Bore Size: 50mm, Cylinder Port: NPT, Arm Opening Angle: 105°, Switch Type: Turck NPN DC

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(mm) Bore size A B C D F GA H MM NA NDh8 NN S T Z 6 15 12 14 3 8 14.5 28 M3 x 0.5 16 6 0 0.018 M6 x 1.0 61 (66) 3 117 (122) 10 15 12 14 4 8 8 28 M4 x 0.7 12.5 8 0 0.022 M8 x 1.0 49 105 16 15 18.3 20 5 8 8 28 M5 x 0.8 12.5 10 0 0.022 M10 x 1.0 50 106 ( ) in S and Z dimensions: With auto switch With Air Cushion/Dimensions other than the table below are the same as the table above.

Electric Actuator/Slider Type

35 40 28.5 75 64 5 6 60 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85 51 32 M6 x 1.0 12 95 28 40 117 7.3 60 Size Stroke range (mm) Without lock With lock A VB VC A VB VC 25 15 to 100 244.4 82.4 14.6 285 123 16.3 105 to 300 269.4 310 32 15 to 100 263.1 76.6 17.1 299.9 113.4 17.1 105 to 300 293.1 329.9 20 AC Servo Motor Driver Absolute Type Series LECSS-T ( Type) How

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(Different surfaces, Same surface), With 1 pc. 15 105 110 115 With n pcs. 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 105 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 115 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) With 2 pcs.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

30 95 6.8 40 25 20 to 35 40 28.5 75 64 5 6 60 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85 51 M6 x 1.0 12 95 28 40 117 7.3 60 32 Size Stroke range [mm] Without lock With lock A VB VC A VB VC 25 15 to 100 255.5 82.5 11.5 300.5 127.5 11.5 105 to 300 280.5 325.5 32 15 to 100 266.5 80 14 306.5 120 14 105 to 300 296.5 336.5 757 LEYG Series AC Servo Motor Support Block

CQ2

130 155 Model C D 65 70 75 80 85 90 95 100 105 130 155 70 75 80 85 90 95 100 105 110 135 160 80 85 90 95 100 105 110 115 120 145 170 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 M3 X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l M3 X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l M5 X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90

Table of Contents

Inclined Operation (at a right angle to operating direction) 32 25 105 4.2 + Lo 60 3.4 + Lo 40 200 5.1 + Lo Bore size (mm) Allowable load weight WA (kg) RZQ MI W S 8.

Hydraulic

70 75 80 85 90 95 100 105 110 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105 110 115 120 125 130 155 180 15D (M) 10D (M) 20D (M) 15D (M) 25D (M) 20D (M) 30D (M) 25D (M) 10 35D (M) 30D (M) 15.5 40D (M) 35D (M) x 100l x 105l x 110l 45D (M) 40D (M) 50D (M) 45D (M) 75D (M) 50D (M) M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l

Air Slide Table

MXQ 12B-mZN Shorter total length type Dimensions [mm] M 3 Model M MXQ12B-10ZN 85 MXQ12B-20ZN 95 MXQ12B-30ZN 105 MXQ12B-40ZN 122 MXQ12B-50ZN 132 MXQ12B-75ZN 163 MXQ12B-100ZN 207 MXQ12B-125ZN 232 *3 As the total length has been reduced by removing the extension stroke end adjuster mounting holes, an extension stroke end adjuster cannot be mounted afterward.

CATALOG

140 175 210 L2 105 140 175 210 245 L3 140 175 210 245 280 No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 36 71 106 141 Courtesy of Steven Engineering, Inc. !

smcmaintenancepartslist

EM200-005X4 EM200-010X4 EM200-020X4 EM200-040X4 EM200-074X4 EM200-105X4 L005 L010 L020 L040 L074 L105 L005 L010 L020 L040 L074 L105 EM500-005 EM500-010 EM500-020 EM500-040 EM500-074 EM500-105 EM600-005X4 EM600-010X4 EM600-020X4 EM600-040X4 EM600-074X4 EM600-105X4 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 65 x L250 65 x L250 65 x L250 65 x L250 65 x L125 65 x

MB

105 129 129 TDe8 TY TX TZ TT 6-6-9 9 Series MB Trunnion/Double Clevis Pivot Bracket Part No.

air-filter-e

EM200-005X4 EM200-010X4 EM200-020X4 EM200-040X4 EM200-074X4 EM200-105X4 L005 L010 L020 L040 L074 L105 L005 L010 L020 L040 L074 L105 EM500-005 EM500-010 EM500-020 EM500-040 EM500-074 EM500-105 EM600-005X4 EM600-010X4 EM600-020X4 EM600-040X4 EM600-074X4 EM600-105X4 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 65 x L250 65 x L250 EHM19R10AY EH19R10GV 65 x L250 65

Air Preparation Equipment

EM200-005X4 EM200-010X4 EM200-020X4 EM200-040X4 EM200-074X4 EM200-105X4 L005 L010 L020 L040 L074 L105 L005 L010 L020 L040 L074 L105 EM500-005 EM500-010 EM500-020 EM500-040 EM500-074 EM500-105 EM600-005X4 EM600-010X4 EM600-020X4 EM600-040X4 EM600-074X4 EM600-105X4 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 65 x L250 65 x L250 EHM19R10AY EH19R10GV 65 x L250 65

CV/MVGQ

size (mm) 10 16 Mounting hole 7 3.2 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) LA H F D LY NN C LX Y B LC LT MM X A LB LH LZ NA NB S Z Z S Z S Z S 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 116 [117] 117 [118] 128 [129] 129 [130] 10 16 28 8 4 M8 x 1 14 24 7 84 12 1.6 5 72 15 15 9 32 9.5 60 37.5 4.5 16.5 M4 x 0.7 12.5 52.5 28 8 5 M10

CV/MVGQ

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S 128 [129] 129 [130] 116 [117] 117 [118] 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 10 16 84 72 60 52.5 M8 x

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IDF-S0183 IDF-S0202 IDF-S0184 IDF-S0185 1/2 725 IDF6E 109 5.6 15 270 410 71 275 85 616 240 3/4 749 IDF8E 111 6.1 15 270 410 75 300 90 646 240 3/4 815 IDF11E 138 6.3 15 270 405 89 300 90 653 240 1 897 IDF15E1 135 10.2 15 300 405 105 380 106 775 270 49 Series IDF/IDU Specific Product Precautions 1 Be sure to read this before handling. Refer to page 1154 for Safety Instructions.

Table of Contents

CY Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa.

CJ2

D-A7 D-A80 D-A73C D-A80C 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 CP95 Symbol Specifications D-C7 D-C80 NCM -XA Change of rod end shape D-A7H D-A80H Band mounting style (6, 10, 16) -XB6 Heat resistant cylinder (150C) Not available with switch & with air cushion NCA -XB7 Not available

Modular F.R.L. Unit

220 77.5 80 50 40 18 9 88 35 9 4.6 74 3 226 187 38 105 235 93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 105 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 105 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 105 297 Note 1) For AC20 only, the position of the pressure gauge is above the piping center.