Aluminum High Vacuum Angle Valve

D16 X65 XLA XSA Pilot port direction Seal material changed part Bonnet assembly XVD Symbol Nil Rear (as seen from body connection point) Left (as seen from body connection point) Right (as seen from body connection point) K M Pilot port direction Temperature 5 to 60C 5 to 150C XLG100-30-1-1 XLG100-30-1H-1 Part no.

High Vacuum Angle Valve

D16 X65 XLA XSA Pilot port direction Seal material changed part Bonnet assembly XVD Symbol Nil Rear (as seen from body connection point) Left (as seen from body connection point) Right (as seen from body connection point) K M Pilot port direction Temperature 5 to 60C 5 to 150C XLG100-30-1-1 XLG100-30-1H-1 Part no.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

auto switch unit) CDRBU2WU40-S/D Single vane type/Double vane type (mm) h Keyway dimensions l b CRB2 h (h9) l b (h9) Model 52 64 CRBU2 CDRBU2WU40 0 0.030 4 20 0 0.030 4 CRB1 85 MSU CRJ 25h9 0 0.052 11.5 2-5.5 through 2-M5 x 0.8 through CRA1 10g6 0.005 0.014 20 2 CRQ2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MSQ 30 2-5.5 through 2-5.5 through 38 38 MRQ 20 3 5 5 D16

ZP

Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16

ZP

Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25h9 0 0.052 11.5 2-5.5 through 2-M5 x 0.8 through CRA1 10g6 0.005 0.014 20 2 CRQ2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MSQ 30 2-5.5 through 2-5.5 through 38 38 MRQ 20 3 5 5 D16 14 2031 53 B port A port (145) 2-M5 x 0.8

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25h9 0 0.052 11.5 2-5.5 through 2-M5 x 0.8 through CRA1 10g6 0.005 0.014 20 2 CRQ2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MSQ 30 2-5.5 through 2-5.5 through 38 38 MRQ 20 3 5 5 D16 14 2031 53 B port A port (145) 2-M5 x 0.8

MQQ

ML2B W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End C J G5-S Allowable Lateral Load at Rod End CV 12 MVGQ 25 10 CC Maximum allowable lateral load W (N) RB 8 J 20 6 D16 -X 4 202 10 Data 6 30 60 75 100 Stroke (mm) Note) The allowable lateral load varies depending on the size of the load (the distance to the loads center of gravity).

MVGQ

CC MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions RB A A E E Symbol Symbol DB DB Bore size (mm) Bore size (mm) Stroke Stroke J Up to 50 st Over 50 st 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st 12 12 39 0 8 43 4 16 6 55 D16 16 43 0 10 49 6 22 8 65 20 20 0 14.5 12 10 57 47 61.5 27 10 74 -X 20Data 10-16-7 8 Valve Mounted

Table of Contents

ML2B W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End C J G5-S Allowable Lateral Load at Rod End CV 12 MVGQ 25 10 CC Maximum allowable lateral load W (N) RB 8 J 20 6 D16 -X 4 202 10 Data 6 30 60 75 100 Stroke (mm) Note) The allowable lateral load varies depending on the size of the load (the distance to the loads center of gravity).

CQS

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 0.5 19.5 5 10 6 5 5 10 17 0.5 1 [3.5] 6 16 1 21.5 5.5 9.5 5.5 4.5 5.5 9.5 19 1 0.5 [3] 5.5 Bore size (mm) RQ 20 5 25 9.5 13 9 0.5 9.5 13 22.5 5 3.5 [1] 9 25 7 27 11.5 14 10 1.5 11.5 14 24.5 7 5.5 [3] 10 MU Double Acting, Double Rod 12 19.5 9.5 5.5 0.5 9.5 5.5 5.5 1.5 17 5.5 3.5 [6] 1.5 D16

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25 10 10 25 CX 20 20 5 5 D16 16 -X 201 1 Data 0.5 10 10 50 100 200 0.5 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) (3) 25 Stroke, V = 400 mm/s (4) Over 25 Stroke, V = 400 mm/s 300 300 100 100 200 200 80 80 100 100 63 63 50 50 50 Load

MG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25 10 10 25 CX 20 20 5 5 D16 16 -X 201 1 Data 0.5 10 10 50 100 200 0.5 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) (3) 25 Stroke, V = 400 mm/s (4) Over 25 Stroke, V = 400 mm/s 300 300 100 100 200 200 80 80 100 100 63 63 50 50 50 Load

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Auto switch type Bore size Nil Without auto switch 16 25 40 D16 mm 25 mm 40 mm For the applicable auto switch model, refer to the table below.

MXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Model Height x Width (mm) Height comparison to MXS MXF8 D16 x 58 67% MXF12 18.5 x 68 59% MXF16 21 x 80 53% -X MXF20 27 x 92 54% Neat appearance 20Protecting stopper section with cover realizes neat appearance.

CEx-OMI0064

2 , 0 3 0 4 0 5 OFF , 0 6 () 0 7 () 0 8 () 0 9 () 37 - 9 BCD CEU5B-BCD (1) BCD : D-sub (CEU5B-D ) DX10M-36S(HRS ) (2):DX30AM-36P(:HRS ) DX30M-36-CV(:HRS ) ()(), ,ASSY MISUMI SHPT SHPT-H-A-36SHPT-HH-A-36:0.250(m) (3) 18 (DX10M-36S) 19 36 -2 Bit0 19 D12 10 1 Bit0 1 D0 10 -2 Bit1 20 D13 10 1 Bit1 2 D1 10 -2 Bit2 21 D14 10 1 Bit2 3 D2 10 -2 Bit3 22 D15 10 1 Bit3 4 D3 10 Bit0 23 D16

MQQ

ML2B W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End C J G5-S Allowable Lateral Load at Rod End CV 12 MVGQ 25 10 CC Maximum allowable lateral load W (N) RB 8 J 20 6 D16 -X 4 202 10 Data 6 30 60 75 100 Stroke (mm) Note) The allowable lateral load varies depending on the size of the load (the distance to the loads center of gravity).

Serial Transmission System Series EX250 Series EX500

D16 For 16 stations Note) In case of D0, only DIN rail fittings are attached. Tie-rod base SS5V W 1 A1W D 05 U 10S Cassette base U SS5V W D 05 16S 1 A1W Enclosure IP67 Series DIN rail length specified 1 2 SV1000 SV2000 Standard length Nil 3 SI unit specification Specify a rail longer than the standard length.

AC Servo Motor Driver (CC-Link Type)

The right-hand segments of b01, c02 and d16 indicate the axis number.

AC Servo Motor Driver (CC-Link Type)

The right-hand segments of b01, c02 and d16 indicate the axis number. (Below example indicates Station No.1) Station Station Station No.64 No.1 No.2 -10- (2) Indication list Indication Status Description Power of the CC-Link master module was switched on at the condition that the power of CC-Link master module is OFF.