Note IDG30, 30H, 30L IDG5, 50H, 50L IDG60, 60H, 60L, 60S IDG75, 75H, 75L, 75S IDG100, 100H, 100L, 100S 1 2 3 4 5 Body Aluminum alloy Platinum silver coating Case Stainless steel Orifice Stainless steel Holder Silencer Aluminum alloy Aluminum Resin + Copper alloy Replacement parts Part number No.
CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l
95 x 135L 135 -50D (M) -75D (M) x 100L 100 x 160L 160 DCHQB32-5D (M) -100D (M) CHQB80-10D (M) CQ-M5 x 70L 70 x 185L 185 -10D (M) CQ-M10 x 100L x 75L 75 100 -15D (M) -15D (M) x 80L 80 105 x 105L -20D (M) -20D (M) x 85L 85 110 x 110L -25D (M) -25D (M) x 90L 90 115 x 115L -30D (M) -30D (M) x 95L 95 120 x 120L 7 -35D (M) -35D (M) x 100L 100 14.5 125 x 125L -40D (M) -40D (M) x 105L 105 130 x
Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50
Mounting bolt D C C Model D D 55 Mounting bolt C Model Mounting bolt 70 M5 x 55l CHKDB50 CHKDB20 M10 x 70l 5 (M) 5 (M) 75 x 60l x 75l 10 (M) 60 10 (M) x 65l 80 x 80l 15 (M) 65 15 (M) x 70l 85 x 85l 20 (M) 70 20 (M) x 75l 90 x 90l 25 (M) 75 25 (M) 12.4 x 80l 95 x 95l 30 (M) 80 30 (M) 15.8 x 85l 100 x 100l 35 (M) 85 35 (M) x 90l 105 x 105l 40 (M) 90 40 (M) x 95l 110 x 110l 45 (M) 95 45 (M)
C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach
D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310
Mounting bolt D C D D C Model Mounting bolt C Model Mounting bolt M10 x 80l CHKGB20 M5 x 55l 80 CHKGB50 5 (M) 5 (M) 55 x 85l x 60l 85 10 (M) 10 (M) 60 x 90l x 60l 90 15 (M) 15 (M) 65 x 95l x 70l 95 20 (M) 20 (M) 70 x 100l x 75l 100 25 (M) 25 (M) 75 12.4 x 105l x 80l 105 30 (M) 30 (M) 80 15.5 x 110l x 85l 110 35 (M) 35 (M) 85 x 115l x 90l 115 40 (M) 40 (M) 90 x 120l x 95l 120 45 (M) 45 (M)
105 110 115 120 125 130 135 140 165 190 105 110 115 120 125 130 135 140 145 170 195 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 7 x 120l x 125l x 130l x 135l x 160l x 185l x 80l x 85l x 90l x 95l x 100l 30D (M) 35D (M) 15.5 35D (M) 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l CH QB32
x 1 4-M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 70 0.5 Width across flats 8 5 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 12 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: CEP1L12
x 1 4-M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 70 0.5 Width across flats 8 5 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 12 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: CEP1L12
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
X 80l X 85l X 90l X 95l M5 X 40l M5 X 45l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l 15 10.5 7.5 X 100 l X 105 l X 130 l X 155 l M10 X 75l M5 X 40l X 115 l X 140 l X 80l X 85l X 90l X 95l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l M6 X 55l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90
x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l M8 x 90l x 100l x 110l x 135l x 160l M10 x 105l x 115l x 140l x 165l M10 x 120l x 130l x 155l x 180l M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l 9 8 9.5 13.5 15.5 10 15 17.5 3 Compact Cylinder with Air Cushion Series RQ Replacement Parts/Seal Kits
M5 x 80l M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 Note) CX Round bar, Chamfered, Roller 1.03 1.07 1.11 50 Lever with built-in shock absorber 1.26 1.30 1.34 CY 7 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080
90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63-30 -40 -50 -75 -100 R(D)QB80-40 -50 -75 -100 R(D)QB100-40 -50 -75 -100 M5 x 50l x 55l x 60l x 65l x 75l