High Vacuum Angle Valve

D-G

CS1

D-A5/A6, D-A59W Tie rod mounting D-G3/K3 Band mounting Solid state swich D-F5/J5, D-F5NT, D-F5W/J59W, D-F5BA, D-F5F Tie rod mounting 1.10-1 Air Cylinder/Standard Series CS1 Lube, Non-lube: 125, 140, 160, 180, 200, 250, 300 Air-hydro: 125, 140, 160 How to Order CS1 L 300 160 JR Rod boot/Cushion Rod boot Mounting J K N R H Nylon tarpaulin Heat resistant tarpaulin No cushion With cushion on

Thermo-chiller/Rack Mount Type

YX Edition B Edition D The HRR010 (air-cooled type, water-cooled type) has been added. Number of pages has been increased from 36 to 44. YV Edition C Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

121.5 110.5 95.5 80.5 Operating range Note) Operating range Note) 8 8 8 5.5 5 5 5 5.5 11.5 11.5 12 12 12 Operating range Note) Perpendicular electrical entry is not available for 50 and 63. ( ) D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV MY1CW25/32/40/50/63 B A Reed Switch Solid State Switch D-Z73, D-Z76, D-Z80 (mm) D-Y7BAL (mm) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) D-Y59 , D-Y69 , D-Y7P(

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

) (1600) (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1CW50 MY1MW40 MY1MW40 MY1MW40 (1300) (1300) (1300) (1300) 60 60 1.

CATALOG

D-G5P D-K59 D-5NTL D-H7A1 D-H7A2 D-H7B D-H7C D-G59W D-G5PW D-K59W D-G59F D-G79 D-H7PW D-H7BAL D-H7LF D-H7NF D-G5BAL D-H7PW D-H7BW 24VDC 110VAC 220VAC 24VDC 24VDC 110VAC 220VAC 24VDC 110VAC Yes/2 Wire D-B54 Yes/2 Wire D-B53 No/2 Wire D-B64 D-B73 D-C73 D-C73C D-B76 D-C76 D-B80 D-C80 D-C80C Yes/2 Wire Yes/2 Wire 20mA 4~8VDC 50mA 40mA 20mA 24V 48V 110V No/2 Wire ACCESSORIES SWITCH BANDS FOR

A

D-G5P D-K59 D-5NTL D-H7A1 D-H7A2 D-H7B D-H7C D-G59W D-G5PW D-K59W D-G59F D-G79 D-H7PW D-H7BAL D-H7LF D-H7NF D-G5BAL D-H7PW D-H7BW 24VDC 110VAC 220VAC 24VDC 24VDC 110VAC 220VAC 24VDC 110VAC Yes/2 Wire D-B54 Yes/2 Wire D-B53 No/2 Wire D-B64 D-B73 D-C73 D-C73C D-B76 D-C76 D-B80 D-C80 D-C80C Yes/2 Wire Yes/2 Wire 20mA 4~8VDC 50mA 40mA 20mA 24V 48V 110V No/2 Wire ACCESSORIES SWITCH BANDS FOR

MY1

(RedGreenRed) D-Y7BWV D-Y7BW D-Y7NWV D-Y7NW D-Y7PW Perpendicular D-Y7PWV Auto switch part no.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV ( ) MY1CW 25, 32, 40, 50, 63 B A Solid state switch D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) A B A B Reed switch D-Z73, D-Z76, D-Z80 D-Y7BAL 63 50 40 32 25 Mounting position 40 32 25 Mounting position 25 Mounting position 32 40 50 63 A 323.5 278.5 157.5 127.5 97.5 157.5 127.5 97.5 97.5 127.5 157.5 278.5 323.5 A A B 136.5 121.5

Slider Type Ball Screw Drive/11-LEFS Series

0 Driver type * Select D for the vacuum port for suction of 50 L/min (ANR) or more. o Cable length Note 3) !

Thermo-con/Rack Mount Type

WO Edition D Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

MY1

/Y7PV D-Y7W/Y7WV D-Y7BA D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BA 5 5 5 5.5 5.5 5 5 5 5.5 5.5 Perpendicular electrical entry type and D-Y7BAL cannot be mounted on 16, 20, 50 and 63.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF Auto switch model D-M9NV D-M9N D-M9B D-M9BV D-M9PV D-M9P Electrical entry direction In-line Perpendicular In-line Perpendicular In-line Perpendicular LEJ LEJ Wiring type 2-wire 3-wire NPN PNP Output type LEL Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) LEM Current consumption 10 mA or less Load voltage 24 VDC (10 to 28 VDC

Table of Contents

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

33

(per unit) Applicable model A B C D HRSE012-AHRSE018-AHRSE024-A240 (335) 505 (540) HRW HRS-TK003 HECR HRSE012-A--T HRSE018-A--T HRSE024-A--T 240 (335) 555 (590) HEC HEB HED HEA IDH Anchor bolt (M8) D C (Prepared by user) Anti-quake bracket Material: Zinc steel plate Mounting view A B w Bypass Piping Set Note) To be mounted by user.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

15

Auto Switch Proper Mounting Position (mm) A B C D Auto switch model D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 36.5 41.5 56.5 67 67 83.5 92.5 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 17.5 17.5 17.5 18 18 19.5 18.5 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 24.5 29.5 44.5 55 55 71.5 80.5 D-A9 D-A9V K dimension (Switch rail height) Bore

IDG

Note) When the symbol C or D is designated, the same part number of an auto-drain listed on page 14-19-33 will come together.

Series IDG

Note 2) When symbols C or D are specified, an auto drain with a part number shown on page 18 is mounted.

Electric Actuator / Slider Type 《 AC Servo Motor 》

See the table below Belt tension Size Belt N Part number Bolts LEF25 LE-D-6-2 19.6 pull LEF32 LE-D-6-3 49.0 LEF40 LE-D-6-4 98.1 4. "Pulley plate" is installed. Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.