3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

1 VQ100 Manifold base type 1 Plug-in unit Stations Use only when ordering SI manifolds. 02 2 stations *18 18 stations Option * All std. 1W valves.

VQZ100/200/300

Coil voltage 1 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others When requiring AC specification of grommet or special voltage, consult SMC. 2 3 4 5 6 9 2.10-5 VQZ100/200/300 Body Ported Standard Specifications Seal Metal seal Rubber seal Air, Inert gas Fluid 0.7MPa (High pressure style: 1.0MPa) 0.7MPa Max.operating pressure 0.1MPa 0.15MPa

SFOD-OMT0005CN

Movement Speed Position Acceleration Deceleration Area 1 Area 2 In pos force Force speed force 2 2 mode mm/s mm mm/s mm/s mm mm mm Value mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () (1)No.

Compact Vacuum Ejector Series ZQ

Air, inert gas Fluid 0.6 MPa Maximum operating pressure 0.3 MPa Minimum operating pressure 5 to 50C Ambient and fluid temperature Not required Lubrication Manual override Non-locking push type / Lock type (tool type) Push-lock type Non-locking push type / Lock type (tool type) Rated coil voltage DC12, 24 V DC12, 24 V, AC100, 110, 200, 220 V DC 1W 1W 0.5W 100 V AC 0.6VA (6mA) 0.5 VA (5 mA)

VQZ1000/2000/3000

Yes Note) None Note) Yes Yes (W/o indicator light) Yes (W/o indicator light) Note) Note) Coil voltage Note) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note) DIN is applicable to VQZ2000/3000. Bracket Assembly Note) Part no.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

With(Wihtout light) Note) Standard lead wire length: 300mm Coil voltage 1 2 3 4 5 6 9 100VAC(50/60Hz) 200VAC(50/60Hz) 110VAC(50/60Hz) 220VAC(50/60Hz) 24VDC 12VDC Others 23 Series VQZ 3 Port Solenoid Valve Manifold Options Manifold Options Blank plate VVQZ100-10A-2 VVQZ200-10A-2 VVQZ300-10A-2 Used to reserve a valve mounting space on the manifold for future use.

CE

1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

New

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

JXCx-OMT0061CN

(OUT05)OFF 11INPOFF ... 12BUSY ON 0mm 50mm 60mm 100mm 5 13DRIVEOFF 14No.2 ON (OUT1ON) 15INPON 16BUSYOFF 10mm 57 - 13.2 100mm/s 100mm (No.1 ) 100mm ,10mm/s 50% 5mm (INPON )50mm/s 50mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1

Large Type Vacuum Unit Series ZR

lead wire Solenoid valve rated voltage Plug connector type LO Without connector Nil Air operated M Lead wire length 0.3m 5 24VDC MN Without lead wire 6 12VDC MO Without connector V 6VDC G Lead wire length 0.3m Grommet type S 5VDC H Lead wire length 0.6m R 3VDC 100, 110 VAC (with rectifier) D1 100VAC (50/60Hz) L Lead wire length 0.3m D2 110VAC (50/60Hz) Plug connector type LO Without connector

ZQ

Rated coil voltage Pilot valve Check valve Standard type (1W) 1 2 3 4 5 6 Nil 100V AC 200V AC 110V AC 220V AC 24V DC 12V DC Nil K None With check valve DC low wattage type (0.5 W) Not available for AC type Y L Latching positive common Note) The check valve has a function to prevent the exhaust air from the silencer overflowing to the vacuum port side when a manifold is used.

Table of Contents

amount (mm) Plate displacement amount (mm) MGP MGPA16-250 MGPA16-250 0.35 MGPA -400 50 50 63 63 MGPA -400 50 63 0.6 0.3 50 50 63 63 MGPA -300 0.5 50 63 MGPA -300 MGPA16-150 MGPA16-150 MGPA16-100 MGPA16-75 0.25 0.4 MGP MGPA16-100 50 50 63 63 MGPA -200 50 63 MGPA -200 0.2 MGP MGPA16-75 0.3 0.15 50 50 63 63 MGPA -150 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -50 0.2 50 50 63 63 MGPA -100 0.1

MG

amount (mm) Plate displacement amount (mm) MGP MGPA16-250 MGPA16-250 0.35 MGPA -400 50 50 63 63 MGPA -400 50 63 0.6 0.3 50 50 63 63 MGPA -300 0.5 50 63 MGPA -300 MGPA16-150 MGPA16-150 MGPA16-100 MGPA16-75 0.25 0.4 MGP MGPA16-100 50 50 63 63 MGPA -200 50 63 MGPA -200 0.2 MGP MGPA16-75 0.3 0.15 50 50 63 63 MGPA -150 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -50 0.2 50 50 63 63 MGPA -100 0.1

C95Series

I-B DA DB DL lou number II:, Imm) IDe OX D E DO (>"UN 'u, O S DH Z DDH9-: 32 164 10"" 36 18' 12 ' 45 202 ". . . , 46 31 21 18 5 38 26 51 6.5 6.6 11 7 41 28 54 6.5 6.6 11 9 ' 50 32 65 7.5 9 15 11 52 35 24 22 5.5 65 45 33 30 6 50 222 16' '" 52 40 67 7.5 9 15 11 66 50 86 10 11 16 12.5 ' 75 50 37 35 6.5 95 60 47 40 6,5 63 250 16 ' ." 76 60 96 10 11 18 1 3 5 71 70 20 114 70 55 50 7.5 ~, Rotating

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

7

S CAC408 50 50A Flange R 230 VAC G N.O.

LEC-OM02704CN

20 50 20 9 15 9 (2) (a) PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0003 () PB27 CDS 50 pulse PB28 CDT 100 ms (b) CDS [pulse] 0 pulse CDS CDT100ms 100 4.0 10.0 4.0 10.0 120 84 120 84 3000 4000 3000 4000 20 50 20 50 9 16 10 10 .2 10.1

3

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

LECA6_C

LE C A 6 N A (DC24V) (LE ) LESH16RAJ-50BS-R16N1D 6 64 LESH16RAJ-50 I/O N NPN DIN P PNP 1 1.5m D DIN 3 3m 5 5m <> NPNPNP LESH16RAJ-50 NPN NPN 7 - 2.3 1 I/O LEC-CN5-* PLC 1 3 DC24V CN5 CN3 CN4 2 1 () LE-CA-* CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 3 50 200 50 200 3 3 CN1 DC24V <> AWG20 (0.5mm 2) USB A-miniB type USB LEC-W2