Pressure center C[dm 3/(sbar)] Series 4/2 5/3 (A/B EA/EB) { } P.362 10-SY320 0.65 Body ported Base mounted Body ported Base mounted 10-SY520 2.4 10-SY720 3.3 10-SY920 8.6 P.378 10-SY340 1.1 10-SY540 2.8 A B 10-SY740 4.5 PE 10-SY940 10 Manual override A, B port size Valve option P, EA, EB port size Bracket

ZP

(Pad diameter: 20 mm or less) Flat Type with Ribs ZP T 10 C N A5 With adapter From p. 51 p. 117 From p. 121 ZP T 10 C N J 10 B5 A10 With buffer From p. 57 p. 118 From p. 124 Mounting Bracket Assembly Flat, Ball Joint Type Thin Flat Type with Ribs q w e r t y u i Flat type with ribs q Vacuum inlet direction w Pad diameter t Buffer stroke 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 e Material

ZP

ZP2-16UCL ZP (10, 13, 16) U ZP (10, 13, 16) C ZP (10, 13, 16) B ZP (10, 16) D ZPT2-A5, A6 ZPT2-B5, B6 B01, N01 T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P

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D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U C

Electric Actuators

Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Non-standard motor 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Standard motor 100/115VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor Nil W None N.C.

CQ2

Model C Mounting bolt Mounting bolt D 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 Model C Mounting bolt D 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 55 60 65 70 75 80 85 90 95 C' D' 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Rc 1 8 01 C6 C8 One-touch fitting for 6 One-touch fitting for 8 3 position pressure center 4 Note) P , R1, R2 port: Rc 1/8 5 24 VDC 12 VDC 5 6 9 Manual override Other Option Electrical entry Nil: Non-locking push type B: Locking type B (Slotted) C: Locking type C (Manual) Grommet L plug connector M plug connector DIN terminal

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E B + Stroke A + Stroke Dimensions (mm) Bore size (mm) Standard stroke (mm) A E 25, 50 st Over 50 st B C DA DB FA FB G GA GB GC H HA J K L 25, 50 st Over 50 st 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 Bore size (mm) Standard stroke (mm) 50 80 RB RR RL QA QB RA P PA PB

Battery-less

21 to 50 45 to 65% LEY25E A/B/C 21 to 35 40 to 50% 160 140 Lead 2.5: LEY16EC 120 Lead 5: LEY16EB LEY32E A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEY16EA 80 LEY40E A 24 to 30 50 to 65% B/C 21 to 30 60 40 Min. 20% 0 20 10 0 20 30 40 50 60 70 Pushing force set value [%] Max. 65% Model LEY16mE LEY25mE LEY32mE LEY40mE

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Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Non-standard motor 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Standard motor 100/115VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor Nil W None N.C.

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

Hydraulic

X L C X L + Stroke 47 32 to 100 2-P (port size) Approx.

2/3 Port Valve

Caution Check Safty Instructions on p.0-33 and common precautions on p.0-37 to 0-40. 4.0-14 Series VX Solenoid Coil Assembly How to Order VX021 C 001 01 B T Z Rated voltage (1) 02 200V AC 50/60Hz 01 100V AC 50/60Hz VX Solenoid coil assembly Option 03 110V AC 50/60Hz Without option Size parts No.

SY

/60Hz 2 200VAC 50/60Hz DOZ is not available. 110VAC 50/60Hz [115VAC 50/60Hz] "S" specification is not available for AC since it is integrated with the rectifier. 3 4 220VAC 50/60Hz [230VAC 50/60Hz] Electrical entry D With connector DIN terminal DO Without connector How to Order Interface Regulators (SY3000, 5000 only) 05 2 P ARBY3000 Series SY3000 Series SY5000 00 2 P ARBY5000 Regulated

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

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D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,