Air Slide Table

A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 2 1 m lead wire is only applicable to the D-A93.

Compact Cylinder

( ) is for D-A93.

MY1

Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.

Aluminum High Vacuum Angle Valve

(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-F79F D-F7NTL D-BAL D-A79W D-F7WV D-F7V D-F7BAVL D-J79 D-F7W D-J79W D-A7 D-A80 D-A7H D-A80H D-F7 12 to 25 32 to 50 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 32 to 50 Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAVL D-F7BAL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL

CQ2

D-J79W D-F7F D-F7NTL D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V 12 to 25 CU 32 to 50 CQS CQ2 MU D-A9 D-F9 D-A9V D-F9V D-F9WV D-F9W D-F9BAL 32 to 50 Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F7F D-F7NTL D-A7H D-A80H D-A73C D-A80C D-F7 D-J79 D-F7V D-J79C D-F7BAL D-F7W D-F7F D-J79W D-F7WV D-F9W D-F9WV D-F9BAL D-F9WV D-F9W

CATALOG

Z 50 100 150 200 300 400 500 3.02 3.31 3.56 4.04 3.02 3.23 3.52 4.00 3.04 3.25 3.54 4.02 4.44 5.06 5.83 D I M E N S I O N S ( I N C H) S TA N D A R D S I N G L E A C T I N G S P R I N G E X T E N D R O D S I D E F L A N G E T Y P E NCJ2F_-_T S Z T H MM NN NA NB 50 100 150 200 300 400 500 50 100 150 200 300 400 500 Bore Size* A B C D F GA FC FT FX FY FZ 0.12 1.10 No5-40UNC 1/4-28UNF 0.63 0.12

A

Z 50 100 150 200 300 400 500 3.02 3.31 3.56 4.04 3.02 3.23 3.52 4.00 3.04 3.25 3.54 4.02 4.44 5.06 5.83 D I M E N S I O N S ( I N C H) S TA N D A R D S I N G L E A C T I N G S P R I N G E X T E N D R O D S I D E F L A N G E T Y P E NCJ2F_-_T S Z T H MM NN NA NB 50 100 150 200 300 400 500 50 100 150 200 300 400 500 Bore Size* A B C D F GA FC FT FX FY FZ 0.12 1.10 No5-40UNC 1/4-28UNF 0.63 0.12

Hydraulic

D-F59F D-F5NTL 10 125 125 130 140 150 160 Same side 1 pc. 10 D-B5, D-B6 D-G5, D-K59 D-G5W, D-K59W D-G59F D-G5BAL, D-G5NTL Different sides 15 2 pcs.

CQS

D-A93.

CQS

175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Reed switch D-A90, A90V D-A93, A93V D-A96, A96V Series CQSW Basic Non-rotating Rod Anti-lateral Load 12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16

MY1

D-A93(V) Brown [Red] Contact protection box LED OUT(+) Brown [Red] Reed switch Resistor Weights Zener diode (g) CD-P11 CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V OUT() Blue [Black] Auto switch part no.

e-Rodless Actuator

Auto Switch Internal Circuit D-A90 (V) Contact protection box OUT () Brown Reed switch Unit: g Weight Table CD-P11 OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model Lead wire length: 0.5 m 6 6 6 6 8 8 D-A93 (V) Lead wire length: 3 m 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Resistor Unit: mm Dimensions Reed switch Zener diode CD-P11 D-A90/D-A93/D-A96

10

Auto Switch Proper Mounting Height (Standard type) [mm] Auto switch model D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-F5NT D-Y59l D-Y7P D-Y7lW D-Y7BA D-Z7l D-Z80 D-M9l D-M9lW D-M9lA D-A9l D-A9lV D-M9lV D-M9lWV D-M9lAV D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-G39 D-K39 D-A3l D-A44 Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23

CHKD/CHKG

For details, refer to pages 443 and 445. 273 CHKD Series How to Mount and Move the Auto Switch Solid state D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) D-Y7BA Reed D-Z73, D-Z76, D-Z80 Solid state D-M9N(V), D-M9P(V), D-M9B(V), D-M9NW(V), D-M9PW(V), D-M9BW(V) D-M9NA(V), D-M9PA(V), D-M9BA(V) Reed D-A90(V), D-A93(V), D-A96(V) A

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

(V), D-A93(V), D-A96(V) Auto Switch Specifications D-A96 D-A90 D-A90V D-A93 D-A93V In-line D-A96V Auto switch part no.

MXS

70 75 80 GA 22 22 22 22 55 61 102 154 190 KA M 92 92 92 102 115 156 197 255 295 MXS25L-10 MXS25L-20 MXS25L-30 MXS25L-40 MXS25L-50 MXS25L-75 MXS25L-100 MXS25L-125 MXS25L-150 162 218 258 3.11-34 Air Slide Table Series MXS Auto Switch Mounting Position for Stroke End Detection Reed switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 20 30 40 75 100

MXS Series Air Slide Table

175 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 MXS25L-10 MXS25L-20 MXS25L-30 MXS25L-40 MXS25L-50 MXS25L-75 MXS25L-100 MXS25L-125 MXS25L-150 162 218 258 72 72 Air Slide Table MXS Series Appropriate mounting position for stroke end detection (mm) Reed switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 40 10 75 20 50 75 100 20 40 100

High Vacuum Angle Valve

(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A80C D-J79C D-F79F D-F7NTL D-BAL D-J79 D-F7W D-J79W D-A79W D-F7WV D-F7V D-F7BAVL D-A7 D-A80 D-A7H D-A80H D-F7 12 to 25 32 to 50 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 32 to 50 Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAVL D-F7BAL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL