Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Valves: Not Provided, Allowable Kinetic Energy(J): 0.00039, Torque(N⋅m): 0.75, Operating Pressure

Magnet: Magnet, Shaft Type: Double Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Magnet: Magnet, Shaft Type: Double Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Magnet, Shaft Type: Double Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Magnet, Shaft Type: Double Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Magnet: Magnet, Shaft Type: Double Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Magnet: Magnet, Shaft Type: Double Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Magnet, Shaft Type: Double Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Magnet, Shaft Type: Double Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: A90V--Reed, DC Volt, AC Volt, Vertical, Lead Wire or Prewired Connector: 3m, Number: -

1

DIN Rail Option Nil 0 3 Direct mounting Without DIN rail (with bracket) For 3 stations Specify a longer rail than the total length of specified stations. 16 For 16 stations INDEX Protective class class # (Mark: ) 180 Series SY3000/5000/7000 How to Order Valves (With mounting screw) Refer to page 17 for valve specifications. q w r e t y u i o !0 !

Table of Contents

-X168 (Example) MY2H40G-599L-A93-XB10 Symbol Symbol 2 Long Stroke -XB11 4 Copper-free 20Available with long strokes exceeding the standard strokes.

Table of Contents

Table unit has positioning mechanisms for each 90 and 180 of rotation.

Table of Contents

D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style .

Table of Contents

MHC Model MHT Note) Opening/Closing stroke (mm) Cylinder bore (mm) Rotating angle () Weight (g) MHY Action Model MHW 306 90 MRHQ10D 4 10 305 180 MRHQ 593 90 MRHQ16D 6 16 Misc. 591 180 Double acting 1055 90 MRHQ20D 10 20 D1052 180 1561 90 20MRHQ25D 14 25 1555 180 307 90 MRHQ10S MRHQ10C 4 10 306 180 MRHQ16S MRHQ16C 594 90 6 16 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 10 20 1057 180 1566

High Vacuum Angle Valve

(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Air Slide Table

L [mm] Allowable overhang L [mm] 180 MXQ Series interchangeable type MXQ 20A-mZm, MXQ 20-mZm Height Determine the overhang.

Rotary Table/

L H Low energy shock absorber High energy shock absorber Connecting port position and rotation Port location/Rotation Standard type 180 2 3 4 5 Rotation 180 90 90 180 3: Standard type, 90 2: Standard type, 180 Symmetric type 90 Standard type Connecting port Connecting port Refer to the table to the right.

Made to Order

M L CXS series: 20, 25, 32 M L CXS series: 10, 15 Stroke Stroke CXS 10 M L CXS 15 M L CXS 20 M L CXS 25 M L CXS 32 M L 150 210 229 75 Model Stroke SS ZZ Z 80 135 152 50 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 175 257 287 125 180 197 200 282 312 120 180 199 65 125 207 237 150 232 262 110 170 189 125 185 204 110 192 222 110 180 204 120 202 232 120 190 214

MY1

D-A90(V) AC DC AC DC 100V or less 20mA AC DC 24V or less 50mA Maximum load current Contact protection box OUT () Brown [Red] Reed switch Reed switch Reed switch Contact protection circuit Internal voltage drop CD-P11 OUT ( ) Blue [Black] CD-P12 D-A93, A93V, D-A96, A96V (with indicator light) D-A93(V) D-A93 In-line D-A93V Perpendicular D-A96 In-line D-A96V Perpendicular Relay, PLC IC circuit

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6. 125 140 160 180 200 Bore size (mm) 0.05 Minimum operating pressure Allowable Kinetic Energy (J) Caution 125 140 160 180 200 Bore size (mm) Snap Ring Installation/Removal Allowable kinetic energy 12.4 9.8 7.4 1.