Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CDRB2BW10/15S D CDRB2BW20/30S D CDRB2BW40S D CRB2 A port B port CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20!7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

air-filter-e

L-131S L-135S FQ-OP001 BP-13S For port size Rc 1 For port size Rc 3/4 For port size Rc 1/2 Bracket Stainless steel 304 BP-14S BP-15S 272 Low Maintenance Filter Series FN1/FN4 P.483 1 Replacement Procedure is Replacement Parts and Seal List How to Order Actuators Modular F.R.L.

Air Preparation Equipment

L-131S L-135S FQ-OP001 BP-13S For port size Rc 1 For port size Rc 3/4 For port size Rc 1/2 Bracket Stainless steel 304 BP-14S BP-15S 272 Low Maintenance Filter Series FN1/FN4 P.483 1 Replacement Procedure is Replacement Parts and Seal List How to Order Actuators Modular F.R.L.

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

NCQ8

L M9NL 197in (5 m) .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Cylinder

. /"(2 " .' ,," / ro~ ~ e ~With , autO sw.itCh Bore size w i (mm) 15S): 20~t ; . P .: 5st 1 ,1pat 3q'S;, .:0 .r -6 I 6 3 47.5 52.5 57.5 62.5 16.5 10.5 20 10 3 I SO.5 55.5 ' 2IP I tao , . 1 ' 60.5 IJ 35.5 ..75 5 4 154.5 59.5 64.5169.5 79.5 24.51 '5.5 23 i_ 15 R ' . s I I ~Bore size S' ! D A A' S .

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

None None None None None None None White Black Black Red Red Red Black Black Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Plug connector HDA-CTH (Made by Hirose Electric) Red Connector HAD-15S (Made by Hirose Electric) Terminal no. 2 x M2.6 x 0.45 Terminal no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15S D CDRBU2W20, 30, 40CDRBU2W40-S/D S D For single vane type: Figures show actuators for 90 and 180 when the B port is pressurized. For double vane type: Figures show the intermediate rotation position when the A or B port is pressurized. Component Parts Description Material No.

0.4

None None None None None None None White Black Black Red Red Red Black Black Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Plug connector HDA-CTH (Made by HIROSE ELECTRIC) Red Connector HAD-15S (Made by HIROSE ELECTRIC) Terminal no. 2 x M2.6 X 0.45 Terminal no.

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

None None None None None None None White Black Black Red Red Red Black Black Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Plug connector HDA-CTH (Made by Hirose Electric) Red Connector HAD-15S (Made by Hirose Electric) Terminal no. 2 x M2.6 x 0.45 Terminal no.

LV50-OMQ0002

When the value exceeds 9l, the higher 3 digits(15s) and lower 6 digits(3s) are displayed alternately. When 9L is reached, the display stops with [9] flashing. Accumulation will start automatically in measurement mode after the power is supplied. (When the option to memorize the cumulated value is selected, it will start from the memorized value.)

smcmaintenancepartslist

Description Part number Note 3 4 7, 13 4 7, 13 6, 12 8 9 14 V band for replacement O-ring O-ring O-ring O-ring Quick plug Upper element holder Lower element holder Intermediate holder JIS B2401-1A-P85 JIS B2401-1A-P11 JIS B2401-4D-P85 JIS B2401-4D-P11 KT-FQ1-N FKM KT-FQ1-V Stainless steel 303 Stainless steel 304 Stainless steel 304 Stainless steel 304 AG-9S L-131S L-135S FQ-OP001 BP-13S BP-14S BP-15S