CLQ

CLQB: Without Built-in Magnet CL CL1 Model C D Model C D Model C D Model C D Mounting bolt Mounting bolt Mounting bolt Mounting bolt CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB32-10D CLQB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB80-10D 55

CXT

Nil) 3 (L) 5 (Z) None (N) AC DC In-line In-line Perpendicular Perpendicular 3-wire (NPN equivalent) IC circuit 5 V A76H A96V A96 A93V A93 A72H A73H A72 A73 A73C 200 V Grommet Reed switch Solid state switch Yes Yes 100 V 12 V Relay, PLC 24 V 2-wire Connector 12 V Diagnostic indication (2-color indication) Grommet A79W 3-wire (NPN) 3-wire (PNP) F79 F7P J79 F79W F7PW J79W F7BA M9NV

Table of Contents

Load voltage Auto switch model Lead wire length (m) Pre-wired connector 0.5 (Nil) Indicator light Wiring (Output) Special function Type Electrical entry Applicable load 3 (L) 5 (Z) AC DC Perpendicular In-line 3-wire IC circuit 5 V A96V A96 Yes Reed switch Solid state switch (NPN equivalent) Grommet 100 V 24V 12 V 5 V, 12 V A93 A90 M9N M9P M9B F9NW F9PW F9BW A93V A90V M9NV M9PV M9BV F9NWV

smcmaintenancepartslist

Long stroke CXT12 CXT16 CXT20 CXT25 CXT32 CXT40 CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS CQ2A32-L-PS CQ2A40-L-PS CDQSB12 CDQSB16 CDQSB20 CDQSB25 CDQ2A32 CDQ2A40 Seal kit includes @7, @8 and @9. Order the seal kit with the kit number. Since the seal kit does not include a grease pack, order it separately.

02-cxt-e

CQSB25-PS CQ2B32-PS CQ2B40-PS Long stroke CQSB12-L-PS CXT12 CXT16 CXT20 CXT25 CXT32 CXT40 CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS CQ2A32-L-PS CQ2A40-L-PS CDQSB12 CDQSB16 CDQSB20 CDQSB25 CDQ2A32 CDQ2A40 CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS CQ2A32-L-PS CQ2A40-L-PS Seal kit includes @7, @8 and @9. Order the seal kit with the kit number.

CQ2

Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -

Table of Contents

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

VFS

Non plug-in type VV5FS3-10 VFS310-D VFS310-E Plug-in type with terminal block: 6 stations (Manifold base) VV5FS3-01T-061-02 1 (2 position single) VFS3100-5FZ 3 (2 position double) VFS3200-5FZ 2 (Blanking plate) VVFS3000-10A 1 Non plug-in type: 6 stations (Manifold base) VV5FS3-10-061-03 1 (2 position single) VFS3110-5D 5 (3 position exhaust center) VFS3410-5D

VFR

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Hydraulic

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M8 x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 160l x 185l 5D (M) CHQB63 10D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105

Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet, Body Options: Standard (rod-end female thread), Auto Switches: M9NV

Clean Series: 11 (Vacuum Suction Type), Magnet: D (Built-in), Bore Size: 20mm, Stroke: 5mm, Rod End Thread: Female, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical

Clean Series: 22 [Vacuum Suction Type (Copper, Fluorine and Silicon-free + Low Particle Generation)], Magnet: D (Built-in), Bore Size: 20mm, Stroke: 5mm, Rod End Thread: Female, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical

Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet, Body Options: Standard (rod-end female thread), Auto Switches: M9NV

Clean Series: 22 [Vacuum Suction Type (Copper, Fluorine and Silicon-free + Low Particle Generation)], Magnet: Built-in, Bore Size: 20mm, Stroke: 5mm, Rod End Thread: Female, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: -, Number: -

42

P U S H 4(A) 26.4 FREE LOCK 1(P) 2(B) VQZ SQ VFS 3(R2) 5(R1) Circuit diagram VFR Plug-in type Plug lead type VQ7 Release valve spacer: For D side mounting VVQ4000-24A-1D (Plug-in type) VVQ4000-24A-5D (Plug lead type) 149 (Plug-in type) 101.5 (Plug lead type) 59 Combination of VQ41ll (Single) and release valve spacer can be used as air release valve.

Electromagnetic Digital Flow Switch

The straight piping length shall be 5 times (5D) or more of the piping size to achieve the stable measurement. 3 Accuracy change [% F.S.] 2 [mm] 1 Model Straight piping length D 5D LFE1 11 55 LFE2 21 105 LFE3 27 135 [Port size] [Measurement conditions] Fluid: Tap water Pressure: 0.2 MPa 0 D 2D 3D 4D 5D LFE1: 3/8 inch LFE2: 3/4 inch LFE3: 1 inch 0 Straight piping length Operating Pressure

CLQ

120l x 125l x 130l x 135l x 140l x 145l x 150l x 175l x 200l 65 70 75 80 85 90 95 100 105 110 70 75 80 85 90 95 100 105 110 115 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105 110 115 120 125 150 175 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 CDLQB20-5D

VFN2000N

Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 400 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF