Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

Air Slide Table

Shock Absorber/RJ [mm] Model A B C D E F Applicable part no.

CQS

Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Mounting bolt Mounting bolt CDQSKB12-5D -10D -15D -20D -25D -30D CDQSKB16-5D -10D -15D -20D -25D -30D CDQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQSKB25-5D -10D -15D -20D

XM, XY

9 9 486 Stainless steel High Vacuum Angle/In-line Valve XMC, XYC Series Dimensions XYC-25, 40/In-line type C D G C B J H 45 E A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ XM XY XM XY B DH J XSA K XVD 45 XGT CYV A Fn (KF flange) E M (mm) Model A 121 148 177

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

CHKD/CHKG

Dimensions CHKDB--XC61 F with effective thread depth G Width across flats f C D d a Width across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40

MY1

CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10 MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B50 MY1B63 MY1B80 MY1B100 35 43 53 61 70 87 113 136 170 206 21 26 38 3.6 4.9 6.4 3.4 3.4 4.5 6.5 6.5 8 1.8 3 4 20Data A B MY-S25 50 8 5.5 35 M6 x 1 9.5 5 A B MY-S32 64

ISO Standard Hydraulic Cylinder

flange: CHSDFZ Z + Stroke PJ + Stroke GB GA Y J MM 2 x RcP Width across flats G 4 x FD Rod side cushion valve D BB E FY V Head side flange air release MA Air release Head side cushion valve Air release FZ FX B C A K F NA NB H ZZ + Stroke S + Stroke Stroke range Bore size (mm) H K MA MM PJ A B BB C D E F FD FX FY FZ G GA GB J NA P S V Y Z ZZ NB 40 8 25 to 800 52 6.6 70 86 47 M6 x 1 19 M16

CLS

V W FA AL T A K N N C B F M S + Stroke H BY ZZ + Stroke BW With rod boot 180, 200, 250 BV e BZ BG BE l f 15 h + l 4-MA Effective thread depth MB (To attach eyebolt) ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 A B BA BB BC BD BE BG BZ BW BP C D EA GB GC H J K MM MA MB BY BV AL E F KA FA N GA M 145 75 18 110 136 115 90 90 90 115 115 140 16 107 58 110 M14 x 1.5

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band Band

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

JIS Standard Hydraulic Cylinder

+ l 2 x Rc P 4 x FD J MM FY BB D E e Air release K F MA l C Width across flats G f Air release 10 NA FT A SS NB B SS + Q + l S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod 32 27 15 M10 x 1.25 25 to 1400 58 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

Tie-rod Type Hydraulic Cylinder

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a d B C F G GA GB K M MA NA NB R S Q V W T P J MM E D 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 17.5 M8 x 1.25 18 M14 x 1.5 7.5 8 44 18 9.5 13 11 25 20 1/4 14 30 22 37 106 5

NCQ8

J M2 bolt circle W M1 E I dia.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

D E F G H P U Part no.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MB Data MC KA MA C NA K NB S + Stroke H B ZZ + Stroke The allowable angle difference of E to B should be limited to 1.5.

Compact Type

F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-Rc1/8 thread depth 5 SS T Bore size (mm) 2 2-4.3 through 2 2-8 counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with depth 5.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with

Compact Type Dual-Rod Cylinder Series CXSJ

F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-Rc1/8 thread depth 5 SS T Bore size (mm) 2 2-4.3 through 2 2-8 counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with depth 5.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with

Environment

How to Order 25A-LEY 16 100 B C 1 1 6N S Series compatible with secondary batteries q w e r t y u i o !0 !1 !2 !