High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

Slit Valve

Description Material Part number Corresponding model CYV 7 Gate A6063 XGT300-2-1S FKM XGT300-9-9S XGT31-503368 O-ring (Gate) Kalrez 4079 XGT300-9-11S 9 Wiper XGT300-4-9S XGT31-5033610 O-ring (body opening side) FKM XGT300-9-10S 11 O-ring (Bonnet assembly) XGT300-9-7S XGT31-5033612 Holding bolt Stainless steel 316 XGT300-2-5S 531 XGT Series Dimensions Non-cassette type/XGT221 Cassette type

Large Flow Air Filter AF800/900 Series

AF800 AF900 11345-5B 11345-5S q r No. Description Material u i w Bronze Stainless steel 1 1 Standard -7 11352-5B 11352-5S y 2 Element u Standard -2 -6 -8 -9 C4SF C4SF-2 C4SF-6 C4LF-8 C4SF-X401 o Note) 3 Bowl assembly 1 t !

HRX-OM-W002

Not included for options Z and Z1. 20: 200V type manufactured befor August 2019 (Serial:XV) can not be set below 10. 21: 200V type manufactured befor August 2019 (Serial:XV) can not be set below 5S/cm. 9.1 Specifications HRR Series 9-2 HRX-OM-W002 Chapter 9 Documents 9.1.2 HRR012/018/024/030-W-10/20-* Table 9-2 Specifications [HRR012/018/024/030-W-10/20-*] Model HRR012-W-10-* HRR018-W-10-

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

(mm) B N2504-N002 U4 33.9 (1.8) . 2 5 ( 1 1 1 ) 2.44 (621 1.18 (30) N2505-N003 45.9 (2.5) .23 (106) 2.52 {Ml 1.18 (30) N2s06-N004 U2 50.0 {2.7) .25 (113) 2.68 (68) 1.18 (30) 2507-N006 3/. 105.6 (5.8) .68 (310) 3.48 (88.5) 1.89 (48) it2508.tit01 0 129.6 17 .21 1.13 (514) 3.84 (97.5) 2.36 (60) t{2510.N002 th 17.2 (0.95) (s7) 2.13 (54) 0.87 (22) t{2511-N003 % 17.2 (0.95) (5s) 2.20 (56) 0.87

NAIV

(mm) B N2504-N002 U4 33.9 (1.8) . 2 5 ( 1 1 1 ) 2.44 (621 1.18 (30) N2505-N003 45.9 (2.5) .23 (106) 2.52 {Ml 1.18 (30) N2s06-N004 U2 50.0 {2.7) .25 (113) 2.68 (68) 1.18 (30) 2507-N006 3/. 105.6 (5.8) .68 (310) 3.48 (88.5) 1.89 (48) it2508.tit01 0 129.6 17 .21 1.13 (514) 3.84 (97.5) 2.36 (60) t{2510.N002 th 17.2 (0.95) (s7) 2.13 (54) 0.87 (22) t{2511-N003 % 17.2 (0.95) (5s) 2.20 (56) 0.87

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

NCQ8

L M9NL 197in (5 m) .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Table of Contents

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Solid state switch Yes Yes Grommet Relay, PLC A93 A93V 2-wire 12 V 24 V 100 V M9N M9NV 3-wire (NPN) IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) Relay, PLC M9B M9BV 2-wire 12 V 24 V Grommet F9NW F9NWV 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols:0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

5s fitting assembly is included. Note 2) The housing assembly and SI unit of F/P/J/G/S kit are not included. Separately place an order for q, w, e, r. Common EXH External pilot Direct EXH outlet with built-in silencer Nil R Note 1) S Note 1) Note 3) S (Built-in silencer) and W (IP65) cannot be combined. Note 1) When both options are specified, indicate as RS.

•

-::-t-D~ F50W 25+55 1 n 2) 12S + 5S ln ;,l) 135+55(n;:4) W~tl, pes (Dlflerenl surfaces. 90 95 '5 Same surface). Wiin 1 pc DM90AVL 15+30(n.=.1}2 9O + 30 ~2 95 + 30 (n 2 4 4) With n pes. 2 ~-u~~rr~_~~ ( " 2~. 4 6~~~__~__~_ 4 ,--8 ' 2 .c..; 1~ "'~__ ("~_ 8 .~~2~' .. .) _ _ ~~=-= ~.~.S.. -) ( " =~ ~.~~ 6_ ) +-_~ = 4 ~.~ 1 . ~6 ,--,L g:~~~A6U With 2 pes. (DrHerent surface-so 25 125 135 gj.

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !