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Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.

A

O F C Y L I N D E R) D O U B L E R O D C Y L I N D E R Bore Stock range Effective thread A B C D E F FX FD FT GA (mm) (mm) length 20 200 15.5 18 40 14 8 12 2 28 5.5 6 12 25 300 19.5 22 44 16.5 10 14 2 32 5.5 7 12 32 300 19.5 22 53 20 12 18 2 38 6.6 7 12 40 300 27 30 61 26 16 25 2 46 6.6 8 13 50 300 32 35 76 32 20 30 2 58 9 9 14 63 300 32 35 92 38 20 32 2 70 11 9 14 80 300 37 40 104 50 25

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: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

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A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

Made to Order

CS1 (D) (B) (D) (B) (D) (B) (D) (B) CNA2 (C) (C) (C) (C) (C) (C) (C) Cushion valve CL1 1.

Electric Actuator/Slider Type

5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

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400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Locking type C (Manual) Grommet L plug connector M plug connector DIN terminal L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire D: With connector G: Lead wire length 300 mm LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector H: Lead wire length 600 mm Light/Surge voltage suppressor Nil None Z With light/surge voltage

Battery-less

4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

LJ1H

B C D A Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

Air Slide Table

M D B B E C A P F Single rubber stopper M M G D A A MXQA-A27 Model Adjuster part no.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Grommet L plug connector MN: Without lead wire WO: Without connector cable G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D, Y: With connector Coil type + + Standard Nil T With power saving circuit (24, 12 VDC only) + + + + + + Power saving circuit is not available for D, Y, DO, YO or W types.

SX

for increasing stations (a) Bolt (b) Block separation (c) DIN rail release button lever Lid D side Replacement Parts Description SX3000 Part no.

SY

276 17 310.5 300 286.5 12 323 312.5 297 13 SS5Y3-45FU-D .

Electric Actuator with Integrated Guide

D C B A Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

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R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

MY1

G D Za 4-MM E E E E E E E E C F B G D Section Z detail (adjustable range) Section Za detail (adjustable range) F B Q P Zb JJ B B C Z B F K H A L 2 x 2LD H A H A Section Zb detail (adjustable range) Holding bolt J Mounting direction 2 Applicable cylinder MY1B50 MY1B63 Mounting direction 1 C C A C H B D G F Model 110 131 55 65 37 37 110 130 MY-J50 MY-J63 70 80 90 100 126 149 Mounting direction

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

mm) q C side traveling parallelism to A side w D side traveling parallelism to B side q w LEJl40 0.05 0.03 C side D side LEJl63 0.05 0.03 Note) Traveling parallelism does not include the mounting surface accuracy.

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(kg) Applicable dryer Port size NPT A B C D E D E Part no.

1

(B) (D) (B) (D) (B) (D) (B) (D) (B) (D) (B) (D) (B) CA2 Double acting, Single rod Air cylinder CP95 CA2W Double acting, Double rod (C) (C) (C) (C) (C) (C) (C) CA2 6 Cushion valve CA2Q Double acting, Single rod Low friction type NCM CBA1 Double acting, Single rod Cylinder with end lock 1.