Aluminum High Vacuum Angle Valve

Without auto switch (without built-in magnet) D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not applicable for H4, H5, Size 25 not for H4. y Number of auto switches/Mounting

Table of Contents

44.5 A 19.5 29.5 35.5 43 44 53 D 7.5 5 2 5 7 7.5 MY 6 10 15 20 25 32 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

Table of Contents

D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style .

Air Cylinder

106.5 40 13.5 36.5 61.5 86.5 111.5 136.5 D-H7l D-H7C D-H7lW D-H7BA D-H7NF D-A9l(V) 20 6.5 30 55 80 25 5.5 30.5 55.5 80.5 32 7 31 56 81 106 40 13 36 61 86 111 136 20 3 26.5 51.5 76.5 25 2 27 52 77 32 3.5 27.5 52.5 77.5 102.5 40 9.5 32.5 57.5 81.5 107.5 132.5 D-G5NT 20 1.5 25 50 75 25 0.5 25.5 50.5 75.5 32 2 26 51 76 101 40 8 31 56 81 106 131 D-C7l D-C80 D-C73C D-C80C D-B5l

5

MQ (mm) Auto Switch Mounting Height D-M9m D-M9mW D-M9mA D-A9m D-C7m D-C80 D-H7m D-H7mW D-H7NF Auto switch model D-B5m D-B64 D-B59W D-G5NT D-H7C RHC D-M9mV D-M9mWV D-M9mAV D-A9mV D-A3mA D-G39A D-K39A D-A44A D-C73C D-C80C RZQ Bore size Hs Hs Hs Hs Hs Hs 20 23.5 25.5 22.5 25 60 69.5 25 26 28 25 27.5 62.5 72 32 29.5 31.5 28.5 31 66 75.5 40 33.5 35.5 32.5 35 70 79.5 D-X 169 CM2Y Series Minimum

Air Cylinder

D-H7l D-H7C D-G5l/K59 D-G5lW/K59W D-G59F D-G5NT D-G5BA D-C7l D-C80 D-C73C D-C80C D-B5l D-B64 D-B59W D-A9l D-A9lV Bore size A B A B A B A B A B A B A B 20 33 24 (32) 29 20 (28) 28.5 19.5 (27.5) 29.5 20.5 (28.5) 25 16 (24) 23.5 14.5 (22.5) 26.5 17.5 (25.5) 25 32.5 24.5 (32.5) 28.5 20.5 (28.5) 28 20 (28) 29 21 (29) 24.5 16.5 (24.5) 23 15 (23) 26 18 (26) 32 34 25 (33) 30 21 (29) 29.5 20.5 (28.5

Smooth Cylinder/Low Speed Cylinder

Auto Switch Mounting Height (mm) D-M9 D-M9W D-M9A D-A9 D-C7 D-C80 D-H7 D-H7W D-H7NF Auto switch model D-B5 D-B64 D-B59W D-G5NT D-H7C D-A9V D-M9V D-M9WV D-M9AV D-A3A D-G39A D-K39A D-C73C D-C80C D-A44A Bore size (mm) 20 25 32 40 Hs Hs Hs Hs Hs Hs 23.5 25.5 22.5 25 60 69.5 26 28 25 27.5 62.5 72 29.5 31.5 28.5 31 66 75.5 33.5 35.5 32.5 35 70 79.5 1200 Auto Switch Mounting Series CM2Y Minimum

MY1

D-A90(V) AC DC AC DC 100V or less 20mA AC DC 24V or less 50mA Maximum load current Contact protection box OUT () Brown [Red] Reed switch Reed switch Reed switch Contact protection circuit Internal voltage drop CD-P11 OUT ( ) Blue [Black] CD-P12 D-A93, A93V, D-A96, A96V (with indicator light) D-A93(V) D-A93 In-line D-A93V Perpendicular D-A96 In-line D-A96V Perpendicular Relay, PLC IC circuit

CXS

B (mm) Symbol D-A90, D-A96 15.4 13.4 5.4 D-A93 15.4 10.9 7.9 D-F9 19.4 0.6 9.4 9.4 A B Note) C D A C Note) For D-A90, D-A96, and D-A93, only outward electrical entry (D dimension) is available.

Compact Type

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

CQS

, 125, 150 175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series

Compact Type Dual-Rod Cylinder Series CXSJ

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

Compact Cylinder

( ) is for D-A93.

Table of Contents

10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB MSQ MHZ2 MHZJ2 MHL2 MDHR MHS 12-25 MHK MHS MHC2 MHT2 MHW2 10-25 MHY MRHQ MHL Grommet D-A72/A73/A80 12-13-7 D-A72H/A73H D-A76H/A80H 12-13-8 MHR Rail Connector D-A73C/A80C 12-13-9 D-A53/A54/A56 D-A64/A67 MHK Grommet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

2–4

D-A93.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

(V), D-A93(V), D-A96(V) Auto Switch Specifications D-A96 D-A90 D-A90V D-A93 D-A93V In-line D-A96V Auto switch part no.

High Vacuum Angle Valve

switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Auto Switch Guide

/A34C Tie-rod RZQ 10-20-19 D-A44C DIN terminal MI W S D-A90/A93/A96 D-A90V/A93V/A96V 10-20-20 CEP1 D-90/97 Grommet Direct D-90A/93A CE1 D-Z73/Z76/Z80 10-20-21 CE2 10-20-22 D-E73A/E76A/E80A ML2B Grommet Band D-B59W 10-20-23 2-color indication Grommet Rail D-A79W 10-20-24 C J G5-S Grommet Tie-rod D-A59W 10-20-25 CV This auto switch can be mounted by tie-rod with using mounting bracket.

Auto Switch Guide

19 D-A44C DIN terminal RLQ D-A90/A93/A96 D-A90V/A93V/A96V 9-15-20 MLU D-90/97 Grommet Direct D-90A/93A ML1C D-Z73/Z76/Z80 9-15-21 DD-E73A/E76A/E80A 9-15-22 -X Grommet Band D-B59W 9-15-23 2-color indication Grommet Rail D-A79W 9-15-24 20Grommet Tie-rod D-A59W 9-15-25 Data This auto switch can be mounted by tie-rod with using mounting bracket.