CQ2

Model C Mounting bolt Mounting bolt D 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 Model C Mounting bolt D 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 55 60 65 70 75 80 85 90 95 C' D' 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Rc 1 8 01 C6 C8 One-touch fitting for 6 One-touch fitting for 8 3 position pressure center 4 Note) P , R1, R2 port: Rc 1/8 5 24 VDC 12 VDC 5 6 9 Manual override Other Option Electrical entry Nil: Non-locking push type B: Locking type B (Slotted) C: Locking type C (Manual) Grommet L plug connector M plug connector DIN terminal

Table of Contents

E B + Stroke A + Stroke Dimensions (mm) Bore size (mm) Standard stroke (mm) A E 25, 50 st Over 50 st B C DA DB FA FB G GA GB GC H HA J K L 25, 50 st Over 50 st 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 Bore size (mm) Standard stroke (mm) 50 80 RB RR RL QA QB RA P PA PB

Battery-less

21 to 50 45 to 65% LEY25E A/B/C 21 to 35 40 to 50% 160 140 Lead 2.5: LEY16EC 120 Lead 5: LEY16EB LEY32E A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEY16EA 80 LEY40E A 24 to 30 50 to 65% B/C 21 to 30 60 40 Min. 20% 0 20 10 0 20 30 40 50 60 70 Pushing force set value [%] Max. 65% Model LEY16mE LEY25mE LEY32mE LEY40mE

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Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Non-standard motor 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Standard motor 100/115VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor Nil W None N.C.

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

Hydraulic

X L C X L + Stroke 47 32 to 100 2-P (port size) Approx.

2/3 Port Valve

Caution Check Safty Instructions on p.0-33 and common precautions on p.0-37 to 0-40. 4.0-14 Series VX Solenoid Coil Assembly How to Order VX021 C 001 01 B T Z Rated voltage (1) 02 200V AC 50/60Hz 01 100V AC 50/60Hz VX Solenoid coil assembly Option 03 110V AC 50/60Hz Without option Size parts No.

SY

/60Hz 2 200VAC 50/60Hz DOZ is not available. 110VAC 50/60Hz [115VAC 50/60Hz] "S" specification is not available for AC since it is integrated with the rectifier. 3 4 220VAC 50/60Hz [230VAC 50/60Hz] Electrical entry D With connector DIN terminal DO Without connector How to Order Interface Regulators (SY3000, 5000 only) 05 2 P ARBY3000 Series SY3000 Series SY5000 00 2 P ARBY5000 Regulated

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Table of Contents

air pressure (MPa) 35 Inlet air temperature (C) 32 Ambient temperature (C) 10 Outlet air pressure dew point (C) Compressed air Working fluid 5 to 50 Inlet air temperature (C) 0.15 to 1.0 Inlet air pressure (MPa) 2 to 40 (Relative humidity of 85% or less) Ambient temperature (humidity) (C) Single phase: 100 VAC (50 Hz), 100 to 110 VAC (60 Hz) Single phase: 200 VAC (50 Hz), 200 to 220 VAC

Table of Contents

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

MY1

1 to 22 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 Slide Bearing Type Series MY1M P. 23 to 37 16, 20, 25, 32, 40, 50, 63 Cam Follower Guide Type Series MY1C P. 39 to 53 16, 20, 25, 32, 40, 50, 63 High Precision Guide Type Series MY1H P. 55 to 76 10, 16, 20, 25, 32, 40 High Rigidity/High Precision Guide Type Series MY1HT P. 77 to 89 50, 63 Protective Cover Series MY1MW/CW Series MYMW/CW P. 90

5

10 26 RZQ Bore size (mm) M MM N P S WA ZZ 40 11 M14 x 1.5 27 1/4 84 18.5 146 50 11 M18 x 1.5 30 3/8 90 18.5 159 63 14 M18 x 1.5 31 3/8 98 23 170 80 17 M22 x 1.5 37 1/2 116 28.5 204 100 17 M26 x 1.5 40 1/2 126 28.5 215 Axial Foot: CA2YL G 2 x P G 2 x P MM H1 AL A H MM H1 AL A H G G 2 x Cushion valve K 2 x Cushion valve K 4 x J B1 4 x J B1 F F 4 x LD 4 x LD D D E E B C B C LY LH LY LH Width

Table of Contents

All data given in a technical specification sheet is based on 25[C]. The temperature range is dependent on the product series. Normally SMC products are rated from 0 to 50[C] or 0 to 60[C].

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

42

A, B port regulation) SUP stop valve spacer Release valve spacer: For D side mounting Locking type/Tool required SUP/EXH block plate Push type/Tool required SYJ Restrictor spacer Locking type/Manual External pilot 50/60 Hz 50/60 Hz Manifold SZ Grommet Plug-in VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ P.481 P.482 P.476 P.476 P.477 P.477 P.477 P.477 P.478 P.478 P.479 P.480 (Except S

VFS

Nil 2 200 VAC, 50/60 Hz 3110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz Non-locking push type (Extended) Locking type (Tool required) A 5 24 VDC B 6 12 VDC 7 240 VAC, 50/60 Hz C Locking type (Lever) 9 Other Option Option Refer to page 3-8-5 for voltage conversion. 3-8-54 55 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS3000 Cylinder Speed Chart Use as a guide