V100

(The standard valve has an individual exhaust for the pilot valve.) 4-14-18 19 Series VQZ Replacement Parts Body Ported One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Model M5 (VQZ100 only) VQZ100/200 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ300 VVQ1000-51A-C8 VVQ1000-51A-C10 VVQ1000-51A-C6 Note) Purchasing order is available in units

70pvvna

Threaded type from 6A to 50A is standardized.

Process Valve

Threaded type from 6A to 50A is standardized.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

models with a DIN terminal Direct Operated High Flow/ Power Saving Type JSXmmU Series p. 11 Direct Operated JSX Series pp. 7, 9 Port size Port size 1/8 to 3/8 1/8 to 3/8 Direct Operated Modular Mounting Type JSXM Series p. 39 Pilot Operated Zero Differential Pressure Type Pilot Operated JSXD Series p. 25 JSXZ Series p. 35 Port size Port size Port size 1/4 to 1 1/8 to 1/2 1/4 to 2 32 to 50A

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism (stop diode) Note) A-side energized: Light (orange) ON B-side energized: Light (green) ON With surge absorbing mechanism

VQ1000V-OMV0001

4 VVQ1000-50A-C4 VVQ1000-51A-C4 6 VVQ1000-50A-C6 VVQ1000-51A-C6 8 VVQ1000-51A-C8 M5 VVQ1000-50A-M5 1/8" VVQ1000-50A-N1 5/32" VVQ1000-50A-N3 VVQ1000-51A-N3 1/4" VVQ1000-50A-N7 VVQ1000-51A-N7 5/16" VVQ1000-51A-N9 DIN DIN DIN DIN C S=5.0XC Q = [dm 3/min(ANR)] S [mm 2] P1 [MPa] P2 [MPa] t = [] ) ) ) DIN ) DIN 0.40.6Nm No.VQ1000V-OMV0001 9 - 1) 2) 1) 1) 2) OFF DC 3% AC 8% 3 Assy Assy

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism With surge absorbing mechanism (surge absorbing diode) mechanism Note) A-side energized: Light (orange) ON B-side

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Applicable tubing O.D. 1021-VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 A B B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable

0.4

VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable tubing 1/4" Applicable

0.4

VQC1000 VQC2000 [SOL.A] () Applicable tubing 3.2 VVQ1000-50A-C3 COM (+) Applicable tubing 4 VVQ1000-51A-C4 VVQ1000-50A-C4 LED (Green) Coil LED Coil Applicable tubing 6 VVQ1000-51A-C6 VVQ1000-50A-C6 COM (+) [SOL.A] () Applicable tubing 8 VVQ1000-51A-C8 M5 VVQ1000-50A-M5 Coil LED (Orange) Applicable tubing 1/8" VVQ1000-50A-N1 [SOL.B] () Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-50A-N3

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Applicable tubing O.D. 1021-VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 A B B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 VVQ1000-50A-C3 Applicable tube 3.2 VVQ1000-50A-C4 Applicable tube 4 VVQ1000-50A-C6 Applicable tube 6 The minimum order quantity is 10 pcs. Precautions 1) Protect O rings from scratches and dust to prevent air leakage. 2) The tightening torque for inserting fittings to the M5 thread ass'y should be 0.8 to 1.4 Nm.

ZQ-OM01401

(1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A F1-LC3 3.2 () F1-LC4 4 () 9 Assy ZQ1-BK1-A 25 - No.ZQ-OM01401-B 7.3 b a a a 1. (2 ) 2.

VND

-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31 120 130 240 380 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 VC 1 4 1 440 32 32 1 2 1 VDW 920 40 40 2 VQ 1500 50 50 Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

SQ1000/2000

(mm) SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SQ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 Part numbers above are for a set of ten elements. 3.2 4 6 8 Tightening torque: 0.5 to 0.7Nm Part numbers above are for one fitting; however, order them in 10 piece units. Caution Element Do not scratch or put foreign matter on the O-rings as this will cause air leakage.

Steam Valve

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634 Steam Valve: 2 Port Valve For SteamVND Series Model Port size Flow rate characteristics Weight (kg) Orifice dia.

modular-press-e

Port plug K PBT/HNBR Refer to page 239. 238 Series ARM11A/B Compact Manifold Regulator Options Replacement Procedure is P.453 One-touch Fittings for Regulator Block Straight type Elbow type VVQ1000 50A C4 Actuators Modular F.R.L.

smcmaintenancepartslist

Port plug K PBT/HNBR Refer to page 239. 238 Series ARM11A/B Compact Manifold Regulator Options Replacement Procedure is P.453 One-touch Fittings for Regulator Block Straight type Elbow type VVQ1000 50A C4 Actuators Modular F.R.L.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(The standard valve has an individual exhaust for the pilot valve.) 4-14-18 19 Series VQZ Replacement Parts Body Ported One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Model M5 (VQZ100 only) VQZ100/200 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ300 VVQ1000-51A-C8 VVQ1000-51A-C10 VVQ1000-51A-C6 Note) Purchasing order is available in units