Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

NCQ8

L M9NL 197in (5 m) .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

Compact Hydraulic Cylinder

(Example) CHDQB50-100D Applicable Auto Switches/Refer to pages 431 to 490 for further details on each auto switch.

CLQ

-100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D -30D -30D -35D -35D -35D -35D 16.5 15.5 8.5 -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D -100D -100D -100D 4 Series CLQ Construction/20 to 32 A B A' B'

Compact Cylinder with Lock Series CLQ

-100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D -30D -30D -35D -35D -35D -35D 16.5 15.5 8.5 -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D -100D -100D -100D 4 Series CLQ Construction/20 to 32 A B A' B

CLQ

75D x 165l x 190l -100D -100D -100D x 190l x 215l 9-10-11 11 Series CLQ Construction: 20 to 32 i o !

Hydraulic

(M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) x 165l 100D (M) 100D (M) M5 x 75l x 80l x 85l M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l CHQB100 10D

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

CHQWB40 5D (M) 15D (M) 10D (M) 20D (M) 15D (M) 25D (M) 20D (M) 30D (M) 25D (M) 35D (M) 30D (M) 13.5 10 40D (M) 35D (M) 45D (M) 40D (M) 50D (M) 45D (M) 75D (M) 50D (M) 100D (M) 75D (M) 100D (M) CH QWB50 10D (M) 15D (M) 20D (M) 25D (M) 30D (M) 35D (M) 12 40D (M) 45D (M) 50D (M) 75D (M) 100D (M) 38 Series CHQWB Construction CHQWB20 Rod end male thread CHQWB32 to CHQWB100 Rod end male thread

A

P Q R SA SB SC TA TB UA MHS3-100D 4 34 18h9 -0.043~0 7.5 Rc(PT)1/4 23 118 9 14 21 M4x1.25 16 M8x1.25 MHS3-125D 6 40 22h9 -0.052~0 10.5 Rc(PT)3/8 31 148 11 17.5 34 M10x1.5 20 M10x1.5 Part No UB VA VB WA WB XA XB MHS3-100D 16 8H9 0~0.036 6 102H9 0~0.087 4 8H9 0~0.036 6 MHS3-125D 20 10H9 0~0.036 8 130H9 0~0.1 6 10H9 0~0.036 8 (mm) Courtesy of Steven Engineering, Inc. !

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) x 165l 100D (M) 100D (M) M5 x 75l x 80l x 85l CHQB100 10D (M) M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x

CATALOG

Part No M NA NB O P Q R SA SB SC TA TB UA MHS3-100D 4 34 18h9 -0.043~0 7.5 Rc(PT)1/4 23 118 9 14 21 M4x1.25 16 M8x1.25 MHS3-125D 6 40 22h9 -0.052~0 10.5 Rc(PT)3/8 31 148 11 17.5 34 M10x1.5 20 M10x1.5 Part No UB VA VB WA WB XA XB MHS3-100D 16 8H9 0~0.036 6 102H9 0~0.087 4 8H9 0~0.036 6 MHS3-125D 20 10H9 0~0.036 8 130H9 0~0.1 6 10H9 0~0.036 8 (mm) NOTE) FOR MHS2 AND MHS4 DIMENSIONS AND MORE

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols:0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Table of Contents

, 12 V A93 A90 M9N M9P M9B F9NW F9PW F9BW A93V A90V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC IC circuit 100 V or less No 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Grommet Relay, PLC Yes 24V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Solid state switch Yes Yes Grommet Relay, PLC A93 A93V 2-wire 12 V 24 V 100 V M9N M9NV 3-wire (NPN) IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) Relay, PLC M9B M9BV 2-wire 12 V 24 V Grommet F9NW F9NWV 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL

MHS

MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3 12 50D M61 7.3 12 63D M61 7.3 12 MHS3 Nm mm MHS3-16D M30.5 0.66 4.5 20D M30.5 0.88 6 25D M40.7 1.6 6 32D M40.7 1.6 6 40D M50.8 3.2 7.5 50D M50.8 4.3 10 63D M61 5.4 9 80D M61 7.3 12 100D

CL

Example) 40D-A3C-4, 50D-A3C-5, 63D-A3C-6, 80D-A3C-8, 100D-A3C-10 To order the mounting brackets separately, use the part number shown above.

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port