MHF2

Double piston construction achieves compact design with strong gripping force. q r Mounting is possible from 4 directions. e w Model Bore size Gripping force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 12-3-3 4 Series MHF2 Model Selection Model Selection Selection Procedure Confirm gripping force Confirm

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

NCQ8

L M9NL 197in (5 m) .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion

Magnet: D (Built-in Magnet), Bore Size: 10 mm, Port Thread: Bore 6~25:M5, Bore 32: Rc 1/8, Stroke: 10 mm

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-15D -20D -25D -30D CQ2B16-5D -10D -15D -20D -25D -30D CQ2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B63-10D -15D -20D -25D -30D

CQ2

-15D -20D -25D -30D CQ2B16-5D -10D -15D -20D -25D -30D CQ2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B100-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B32-5D -10D -15D -20D -25D -30D -35D

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-15D -20D -25D -30D CQ2B16-5D -10D -15D -20D -25D -30D CQ2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B63-10D -15D -20D -25D -30D

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Solid state switch Yes Yes Grommet Relay, PLC A93 A93V 2-wire 12 V 24 V 100 V M9N M9NV 3-wire (NPN) IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) Relay, PLC M9B M9BV 2-wire 12 V 24 V Grommet F9NW F9NWV 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols:0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

CQS

CQSWB125D 10D 15D 20D 25D 30D CQSWB165D 10D 15D 20D 25D 30D CQSWB205D 10D 15D 20D CQSWB2025D 30D 35D 40D 45D 50D CQSWB255D 10D 15D 20D 25D 30D 35D 40D 45D 50D 6.5 10 6.5 7 10 Note) Appropriate plain washer must be used for through-hole mounting.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

CLQ

CLQB: Without Built-in Magnet CL CL1 Model C D Model C D Model C D Model C D Mounting bolt Mounting bolt Mounting bolt Mounting bolt CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB32-10D CLQB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB80-10D 55